5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Mounting bolts and gaskets are not included. 3 8 VQ7 Piping port 03 04 06 1 2 3 4 1299 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 r u e t r u q o e !0 q i i w y PE 5(EA) 4(A) 1(P) 2(B) 3(EB) Bleed PE 5(EA) 4(A) 1(P) 2(B) 3(EB) PE 5 1 3 3 position closed center/exhaust center/pressure center !

Proposals for Energy Saving

Note 2) Changing from an internal pilot to an external pilot or vice versa is not possible. 04 4 5 1 VP3 A G 1 04 4 5 1 VP3 A G 1 Pilot option VP 3 port solenoid valve Standard (Internal pilot) External pilot 1 Nil 1 Type of actuation 1 No. of solenoids Single A B N.C. (Normally closed) N.O.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW VP4 9 B B B B B S0700 23 SMC SMC SMC SMC 42 VQ 63.5 VQ4 1 2 3 4 5 6 7 n Stations D side U side 1(P), 5(R3), 3(R1) 6 x Rc 1/2 VQ5 Manual override VQC SMC VQZ 150.5 141.00 SQ 115.5 A A A A A A A 91.5 74.00 VFS 58 18 14 B B B B B B B VFR 3 3 3 4(A), 2(B) port 2n x Rc 3/8, 1/2 30 43 62.5 VQ7 EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100B04A) for the unused

Hydraulic Filters

FH440-04 FH440-06 FH440-08 FH440-10 FH440-12 FH640-03 FH640-04 FH640-06 FH640-08 FH640-10 FH640-12 3/8 3/8 10 10 FH441-04 FH441-06 FH441-08 FH441-10 FH441-12 FH441-16 FH441-20 FH441-24 FH641-04 FH641-06 FH641-08 FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4

M-E05-1-LQ1

Nut Insert bushing LQ1H11-Mm 1 1-04 LQ1-1N04 LQ1-1B04 LQ1H12-Mm 1 1-03 LQ1-1N03 LQ1-1B03 LQ1H21-Mm 2 2-06 LQ1-2N06 LQ1-2B06 LQ1H22-Mm 2 2-04 LQ1-2N04 LQ1-2B04 LQ1H2C-Mm 2 2-03 LQ1-2N03 LQ1-2B03 LQ1H23-Mm 2 2-06 LQ1-2N06 LQ1-2B06 LQ1H24-Mm 2 2-04 LQ1-2N04 LQ1-2B04 LQ1H2F-Mm 2 2-03 LQ1-2N03 LQ1-2B03 LQ1H31-Mm 3 3-10 LQ1-3N10 LQ1-3B10 LQ1H32-Mm 3 3-08 LQ1-3N08 LQ1-3B08 LQ1H33-Mm 3 3-06 LQ1-3N06

Speed Controller with Indicator

11 (S) 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS321FSG-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-03-11 (S) 3/8" 15.5 26.7 37 28.2 15.6 39 (40) AS421FSG-04-11 (S) 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FSG-04-13 (S) 1/2" 19.3 30.9

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

VFS

Tightening torque for terminal: 0.6 Nm Series VFS4000/5000 Model Terminal block marking A + A side A side A A side A side B + B VFS 100 VFS 200 VFS4 00 VFS5 00 4 5 4 5 B side B side 3 4 3 4 A side A side B side B side Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

Table of Contents

54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-

CG5-S

10 -04 R 1/2 R 3/8 -03 KGU12-02 R 1/4 R 1/2 -04 12 -03 R 3/8 R 1/4 KGT12-02 -04 R 1/2 12 R 3/8 -03 Male Delta KGD R 1/2 -04 R 3/8 KGT16-03 16 Applicable tubing O.D.

Air Fittings & Tubing

Thread R(PT) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 64 65.5 67.5 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 8 4 KM14-04-08-01S-3 30 38 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5

CG5-S

10 -04 R 1/2 R 3/8 -03 KGU12-02 R 1/4 R 1/2 -04 12 -03 R 3/8 R 1/4 KGT12-02 -04 R 1/2 12 R 3/8 -03 Male Delta KGD R 1/2 -04 R 3/8 KGT16-03 16 Applicable tubing O.D.

V

2 Center 3 3/8 NVFS4400 50 or less Exhaust 2.8 3 Position 1/2 Center 3 3/8 NVFS4500 50 or less Pressure 3.2 1/2 Center 3.4 3/8 NVFS4600 55 or less Perfect 1.7 1/2 (Double Check) 1.8 T E C H N I C A L SPECIFICATIONS O P T I O N A L T E C H N I C A L SPECIFICATIONS S T A N D A R D Fluid Air and Inert Gas Pilot Type External Pilot Type Max Operating Pressure 150 PSI (1MPa) Manual Override Main

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Compact Hydraulic Cylinder

Note 3) When tightening an auto switch mounting screw (M2.5), use a watchmakers screwdriver with a grip diameter of 5 to 6 mm. Also, set the tightening torque to be 0.05 to 0.15 Nm.