Size, Body, Valve Type: 10B (Size: 1; Body Mat'l: Aluminum; Port Size: 1/8; Orifice Dia: 3, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: Z (Oil-free, Rc Thread), Bracket Interchangeable with Old Type: XB

Size, Body, Valve Type: 10B (Size: 1; Body Mat'l: Aluminum; Port Size: 1/8; Orifice Dia: 3, N.C.), Voltage and Electrical Entry: M (24VDC; Conduit Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: A (G Thread)

Size, Body, Valve Type: 10B (Size: 1; Body Mat'l: Aluminum; Port Size: 1/8; Orifice Dia: 3, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2C (110VAC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: None, Bracket Interchangeable with Old Type: XNB

Size, Body, Valve Type: 10B (Size: 1; Body Mat'l: Aluminum; Port Size: 1/8; Orifice Dia: 3, N.C.), Voltage and Electrical Entry: H (100VAC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: None, Bracket Interchangeable with Old Type: XB

Size, Body, Valve Type: 10B (Size: 1; Body Mat'l: Aluminum; Port Size: 1/8; Orifice Dia: 3, N.C.), Voltage and Electrical Entry: M (24VDC; Conduit Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: None, Bracket Interchangeable with Old Type: XB

Size, Body, Valve Type: 10B (Size: 1; Body Mat'l: Aluminum; Port Size: 1/8; Orifice Dia: 3, N.C.), Voltage and Electrical Entry: F (24VDC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread), Bracket Interchangeable with Old Type: XB

Size, Body, Valve Type: 10B (Size: 1; Body Mat'l: Aluminum; Port Size: 1/8; Orifice Dia: 3, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2L (100VAC; Conduit Terminal w/Surge Voltage Suppressor & Light), Other Options: A (G Thread)

AC Servo Motor Driver

Example: ABS data: 10 (F6H) 10b Decimal 01b 10 11b 11b F FFF6 Hexadecimal 11b 11b 1 1 1 0110 Binary 11b 11b When the binary data of each 2bits of the ABS data is added up, "10 1101 " is obtained. b 11b 11b 11b 11b 11b 11b 11b b 11 101101b Therefore, the checksum of " 10" (ABS data) is "2Db" 14 13 14.

One-touch Fittings

[mm] Model D1 D2 L Weight [g] 8 KQ2C-08B 13.6 9.2 2.6 0.1 10 KQ2C-10B 16.2 11.2 2.7 0.1 12 KQ2C-12B 18.8 13.2 2.7 0.2 16 KQ2C-16B 24.2 17.2 3.2 0.3 : B (Black), R (Red), YR (Orange), BR (Brown), Y (Y ellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) : B (Black), R (Red), YR (Orange), BR (Brown), Y (Y ellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) Inch Size

AFF

18 460.5 AFF75B 1 2 13 42 348 220 57.5 220 10 AFF75A to AFF220A/Dimensions 3-20 holes For anchor bolt mounting Label Drain Rc ORIENTATION G 184 184 236 12B AFF220A 4BJIS10k flange 500 1291 1070 670 325 282 Model A 8B B 380 380 450 C 1125 1125 1178 D 935 935 980 E 505 505 540 F 265 265 265 Port size AFF75A AFF125A AFF150A 3BJIS10k flange 4BJIS10k flange 2BJIS10k flange Drain Rc 3/8 N3 8B 10B

Table of Contents

18 460.5 AFF75B 1 2 13 42 348 220 57.5 220 10 AFF75A to AFF220A/Dimensions 3-20 holes For anchor bolt mounting Label Drain Rc ORIENTATION G 184 184 236 12B AFF220A 4BJIS10k flange 500 1291 1070 670 325 282 Model A 8B B 380 380 450 C 1125 1125 1178 D 935 935 980 E 505 505 540 F 265 265 265 Port size AFF75A AFF125A AFF150A 3BJIS10k flange 4BJIS10k flange 2BJIS10k flange Drain Rc 3/8 N3 8B 10B

Electric Actuator

S8 40 400 For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. + Driver type I/O connector ( Cable length Power supply voltage Compatible drivers 25 32 Size 40 ) ) ) ) ) ) ) ) ) Nil H Without connector With connector Nil 2 5 A Without cable 2 m 5 m 10 m ) ) ) ) ) ) ) ) ) ) ) ) ) ) Nil A1 A2 B1 B2 C1 C2 S1 S2 Without driver LECSA1-S; LECSA2-

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

CRBU

Port locations: Axial direction CRBUWl-lSE (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 (Depth) Q2 R S1 S2 T U V W X Model 10.5 8.5 10.5 11 11.5 14 12 15.5 10.5 9.5 10.5 10 11 13 13 14 CRBUW10-lS CRBUW10-lSE CRBUW15-lS CRBUW15-lSE CRBUW20-lS CRBUW20-lSE CRBUW30-lS CRBUW30-lSE M3 (4) M5 X 0.8 M3 X 0.5 M5 X 0.8 M3 X 0.5 4 -0.004 -0.012 9 0 -0.043 29 22 14 8 3 25 31 41 15.5 M3 X 0.5 5 24 3.5

Table of Contents

S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light

Series SV

S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

Electric Actuator

(Absolute encoder) Motor option AC servo motor S7 200 63 (Absolute encoder) Without lock Nil B With lock 1: For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively.

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

Table of Contents

flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1

ZX

flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1