0.02Stainless steel 316Yes(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?

Classification of Waterproof: Open Style (Non Water Proof), Pressure Range: 0.1~1.0MPa, Fluid Contact Area Material: Brass, Phosphorus Bronze, Thread: R(PT), Differential Scale Plate: None, Electric Wire Gland: A Type 20b, Contacts: -

Vacuum Ejector Body Ported Type/Box Type (Built-in Silencer)

For M3: 0.315 0.03 Nm For M4: 0.76 0.08 Nm *1: For ZH15 to 20B, there is only one mounting hole 6 - Doc. no. ZH-OM00401 Mounting of the standard bracket (ZH05 to 15DA) and adjustment of the vacuum (V) port (1) Align the recess of the standard bracket and the protrusion of the adapter.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod end male thread CQS CQM Rod end nut CQ2 Rod Side Flange Style Rod side flange style: CDQ2F RQ Bore size (mm) Stroke range (mm) A B FD FT FV FX FZ L L1 MU 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 41.5 28 4.5 5.5 25 45 55 13.5 24 44 30.5 4.5 5.5 30 45 55 13.5 25.5 46 31.5 6.6 8 39 48 60 14.5 28.5 D47.5 32.5 6.6 8 42 52 64 15 32.5 Flange bracket material: Carbon steel -X Rod end nut 20B

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ Adjustment bolt DA port 20B port 2-M3 x 0.5 (Port location: Side ported type only) 24 1 60 (69) 2 D-97/93A 30 1 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

Table of Contents

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

: (800) 258-9200-www.stevenengineering.com Rod Side Flange Style Rod side flange style: CDQ2F RQ Bore size (mm) Stroke range (mm) A B FD FT FV FX FZ L L1 MU 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 41.5 28 4.5 5.5 25 45 55 13.5 24 44 30.5 4.5 5.5 30 45 55 13.5 25.5 46 31.5 6.6 8 39 48 60 14.5 28.5 D47.5 32.5 6.6 8 42 52 64 15 32.5 Flange bracket material: Carbon steel -X Rod end nut 20B

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model Applicable cylinder MY3A16, MY3B16 MY3A25, MY3B25 MY3A40, MY3B40 MY3A63

Classification of Waterproof: Drip Proof, Pressure Range: 0.05~0.7MPa, Fluid Contact Area Material: SUS316, Thread: R(PT), Differential Scale Plate: Differential Scale, Electric Wire Gland: A Type 20b, Contacts: -

The ZSE/ISE20A/20B/20C series operation manual can be found here.

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 5,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Not Provided] No, Flow Direction: [Right] From Left to Right, Size of Body: 2B, Accessory

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 5,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 2, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 2, Drain Exhaust: [Not Provided] No, Flow Direction: [Right] From Left to Right, Size of Body: 2B, Accessory: None

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 5,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1 1/4, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1 1/4, Drain Exhaust: [Not Provided] No, Flow Direction: [Right] From Left to Right, Size of Body: 2B, Accessory

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 5,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1 1/4, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1 1/4, Drain Exhaust: [Not Provided] No, Flow Direction: [Right] From Left to Right, Size of Body: 2B, Accessory

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 5,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Not Provided] No, Flow Direction: [Right] From Left to Right, Size of Body: 2B, Accessory

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 5,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 2, Drain Exhaust: [Not Provided] No, Flow Direction: [Right] From Left to Right, Size of Body: 2B, Accessory: None

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 5,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 2, Drain Exhaust: [Not Provided] No, Flow Direction: [Right] From Left to Right, Size of Body: 2B, Accessory: Bracket

Model: DP Lube Single Unit, Size: 2B, Thread: Rc(PT), Port Size: 1+1/4, Accessory: Bracket, Option: -