CV/MVGQ

D-C7/C80 50 + 45 (n 2) 50 15 10 15 + 45 ( ) n 2 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 15 60 10 (n = 2, 4, 6) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 15 65 10 65 + 50 (n 2) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 Precautions 15 75 10 Warning 75 + 55 (n 2) 20 + 50 ( ) (n = 2, 4, 6) n 2 2 D-B59W 20 75 15 1. Do not rotate the cover.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 (1) Model L3 Model Weight (g) Weight (g) M1 d M1 D1 D2 L2 L1 D2 D1 L2 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 3.2 4 6 4 6 6 8 6 7 8 12 13 26 31 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

button: White color) 2, 3.2, 4, 6, 8, 10, 12 Inch size (Release button: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS321F-02 AS331F-02 R1/4 AS321F-03 AS331F-03 R3/8 AS421F-04 AS431F-04 R1/2 Note 1) AS121F-M5-02 applicable cylinder bore sizes are 2.5, 4, 6.

IDU/IDF

Note 4) IDF3D to 8D-4/6 are only for frequency of 50Hz. Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

ASR

Note 2) Not used for 6 and 8. Note 3) Not used for 10 and 12. 15-16-8 9 Air Saving Valve Pressure Valve/Flow Valve Series ASR/ASQ Flow Valve: Series ASQ Variable type Fixed type @2 @5 @6 @4 @3 @2 @5 @6 @4 @3 y u i ASQ430F-02 type ASQ530F-03 type ASQ630F-04 type ASQ430F-02 type ASQ530F-03 type ASQ630F-04 type o !5 !3 !5 !2 !4 !1 !7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

SJ U side SY D D D D D D SV 3 2 1 Stations SYJ SZ D side How to Order Valve VP4 Note) SV 1 1 0 0 F 5 S0700 Note) Available with manifold block for station additions. Refer to pages 429 and 433. Series VQ 1 2 3 4 SV1000 SV2000 SV3000 SV4000 VQ4 Rated voltage VQ5 Made to Order Type of actuation 5 6 24 VDC 12 VDC Main valve fluoro rubber (Refer to page 448.)

SX

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Air Cylinder Series CA2

D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-F5 D-J5 D-F59F D-F5W D-J59W D-F5BAL D-A9 D-A9V D-B5 D-B64 D-P4DWL D-A59W D-F5NTL Bore size (mm) A B A B A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 4 1 0.5 0.5 1 7 2.5 4.5 12 10 0 0 4 0 1.5 9 8 3.5 6 4 3.5 1.5 1 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 3 8.5 7.5 6 5 4.5 2.5 3 9 4.5 6.5 14 12.5 1.5 2

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Description Material AS800 AS900 6 7 8 O-ring O-ring Spring NBR NBR Stainless steel KA00069 KA00460 14115 KA00072 KA00462 14124 ASV AK VCHC Dimensions: AS420/500/600 Dimensions: AS800/900 ASS ASR ASQ 2 x Port size 2 x Port size L3 L2 L1 D Dimensions L1 L2 D Min. L3 (1) Model Port size Max.

3 Port Solenoid Valve/

YZ1-04 -X555 VP744(R)-5 D YZ1-04 -M -X555 1/2" [2(A) port] 40 Safety limit switch Made by OMRON 18 Safety limit switch (made by OMRON) Part number: D4N-2B31 (G1/2) : D4N-9B31 (M12 connector) A Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) 2 x 1/2" [3(R) port] 6.5 67 2 x 6.2 (For mounting) Applicable cable O.D. 3.5 to 7 G1/2 (M12

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Note 5) 3/16", 3/8", 1/2"are made of brass AS131F (3.2, 4, 6, 1/8", 5/32, 1/4), AS231F-01(3.2, 4, 6, 1/8", 5/32) are POM. 15-9-5 5 Series AS Elbow Type M3 port M5 port U10/32 port Applicable tubing O.D. d (Hexagon width across flats) Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Applicable tubing O.D. d 1/8" Applicable tubing O.D. d A(2) Weight (g) T D1 H(1)

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 L2 D2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

5-Port Solenoid Valve

Dimensions Applicable fitting size d (Metric size) Model A L D Applicable fitting size d (Inch size) Model A L D 2 KJP-02 8.2 17 3 3.2 KQ2P-23 16 31.5 5 4 KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 12 KQ2P-12 24 45.5 14 1/8" KQ2P-01 16 31.5 5 5/32" KQ2P-03 16 32 6 1/4" KQ2P-07 18 35 8.5 5/16" KQ2P-09 20.5 39 10 3/8" KQ2P-11 22 43 11.5 d D A L * Shipped together

Smooth Cylinder/Low Speed Cylinder

n-2) (n = 4, 6) Note 5) D-M9V 5 5 10 + 15 (n-2) (n = 4, 6) Note 5) D-A9V 10 5 D-M9 D-A9 15 + 15 (n-2) (n = 4, 6) Note 5) 10 10 (5) D-M9WV D-M9AV D-M9W D-M9A 15 + 15 (n-2) (n = 4, 6) Note 5) 15 10 20 + 15 (n-2) (n = 4, 6) Note 5) 15 15 (10) D-A7/A80 D-A7H/A80H D-A73C/A80C 15 + 10 (n-2) (n = 4, 6) Note 5) 10 5 Rail mounting D-A7H D-A80H 15 + 15 (n-2) (n = 4, 6) Note 5) 10 5 10

30

Plug: KQB2P Applicable fitting size d A Weight (g) D L Model L A KQB2P-23 KQB2P-04 KQB2P-06 KQB2P-08 KQB2P-10 KQB2P-12 KQB2P-16 3.2 4 6 8 10 12 16 2.8 4.3 9 16.3 25.4 37.8 69.2 5 6 8 10 12 14 18 28.9 29.6 30.8 33.7 34.6 36.5 38.6 16.9 17 17.2 17.6 17.6 17.9 17.8 D d Applicable fitting size d 8 Metal One-touch Fittings Applicable Tube: Inch Size, Connection Thread: UNF, NPT Series KQB2 RoHS

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4