C85

10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4 4 6 6 8 10 6.0 6.75 6.75 9 10.5 Floating joint: Series JA In the case of dimension without C M M U U D F G B B E H C E P A (mm) M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B C D E F G H Bore Model Nominal thread dia.

C85

H G D EW F SW RR U WH 12 15 M4 x 0.7 12 M5 x 0.8 4.2 M12 x 1.25 8 19 11.5 9.5 28 6 8 7 7 4 12 10 16 10 4 6 16.7 12 15 M4 x 0.7 12 M5 x 0.8 4.2 M12 x 1.25 10 19 11.5 9.5 6 8 28 7 7 4 12 10 16 10.5 4 6 16.7 16 18.3 M6 x 1 16 M5 x 0.8 6.2 M16 x 1.5 12 12.5 24 5 10.5 38 9 12 10 6 8 17 14 22 14 6 8 19.7 16 18.3 M6 x 1 16 M5 x 0.8 6.2 M16 x 1.5 16 24 12.5 10.5 5 38 9 12 8 10 6 17 13 22 14 6 8

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Otherwise, unexpected malfunctions, such as knocking, may occur. 14.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H

C76

Piston rod (Rubber cushion only) Bore Stroke C With rod boot Wh NCA K KK DC e -X KA 20AM 9 9 Rod cross section f I Data h (mm) BE AM 20 24 C 12 14 D 37.5 46.5 FA 30 35 FB 14 16 K 10 12 KA KK KV 38 50 KW 7 8 TDH9 TW 34.5 42.5 WH 38 45 Eh8 EE G 9 12 H 58 69 HR N 17(19) 22(25) NB 34.5 42.5 S 68 89 XB 47 57 XC ZZ 140 174 SW 17 19 TC M8 x 1 Bore 30 0 0.033 +0.036 0 10 32 40 97 122 M30 x 1.5 G

C76

Rail mounting type (A) Band mounting type (B) or non-magnet CP95 ZZ + Stroke NCM C76KE Non-rotating, Piston rod (Rubber cushion only) Bore Stroke C With rod boot Wh NCA K KK DC e -X KA 20AM 9 9 Rod cross section f I Data h (mm) AM 20 24 BE C 12 14 FA 30 35 K 10 12 KK KV 38 50 TDH9 TW 34.5 42.5 D 37.5 46.5 FB 14 16 KA KW 7 8 WH 38 45 EE G 9 12 N 17(19) 22(25) XB 47 57 H 58 69 NB 34.5 42.5

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

NCA D-X Single/Double Knuckle Joint 20Data A, H Dimensions when Mounting a Single/Double Knuckle Joint together with a Rod End Nut Symbol H A Applicable knuckle joint part number Bore size (mm) 125 140 160 180 200 250 300 L1 H1 A H I type single knuckle Y type double knuckle 125 65 Bore size (mm) 125 140 160 180, 200 250 300 50 3.5 100 156.5 I-12 Y-12 110 125 65 50 3.5 105 161.5 I-14 Y-14

42

( ): Values for 3/8" VFR 2-position double: VQ425 -l 3-position closed center: VQ435 -l 3-position exhaust center: VQ445 -l 3-position pressure center: VQ455 -l 0 1 0 1 0 1 0 1 G H G H G H G H G H 3-position double check: VQ465 -l 0 1 VQ7 178.5 73 42.5 50 Indicator light 164.5 178.5 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light 59 73 42.5 50 11(12.5) 11(12.5) 2 4 4(A) port 2(B) port

5 Port Solenoid Valve Series SV1000/2000/3000/4000

14 14 14 14 14 14 14 (5.5) (35) S0710-5 S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 62 72 102.4 39 12 12 12 12 12 21.8 5 4 4 x M4 mounting hole SI unit n 8 7 6 5 4 3 2 1 Stations D side U side [Communication connector D-sub] C8: 3(R) port C8: 8 One-touch fitting DIN rail clamping screw 76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12

Integrated Controller

H A B C H A B C 16 25 32 16 25 Rod flange: EQY H -F Head flange: EQY H -G LL FV M FV M FZ FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.

Air Slide Table Series MXQ

7 7 6.5 6.5 3.2 3.2 A 12.5 5.7 12.5 5.7 B H (NN 1) x H G Section AA Section BB (mm) ZZ 53 63 77 91 116 142 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 17 28 40 52 78 105 I 11 10 12 14 13 12 H 25 28 31 29 30 NN 2 2 3 3 4 4 G 7 14 8 8 31 N 4 4 6 6 6 6 HA 19 28 27 31 58 60 Model F 25 25 26 32 46 50 GA 13 14 29 39 37 61 KA 82.5 112.5 NA 4 4 4

HRX-OM-W002

COMP.T H No.9 Display in the range of 0 to 1,000,000 screen Accumulated operation time of fan FAN.T H No.10 Display in the range of 0 to 1,000,000 screen Used time of dust filter 1 FLTR.T H No.11 Display in the range of 0 to 1,000,000 screen Used time of DI filter 2 DI.T H No.12 Display in the range of 0 to 1,000,000 screen Instantaneous power failureoccurrence count POW.F No.13 Display

7ND9071en

L 13 NOTE 8 L+ L 14 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.

Series VQ Base Mounted Metal Seal/Rubber Seal

SI unit for 16 point Uni-wire H System (NKE.)

15

5.2 14 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NY M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 11 4.5 30 M4 x 0.7 7 70 50 4.6 13 60 NW M4 x 12 3.6 M4 x 12 1.5 M6 x 14 5.2 9 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NU M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 11 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NT M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 12 8.5 30 M5 x 0.8 8.5 70 50 4.6 17 60 NM1 M3 x 5 0.63 M4 x 12 1.5 M6 x 14 5.2

Programless controller Step motor (servo 24 VDC)

(h) Position switch Assigns the position to drive (1 to 14) and the origin (15). Forward button Performs forward Jog and inching. (i) MANUAL (j) Reverse button Performs reverse Jog and inching.

JXCx-OMT0023

Wire [AWG] Driver L1 L2 24V 0V U V W P C B1 B2 LECSA-S1 LECSA-S3 14(14) 14(14) (Note) 14(14) 14(14) 16(16) LECSA2-S4 Note. To wire the driver and a servo motor, use the LE-CSM(option).

0.4

14 14 14 14 14 14 14 (5.5) (35) S0710-5 S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 62 72 102.4 39 12 12 12 12 12 21.8 5 4 4 x M4 mounting hole SI unit n 8 7 6 5 4 3 2 1 Stations D side U side [Communication connector D-sub] C8: 3(R) port C8: 8 One-touch fitting DIN rail clamping screw 76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 2.2-10 Series SYJ300 Base Mounted (With sub-plate) Grommet (G), (H): SYJ3l4-l G H ll-M5 14 5 10 SY SYJ 28 2-3.2 17 3 (Mounting holes) VK Manual override 2.5 Depress and turn to operate and lock override.

0.55

6.5 Grommet (G) (H) DC without light/surge voltage suppressor 5EA 1P 3EB 22.5 103.7 G: Approx. 300 H: Approx. 600 (26.5) G: Approx. 300 H: Approx. 600 142.2 (Lead wire length) 143.4 2 x M5 x 0.8 (Lead wire length) (PE port) (15.5) (78) 74 14 (49.3) 45.3 (32.5) 28.5 30 30 1/4, 3/8, 1/2 (31) (31) 50 [1(P), 5(EA), 3(EB) port] (54) 92 4.5 (100) (0.5) The dimensions in ( ) are for 1/2 piping