Modular F.R.L. Units

Cross spacer E F F E E B C A E D E: 4 Rc F: Without thread Model Note) Applicable model Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 D C B A Y24-01-A Y24-02-A Y34-01-A Y34-02-A Y44-02-A Y44-03-A Y54-03-A Y54-04-A AC20-A 40 22 40 40 48 AC25-A, AC30-A 28 43 49 54 AC40-A 36 48 60 Caution on Mounting 62 AC40-06-A 40 62 72 1.

Programless controller Step motor (servo 24 VDC)

Decimal display 10 11 12 13 14 15 Hexadecimal display A b c d E F 13 No. JXC-OMU0029-A 3.2 Parts description The detailed descriptions of each part are as follows: (e) (d) (c) No.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

New

type VXF21A<<C S D C J Qp2 K I J R Tp2 K I S R Q z 280 (32) U L H L G1/2 G1/2 E E U 1/4 Exhaust port H 1/4 Exhaust port F F G Port size 2 x P G Port size 2 x P Faston terminal A B D C J K I 11 Q R S L E U 1/4 Exhaust port H F G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF21A< VXF22A< VXF23A< 3/4 1 1 1/2

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

Integrated Controller

Rightward mounting A B C D E 16 30 to 100 21.5 46.5 33.5 34.5 (2) 2.9 105 to 300 41.5 53.5 25 30 to 100 27 62.5 39 50.5 (2) 4.2 105 to 400 52 64 32 30 to 100 30.5 65.5 42.5 53.5 (2) 4.9 105 to 500 60.5 72.5 The values in the table above are to be used as a reference when mounting auto switches for stroke end detection.

•

Width across flats KA ~\, -t n I E ~ I='" "r\ f'iiI .J ... " UJ o o ) ~ L::: ~ ::;: "" ~E ~ ~ c Cl DC N f I-A _ K F _ L{ ~M [T D B " m :Jl Cl (mm) c.

CHKD/CHKG

Related Products F with effective thread depth G DC H 2 x K through 4 x L counter bore M 4 x CD LW D LH LT B + Stroke X1 X1 E LX BB Y1 SS Z + Stroke LA + Stroke 32 to 100 (mm) Bore size (mm) LA B BB C F L CD D E G H K LH LT LX 20 25 32 40 50 63 80 100 76 6.6 9.5 depth 5.4 43 12 70 10 18 10 M8 x 1.25 6 5.5 23 15 58 78 6.6 9.5 depth 5.4 45 76 14 12 18 M10 x 1.5 12 6 5.5 26 15 64 11 depth 6.5

IDG

5 to 50 Inlet air temperature (C) (1) IDG60L 5 to 50 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) Inlet air flowrate (l/min(ANR))(2) Standard performance JIS Symbol 40 100 150 227 320 400 Outlet air flowrate (l/min(ANR)) Purge air flowrate (l/min(ANR))(3) 75 110 170 240 300 25 40 57 80 100 Inlet air pressure (MPa) 0.7 Inlet air temperature (C) 25 25 25 1 l/min (ANR

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

20 11 16 23 40 60 60 AC-A1bore size +0.027 0 80 M12 x 28 31 100 65 28 16 R 22 13 18 26 45 67 75 U D drill through C 0.3 +0.033 0 100 M12 x 32 35 118 80 28 17 R 24 13 20 30 50 74 90 F E +0.033 0 125 M14 x 36 41 140 90 31 20 R 26 15 22 30 55 81 112 0 0.3 G A +0.033 0 160 M16 x 40 54 174 100 34 22 R 30 17 25 40 65 95 140 H B Knuckle pin Material: Carbon steel C (f8) Order no.

42

C kit (Plug lead type) 6.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

How to Order CP96S B W J 32 100 C CP96SD B W J S 32 100 M9BW C With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B Basic L Axial foot F Rod flange G Head flange C Single clevis D Double clevis Bore size Nil 2 S 1 3 3 n n 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm * Mounting brackets are shipped together, but not assembled.

CL

Use care that auto switch for rail mounting style is not available. 9-2-16 15 Fine Lock Cylinder Double Acting, Single Rod Series CLM2 20, 25, 32, 40 How to Order CL J L E 25 100 H CL1 CLM2 Without auto switch MLGC E J H7BW L 25 H 100 CDLM2 With auto switch CNG Number of auto switches MNB Built-in magnet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

Table of Contents

TAU1065 B Length per roll Color Operating temperature (C) Symbol Length Symbol Color Tubing model 20 100 20 m roll 100 m reel B Black Precautions Be sure to read before handling.

CNA

BF d D e H1 AL A T 8 f l K lC ZZ + l + Stroke h + l FT BN N lB H M S + Stroke ZZ + Stroke Long stroke (50 to 100) 4-FD d RY FY BF e 8 f l ZZ + Stroke Z FT RT FZ FX ZZ + l + Stroke h + l (mm) Bore (mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8 M8 X

Membrane Air Dryer

U O S L H o t (L) A M B C P (H) OUT IN Q N N D R (J) OUT (K) F E S G 9 (IDG3, 5 only) (Maintenance space 100 mm or more) With float With drain guide Port size A B C D E type auto-drain F G H J K L M N P Q R S Model T U IDG3V3, 3HV3, 5V3, 5HV3 IDG10V3, 10HV3 IDG20V3, 20HV3 1/4, 3/8 284 202 41.5 10 119 144 174 97 5.5 12 73 173 180 237 262 93 30 24 5.5 29 67 3.2 192 1/8, 1/4 254 55 14 208 201

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 27 11.