Vacuum Pad

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

Vacuum Pad

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

Vacuum Pad

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

ZP

M8 x 1.25 F 04 4 06 6 08 8 M Width across flats H Model A B C 2 D E F G H J Vacuum inlet direction q Pad dia.

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

AS

A (1) (2) L4 (1) (2) Mass (g) Model M1 D1 D2 L1 L2 L3 d T H Min.

AC

10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06

Table of Contents

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

KJ

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

ZP3

w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Table of Contents

Symbol A R P Symbol 2 Body class 2 Orifice dia. LVQ Metric sizes 4 04 06 4 6 N.C.

Table of Contents

Note 2) Drain piping, or piping for a stop valve, like a ball valve, is required. 850 size comes with a ball valve. substitute with (Symbol: A).

5 Port Solenoid Valve Series SY3000/5000/7000/9000

With External Pilot Specifications One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" (Pitch) P = 24 22.2 24.3 R R 4 A 4 A 4 A 4 A 3/5 3/5 4 A 4 A R R 18.8 18.8 4 A 4 A 4 A 4 A 3/5 3/5 18 4 A 4 A 63.3 39.3 39.3 40.1 79.8 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D. :

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

mounting D U Symbol A, B P , EA, EB D side mounting SY Passage Porting specifications (A, B) EA, EB P 03 04 M Mixed 3 8 Symbol 1 2 1 2 SV 1 2 Side Bottom D side For bottom ported: Rc 3/8 only.

Hydraulic Filters

0 A 04 0 0 M 074 Hydraulic filter Made to Order Port size Nil X0 None Non-standard filtration Suction guard 04 06 08 10 12 16 20 24 1/2B 3/4B Note) Refer to page 32 for details. 9 Negative pressure Rated pressure 1B 1 1/4B Air breezer 1 1/2B Hydraulic fluid Nil Air breezer Cap 2B 0 1 2 Petroleum Water-glycol, Emulsion Phosphoric ester C 2 1/2B 3B Connection Nominal filtration 0 1 2 3 4 5

Proposals for Energy Saving

Note 2) Changing from an internal pilot to an external pilot or vice versa is not possible. 04 4 5 1 VP3 A G 1 04 4 5 1 VP3 A G 1 Pilot option VP 3 port solenoid valve Standard (Internal pilot) External pilot 1 Nil 1 Type of actuation 1 No. of solenoids Single A B N.C. (Normally closed) N.O.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

2 stations Symbol 03 04 M A, B P, R1, R2 10 Rc 3/8 Rc 1/2 Mixed 10 stations Rc 1/2 Note 1) Max. 10 stations.

Speed Controller with Indicator

-23 3.2 7.2 17.2 21.7 13.3 16.9 39 36.5 35 33.5 13.6 15.1 5.5 9.6 7 AS12l1FSGl-U10/32-23 AS12l1FSGl-M5-04 4 8.2 AS12l1FSGl-U10/32-04 AS12l1FSGl-M5-06 6 10.4 18.6 23.1 16.5 8 AS12l1FSGl-U10/32-06 M5 x 0.8 10/32UNF 8 9.4 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g

M-E05-1-LQ1

Tubing extensions size Nut Insert bushing Model Size Insert pin/Name plate symbol LQ1E21-T-R8 2 2-06 LQ1-2N06 LQ1-2B06 8 x 6 LQ1E21-T-R9 2 2-06 LQ1-2N06 LQ1-2B06 10 x 8 LQ1E21-T-R10 2 2-06 LQ1-2N06 LQ1-2B06 12 x 10 LQ1E22-T-R8 2 2-04 LQ1-2N04 LQ1-2B04 6 x 4 LQ1E22-T-R9 2 2-04 LQ1-2N04 LQ1-2B04 8 x 6 LQ1E22-T-R10 2 2-04 LQ1-2N04 LQ1-2B04 10 x 8 LQ1E22-T-R11 2 2-04 LQ1-2N04 LQ1-2B04 12 x 10

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !