Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

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N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H I J K Stroke 5 5 D C 20 +38 +10 +28 I 30 +48 +20 40 +84 +30 +54 50 +94 +40 J H F Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) A B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

32 F J/K10-0-A14 (With Buffer) S S M14 x 1 M14 x 1 Width across flats 19 I 5 Width across flats 19 5 I 5 J 5 J Width across flats 12 Width across flats 12 Applicable tube O.D.

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Thread type Type Rc NPT G Symbol Nil N F Accessory (2) Port size Symbol Nil H Description With set nut ARG40 Body size Port size Symbol 20 30 40 01 02 03 04 1/8 1/4 Accessory (1) 3/8 1/2 Symbol Nil B Description With bracket (With nuts) Mounting Angle of Pressure Gauge JIS Symbol G4 G3 G2 G1 Symbol ARG20 to 40 270 180 90 0 Mounting angle MPa IN OUT IN OUT IN OUT IN OUT Mounting angle view

REGULATOR

NPT G36-10-N01-L G36-4-N01-L 1 0.2MPa setting G G36-10-01-L G36-4-01-L 1 0.2MPa setting ARP20P-310AS-01 Rc Pressure gauge adaptor assembly ARP20P-310AS-N01 Aluminium die cast NPT ARP20P-310AS-F01 G ARP20P-320AS-01 Plug assembly Rc ARP20P-320AS-N01 NPT ARP20P-320AS-F01 G AR20P-370AS-01 Plug Rc AR20P-370AS-N01 PBT RESIN NPT AR20P-370AS-01 G AR23KP-020AS Check valve assembly

7.5

A B C Series Model Effective area (8) For SJ2000 SJ3000 AN203-KM8 SJ3000-155-1A 14 mm2 16 26 51 Label for SUP/EXH block disk M Plug These are inserted in unused cylinder ports and P, E ports. d Label for SUP block disk D A L Label for EXH block disk Dimensions Applicable fitting size d A L D Model KJP-02 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 2 4 6 8 1/8" 5/32" 1/4" 5/16"

VXA21/22

LVQ Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95 4 The VX series will be revised shortly.

Vacuum Ejector Series ZM

(kg) -E 0.21 0.21 0.21 -EL 0.26 0.26 0.26 -M 0.27 0.27 0.27 -ML 0.32 0.32 0.32 Without switch 0.17 0.17 0.17 Model ZM2 ZM4 ZM6 ZM1-J ZM3-J ZM5-J ZM1-K ZM3-K ZM5-K ZM1-A ZM3-A ZM5-A ZM1-B ZM3-B ZM5-B ZM0.24 0.28 0.33 0.34 0.39 0.25 0.29 0.34 0.35 0.4 0.25 0.29 0.34 0.35 0.4 0.26 0.3 0.35 0.36 0.41 P Q 0.24 0.28 0.33 0.34 0.39 -04R/L 0.209 0.214 0.219 0.224 0.229 0.234 0.239 0.244 0.249 0.254

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

OMU0023

Acquires the information repeatedly until the received 6 Repeat steps 5-6 information shows that the INP is "1". 7 01 10 9103 0002 04 0 1388 01 10 9103 0002 Direct Operation Step Data No. 20 parameters are configured for: Target position 5 mm, Positioning time 0.1 s. 8 01 06 9105 000A 01 06 9105 000A Instruction to hold current position sent. 9 01 10 9100 0001 02 0 01 10 9100 0 (Preparation

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

Digital Flow Switches

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Digital Flow Switches

: l Port size Output specification Applicable models Flow rate (l/min) Port size Applicable models Output specification Symbol Symbol 100 200 500 50 10 PF2A710/PF2A750 PF2A711/PF2A721, PF2A751 27 NPN open collector 2 outputs 01 02 03 04 1/8 1/4 3/8 1/2 PF2A710/PF2A750 PF2A710/PF2A750 PF2A711/PF2A721/PF2A751 67 PNP open collector 2 outputs PF2A711/PF2A721 PF2A751 Specifications PF2A710

PF2A/PF2W

type Nil N F Rc NPT G Wiring specifications Nil N 3 m lead wire with connector Without lead wire Port size Applicable model Flow rate (l/min) Port size Symbol 100 200 500 50 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 01 02 03 04 1/8 1/4 3/8 1/2 PF2A510

Digital Flow Switches, Series PF2A, Series PF2W

: l Port size Output specification Applicable models Flow rate (l/min) Port size Applicable models Output specification Symbol Symbol 100 200 500 50 10 PF2A710/PF2A750 PF2A711/PF2A721, PF2A751 27 NPN open collector 2 outputs 01 02 03 04 1/8 1/4 3/8 1/2 PF2A710/PF2A750 PF2A710/PF2A750 PF2A711/PF2A721/PF2A751 67 PNP open collector 2 outputs PF2A711/PF2A721 PF2A751 Specifications PF2A710

Lubrication Equipment

02 03 04 06 10 C R With bowl guard (Only AL2000) Flow direction: Right to left With drain cock and barb fitting (6, 4 for nylon) (AL3000 to AL6000) 3W AL3000 When specifying more than one option, please list alphabetically.

Micro-Mist Separator with Prefilter Series AMH

Port size 01 1/8 B 06 3/4B 02 1/4 B 10 lB 03 3/8 B 14 1 1/2B 04 1/2B 20 28 Table" combination of accessories and made to order specifications Accessories Accessooos I~p~~Tii\,"aR6~~ Applicable models Made to order specifications C 0 J R T AMHl50 AMH2S0 AMH350 AMH450 AMH550 AMH650 AMH850 D C Drain Quide 1/48 -J Accessories N.C. auto drain N.O. auto drain IN-OUT reversal -R 10 0 Element service