60

with Built-in Y-strainer For Water/Single Unit How to Order (Single Unit) Specifications For Air For Oil For Steam Dimensions Construction For Water R VXK AC 21 VXK DC 21 2 2 0 0 1 1 01 G 5 1 01 G Bracket Model Refer to the Table (1) shown below for availability.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m (b) (d) Shield Signal name Terminal No.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

KJ

(inch) Model D1 L M Weight (g) Applicable tubing 5 32 KQ2C03-00 KQ2C07-00 KQ2C09-00 KQ2C11-00 17 18 1 2 3 6 10.4 13.2 15.2 17.9 16 17 18.5 21 1 4 5 16 20.5 3 8 22.5 Plug: KQ2P, KQP Applicable fitting size d (inch) Weight (g) Model Note) D L A KQ2P-01 KQP-01 KQ2P-03 KQP-03 KQ2P-05 KQP-05 KQ2P-07 KQP-07 KQ2P-09 KQP-09 KQ2P-11 KQP-11 KQ2P-13 KQP-13 1 8 5 32 3 16 1 4 5 16 3 8 1 2 5 6 6.8 8.5

3 Port Solenoid Valve Metal Seal Series VZ200 1

4 Rc 1/8 C6, C8 C6, C8 Rc 1/4 VZ415VZ425Base mounted (Without sub-plate) VVZ400-32A-2 VVZ400-31A-2 VP Port size Rc 1/4 VZ412-01 VZ422-01 Body ported Applicable valve model VG Blanking plate VVZ400-31A-1 VVZ400-32A-1 VP VV3Z4-50-061-C8 Screws and Gasket Assembly Part No.

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-06 AS121FG-U10/32-07 18.3 23.1 11.7 13.5 18.1 22.9 11.6 12 6 1/4" 13.5 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 8 3/16" 36.1 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01

3 Port Air Operated Valve Series SYJA300

8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5

JXCx-OMY0004

Caution 1.

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Metric size Inch size 100 200 205 M5 standard 1/8 standard 1/4 standard 3.2 4 6 8 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" Use 1/8" tube.

0.

Port size [2(A) port] 1 1 (P) 3 (R) CP Without sub-plate Rc 1/8 01 Note) For optional thread type, refer to page 32.

JXCx-OMY0006

Alarm was generated in order of (1) (5) 0-7 Alarm 1 8 8-15 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) Alarm 2 0 (1) (2) (3) (4) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) 9 (1) to (5) in the table indicates the alarm codes which are generated. Refer to "15.2. Alarm and countermeasures (P.64)" for detailed alarm information. 8-15 Alarm 4 5 Please refer to 20.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

connector VZS VFS 20 (12, 14 port) 10.5 (2, 4 port) VS4 85.5 72.5 VQ7 10.5 PE port 29 14 SMC EVS M5-2 port 12, 14 port 1/8, 1/4-2 port 2, 4 port 1/8, 1/4-2 port 3, 5 port 21 21 VFN 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4

Intrinsically Safe Valve

Electrical entry TT is approved for Class I, II, III, Division 1, Groups A, B, C, D, E, F, G. Electrical entry L and LL is approved for Class I, Division 1, Groups A, B, C, D. 4.

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 597 Series AS20-D Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

-23 AS131F-M5-07 1/4" 8.4 3.2 17 24.4 M5 x 0.8 12 21.6 20.7 31.9 13.7 9.3 17.5 13.1 30.9 12.7 AS231F-01-04 AS131F-U10/32-07 1/4" 9.3 4 10-32UNF 24.9 12 18 14.2 35.2 30.2 32.1 27.1 1/8 (12.7) AS231F-01-06 AS231F-01-01 17 12.7 30.9 17.5 9.3 13.1 24.4 8.4 26.9 36.3 13.5 1/8" 22.9 14 11.6 6 10.9 AS231F-01-08 AS231F-01-03 9.3 30.9 40.8 18.5 5/32" 28.2 16.2 15.2 8 12.9 21 24.9 18 12 AS231F-02-04

Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0