Speed Controller with One-touch Fitting

(19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS321F-03-06(S)A 6

AS-FG/ASD-FG

of 0.5MPa and a temperature of 20C. 7 Series AS-FG How to Order AS 200 1 F G 06 Body size Applicable tube outside diameter Metric size Inch size 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 With One-touch fitting Use a 1/8" tube.

KQ2

(mm) Note) Mass (g) Model D L Q M1 M2 D 6 8 10 4 6 8 KQ2T06-04 KQ2T08-06 KQ2T10-08 10 15 25 12.8 15.2 18.5 21 24 26.5 5.3 6 6.8 17 18.5 21 16 17 18.5 6.4 13.4 25.6 4.4 10.6 17.7 M2 D 12 KQ2T12-10 20.9 28.5 7.5 22 40 28.4 29 10 21 D Note) D: Max. diameter Applicable tubing a 8 4.2 M1 Applicable tubing a M1 Cross: KQ2TW Applicable tubing O.D.

Table of Contents

6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

Series VQ Base Mounted Metal Seal/Rubber Seal

VFS VS Blank plug (For One-touch fittings) Dimensions (mm) VS7 23 04 06 08 Color: White KQP-X19 X19 A L D Model Fittings size d 16 16 18 20.5 3.2 6 8 10 31.5 32 35 39 KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 3.2 4 6 8 It is inserted into an unused cylinder port and SUP/ EXH ports. The minimum order quantity is 10 pcs.

SX

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

VEX1

(port P1 pressure: port 2 (A) pressure = 1:1) When the reduced pressure is supplied from 3 (R) to 2 (A), air will not be exhausted from 2 (A) to 1 (P) even when the pilot pressure (port P1) is larger than the port 2 (A) pressure. 3 9 9 4 6 6 1 1 3 6 Construction Pilot valve Pilot valve Manual button Port P3 Port P1 Port P2 Feed back flow passage Port 3 (R) Component Parts Port 1 (P) Port

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

6 !6 Component Parts Description Material Description Material No.

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Compact Manifold Regulator

Description 136144-S Common supply bushing 136144-K Individual supply bushing Single unit regulator / Port plug for regulator block 136144-S 136144-K Semi-standard Description None Oil-free Symbol Nil X17 A-A A A-A A 12 12 10 A A 8 8 15 15 10 738 Regulator Single Unit Type ARM10 Series ARJ AR425 to 935 How to Order ARX Standard Type ARM10 06 B Z 1 q w e r t N AMR 1.

Pulse Valve

VAC Clean air outlet 06 6 output points 10 10 output points IN Bag filter IN 1 A is not a CE marked product.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Min. d T H D1 D2 D3 L1 L2 L3 Model AK 4 ASD230FG-M5-04 17.5 12.9 12 29.4 9.3 28.3 25.5 28.6 25.8 9.6 10 11.7 8 M5 x 0.8 25 22.2 7.8 6 ASD230FG-M5-06 20.6 13.7 13 32.5 11.6 VCHC 39.6 34.6 14 6 ASD330FG-01-06S 22.9 13.7 29 38.5 11.6 35.2 30.2 14.2 11.8 12 R 1/8 32.1 27.1 10.6 38.9 33.9 15.8 8 ASD330FG-01-08S 28.2 18.5 31 44.8 15.2 ASR ASQ 6 ASD430FG-02-06S 25.2 17 53 43.5 12.8 18 41.7 36.7

ARM10/11

OUT fitting type AMR Inch size Metric size Straight Elbow Straight Elbow Symbol Symbol 4 5/32 6 1/4 ITV 4 6 5/32 1/4 04 05 16 17 54 55 66 67 Note 1) A pressure gauge with a full span of 0.4 MPa is attached. Note 2) The oil-free type has nongreased fluid contact areas. IC VBA A ARM11B 1 A R 1 06 Z Individual supply type VE 1 2 3 4 5 6 1.

ARM10/11

OUT fitting type AMR Inch size Metric size Straight Elbow Straight Elbow Symbol Symbol 4 5/32 6 1/4 ITV 4 6 5/32 1/4 04 05 16 17 54 55 66 67 Note 1) A pressure gauge with a full span of 0.4 MPa is attached. Note 2) The oil-free type has nongreased fluid contact areas. IC VBA A ARM11B 1 A R 1 06 Z Individual supply type VE 1 2 3 4 5 6 1.

5 Port Solenoid Valve Series VQZ1000/2000/3000

-04 KQ2P-06 KQ2P-08 KQ2P-10 L A Dimensions (mm) Applicable fitting size d Model A L D D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 Silencer (for manifold EXH port) Silencer is installed in the manifold EXH port. 63 38 22 13 Silencer part no.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

4/5 Port Solenoid Valve

/surge voltage suppressor) 56.5 Max. 13.5 61.6 [68.6] 61.6 [68.6] + + + + + + 46.2 46.2 A A A A 33 24.5 25 B B B B 1 6 8.5 8.5 (Pitch) P = 16 29 (Pitch) P = 17 One-touch fitting (A, B port) 24.5 1/8 (A, B port) Applicable tubing O.D.: 6, 1/4" Other dimensions are the same as the grommet type.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS1002FS-23 3.2 8.4 6.7 9.5 3.3 5.5 9.4 10 36.6 5.1 11.8 36.4 33.9 11 15.4 8.8 10.1 13.5 13.6 15.1 5.5 9.6 5.2 AS1002FS-04 4 9.3 7.7 10 37.6 5.5 AS1002FS-06 6 11.6 9.7 12 40.1 6.1 12.8 37.4 34.9 12.3 6.6 AS2002FS-04 4 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 44.5 43 12.6 17 10.5 12.3 13.5 20 21.5 6.5 15 9.5 AS2002FS-06 6 11.6 9.7 12 43.1 10.4 AS2052FS-06 6 12.8 11.5 4.3 7.8 13 16 54.2 7.6

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Max.14 SV1 00-06 SV1 00-05 Individual SUP spacer 61 (N7:7) (C6:3.2) 10 B B B B (7.5) (DIN rail dimension) 109.5 111.4 118 102.9 11.8 100.4 91.9 A A A A 90 B A B A B A B A Dimensions are the ones for SV1300.