Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ5 VQZ VQD Type of connection 3(R) port A, B porting P port R port 1(P) port 4(A), 2(B) port Type of connection 2-4-187 VQ0/1000 Kit (D-sub connector) F The D-sub connector reduces installation labor for electrical connections.

Metal Seal/Rubber Seal Series VQ Body Ported

A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Hydraulic

MA a A MA a Air release R (max.)

Secondary Batteries

With bracket a Option w Note) Applicable to 90-AF40-06, 90-AFM40-06 and 90-AFD-40-06.

F

E A D: M-5E B U L K H E A D R E D U C E R: M-5ER R E D U C I N G B U S H I N G: M-5B M5 female to 18 female taper M5 female to 18 male taper P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R T E C H N I C A L SPECIFICATIONS S T R A I G H T B A R B C O N N E C T O R: M-01AU-4 M-01AU-6 S T R A I G H T A D A P T O R: M-01H-4 M-01H-6 Applicable Tube Material Nylon Soft Nylon Polyurethane

Body Size: 5000, Thread: Rc, Port Size: 06 (3/4), Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 06 (3/4), Option: None, Voltage: 5 (24 VDC), Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: None, Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 06 (3/4), Option: None, Voltage: 5 (24 VDC), Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 06 (3/4), Option: None, Voltage: 5 (24 VDC), Lead Wire: G (Grommet, Lead Wire Length: 300mm), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: C (Push-turn Locking Lever Type), Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 06 (3/4), Option: None, Voltage: 5 (24 VDC), Lead Wire: Y (Type Y, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 06 (3/4), Option: None, Voltage: 5 (24 VDC), Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: C (Push-turn Locking Lever Type), Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 06 (3/4), Option: None, Voltage: 5 (24 VDC), Lead Wire: G (Grommet, Lead Wire Length: 300mm), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 06 (3/4), Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 06 (3/4), Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: C (Push-turn Locking Lever Type), Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 3/4, Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: Type D, DIN Terminal w/Connector, Surge Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Slotted Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 3/4, Option: None, Voltage: 24 VDC, Lead Wire: Type D, DIN Terminal w/Connector, Surge Suppressor: None, Manual Override: Push-turn Locking Slotted Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 3/4, Option: None, Voltage: 24 VDC, Lead Wire: Grommet, Lead Wire Length: 300mm, Surge Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Lever Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 3/4, Option: None, Voltage: 24 VDC, Lead Wire: Type Y, DIN Terminal w/Connector, Surge Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Slotted Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right