SYJ3000/5000/7000

28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5 3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (WO): SYJ5 20-WO-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length)

Direct Operated

Normally open (N.O.) : VX312/VX322/VX332 Common (COM.) : VX314/VX324/VX334 Conduit: C Grommet: G 280 D F J D 300 J F G1/2 25 25 Width across flats H Width across flats H K K C C Port size 3 x P Port size 3 x P E E B1 A A B2 B2 B1 Conduit terminal: T DIN terminal: D F J D Cable 6 to 12 F M J 34 G1/2 D 25 Width across flats H Width across flats H N 44 K K C C M Port size 3 x P Port size 3

Table of Contents

(Including band and screw) J Applicable auto switch Bore size (mm) 20 25 40 32 DD-C7, D-C80 D-C73C, D-C80C Reed -X BMA2-020 BMA2-032 BMA2-025 BMA2-040 D-H7, D-H7C D-H7W, D-H7NF,D-H7BAL D-B5, D-B64, D-B59W D-G5NTL Reed D-A3, D-A44 Solid state 20Reed Solid state BA-32 BA-01 BA-02 BA-04 Data BD1-01M BD1-02M BD1-02 BD1-04M Solid state D-G39, D-K39 Mounting screws set made of stainless steel

VEX1

entry Port 1(P), 2(A) 3(R) 01 1 02 1 8 1 8 G Grommet (Lead wire length 300 mm) 1 4 1 4 H Grommet (Lead wire length 600 mm) 02 3 03 1 4 1 4 D DIN terminal 3 8 3 8 DO DIN terminal (Without connector) 04 1 2 1 2 04 5 06 1 2 3 4 1 2 3 4 1 Body ported G Grommet (Lead wire length 300 mm) 10 1 1 1 H Grommet (Lead wire length 600 mm) 10 7 12 14 9 20 2 E Grommet terminal 1 4 1 T Conduit terminal

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Fieldbus System

D side U side Stations 7 6 5 4 3 2 1 n [Communication connector D-sub] (DIN rail clamping screw) BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 20.5 (7.5) One-touch fitting [1(P), 3(R) port] 13.4 56.9 Applicable tube O.D.

Dual Speed Controller with One-touch Fitting Series ASD

ASV Inch size M1 L3 L2 AK Applicable tubing O.D. d D1 ASS L6 D2 L1 ASR D4 L4 H ASF (Hexagon width across flats) (Hexagon width across flats) D4 D3 A1 L5 A2 L6 T Inch Size Model H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 A1 A2 M1 T d 1/8" 5/32" 3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" ASD230F-U10/32-01T ASD230F-U10/32-03T ASD230F-U10/32-05T ASD230F-U10/32-07T

42

U side entry (LU) 15.5 17 22 51 69 83.5 117 U D U D U D 117 83.5 69 51 22 17 15.5 9 9 184.5 (3-position, Metal seal type) 200 (3-position, Metal seal type) 179 (Single, Double, 3-position, Rubber seal type) 194.5 (Single, Double, 3-position, Rubber seal type) 123.3 106 76.5 VFS D side U side D side U side 106 61 9 9 VFR 19 R4.5 R4.5 3/8", 1/2" 4(A), 2(B) port 1/8" External pilot port 68.5

Secondary Batteries

Port Solenoid Valve Pilot Operated Poppet Type Rubber Seal 90-VP300/500 Series How to Order A 2 4 3 VP D Z 5 90 02 Series compatible with secondary batteries Passage symbol N.C.

44

Width across flat Effective area (mm2) Connection thread Rc Weight (g) L1 L2 M d Model H1 H2 H2 H1 I.D. 2.5 3 4 6 7.5 8 9 10 13 4 4 6 8 10 10 12 12 16 KFG2F0425-02 KFG2F0403-02 KFG2F0604-02 KFG2F0806-03 KFG2F1075-03 KFG2F1008-03 KFG2F1209-03 KFG2F1210-03 KFG2F1613-04 1.6 2.6 6 17 30 35 45 57 101 1/4 1/4 1/4 3/8 3/8 3/8 3/8 3/8 1/2 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 d 17 8 25.9 16.4 5 24 17 19

reduces flow setting time

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

0.55

T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 Manifold

60

V 48 V 230 V 24 V 12 V 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) AC Normally Open (N.O.)

0.4

D Note 8) DIN rail length specified (: Stations 02 to 16) 01 1 station G1 Note 3) Note 7) 1 set of regulator unit SI unit part no. G2 Note 3) Note 7) 2 sets of regulator unit 08 8 stations G3 Note 3) Note 7) 3 sets of regulator unit SI unit specifications SI unit part no. Symbol Note) Max. 16 stations.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

KQ2

1 8 1 4 3 16 3 16 5 32 1 4 3.5 16.5 3 16 1 4 5 16 4.6 17 1 4 3 8 K 3 8 6 18.5 5 16 1 2 Applicable tubing M 7 21 1 2 3 8 Note) D: Max. diameter H KK D MS Cross: KQ2TW Applicable tubing O.D.

Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Stainless Steel One-touch Fittings Series KG

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

VZ5000

) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-71 Series VZ5000 2 Position Double VZ5240 Grommet (G), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L