Vacuum Pad

across flat 6 5 Width across flat 8 Width across flat 10 Width across flat 8 Width across flat 10 Vertical 2 2 2 2 3 13 A D B 3 13 A D B With Adapter: Vacuum Inlet 2 2 2 2 13 A D B B D A M6 x 0.75 M6 x 0.75 M3 x 0.5 7 0.3 M3 x 0.5 7 0.3 M8 x 0.75 M8 x 0.75 M3 x 0.5 M3 x 0.5 7 Vertical 3 3 13 With Buffer: Vacuum Inlet 3 3 7 0.3 0.8 2 1.5 0.8 3 3 2 2.5 0.8 2 2.5 0.8 1.5 2 0.3 Lateral With

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For details about auto switches with pre-wire connector, refer to page 7-9-36. 7-6-2 3 Series CQ2 Compact Cylinder: Standard Type Double Acting, Single Rod Type 100 32 80 25 63 20 50 40 16 12 Bore size (mm) Through-hole (Standard) Mounting Both ends tapped style Built-in magnet Pneumatic Air-hydro (1) M5 x 0.8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 Screw-in

SYJ3000/5000/7000

/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot SS5YJ3-20 SYJ32 M5 x 0.8 M3 x 0.5 0.9 31 S31 SS5YJ3SYJ33 M5 x 0.8 M3 x 0.5 0.9 SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21

CQ2

Built-in magnet Pneumatic Air-hydro Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Rc(PT) 3/8 Rc(PT) 3/8 M5 X 0.8 M5 X 0.8 M5 X 0.8 M5 X 0.8 Screw-in style Piping Rod end male thread Rod end male thread Rubber bumper Through-hole (Std.)

Air Cylinder

[mm] Auto switch model Bore size 6 10 16 Auto switch mounting Auto switch model Bore size [mm] 6 10 16 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2 2.5 3 D-M9l D-M9lV D-M9lW D-M9lWV D-A9l D-A9lV Band mounting D-A9l 4.5 6 7 D-H7l/H7lW D-H7BA/H7NF 3 4 4 BJ6-006 (A set of a, b, d, f) BJ6-010 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) D-H7C 5 8 9 D-C7l/C80/C73C/C80C 6 7 7 D-M9lA 2 D-M9lAV2

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

CJ2

2.5 3 B 2.5 3 A 1.5 2 B 1.5 2 A 3 3.5 B 3 3.5 A 3.5 4 B 3.5 4 A 0.5 1 B 0.5 1 10 16 Auto Switch Mounting Height D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F D-C7/C80 D-H7/H7W D-H7NF D-H7BAL Auto switch model D-F7V D-F7WV D-F7BAVL D-C73C D-C80C D-H7C D-A7 D-A80 D-A73C D-A80C D-J79C D-A79W Bore size (mm) Hs 17 20.5 Hs 19.5 23 Hs 20 23.5 Hs 16.5 19.5 Hs 17.5 20.5 Hs 23.5 26.5 Hs 20 23 Hs 23 26

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For details about auto switches with pre-wire connector, refer to page 7-9-36. 7-6-2 3 Series CQ2 Compact Cylinder: Standard Type Double Acting, Single Rod Type 12 40 16 50 20 63 25 80 32 100 Bore size (mm) Through-hole (Standard) Mounting Both ends tapped style Built-in magnet Pneumatic Air-hydro (1) M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Screw-in

One-touch Fittings

0.8 1.2 4.8 V M5 x 0.8 KQ2W23-M5l 7 7.1 7 15.3 25.2 25.7 13.3 2.8 2.4 2.5 5.8 V D2 4 M3 x 0.5 KQ2W04-M3G 7 8.2 7 15.4 23 24.5 13.3 0.8 0.8 1.2 4.9 V M5 x 0.8 KQ2W04-M5l 7 8.2 7 15.4 25.7 26.8 13.3 3 3 2.5 5.8 V 6 M5 x 0.8 KQ2W06-M5l 7 10.4 7 14.5 27.4 29.6 13.3 3 3 2.5 5.9 V A L2 H Sealant/Gasket Seal Face Seal Gasket Seal m: A (Brass), N (Brass + Electroless nickel plating) Connection thread

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

KQ2

3 16 KQ2H05-01S KQ2H05-02S KQ2H07-M5 KQ2H07-01S KQ2H07-02S 3.5 1 4 M5 x 0.8 M5> M5 x 0.8 2.5 13.6 Applicable tubing 1 8 1 4 1 4 14 13 17 4.6 3 8 KQ2H07-03S 21.9 16.5 17 27 15 16 1 8 1 4 5 16 KQ2H09-01S KQ2H09-02S 24 20.5 27.1 26 14 18.5 6 3 8 KQ2H09-03S 21.4 15.5 24 31 29 17 1 4 KQ2H11-02S KQ2H11-03S 27.5 22.5 33 27.9 Width across flats 8 17 3 8 3 8 21 7 1 2 KQ2H11

AC

A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1

CRBU

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Size Size Q1 = M L1 + (3 x P) L1 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 Q2 = M Q2 = M K axis (T axis) J axis 30 30 M3, M4, M5 M3, M4, M5 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 The long shaft can be further shortened by machining it into a stepped

ZP

Width across flats D A5 M5 x 0.8 A6 M6 x 1 15.5 C A Model A B C D Vacuum inlet direction q Pad dia.

Table of Contents

x 0.8 A PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 3.4 01: R 1/8 N01: NP T1/8 3 8 With across flats 12 M5 x 0.8 7 M5 x 0.8 16-3-26 5 Pressure Sensor For General Fluids Series PSE560 How to Order ZSE ISE Pressure sensing range PSE 0 1 3 4 Positive pressure (0 to 1 MPa) Vacuum

VM

(mm) M5 M5 4 4 Port size R Port size R 1 8 1 8 6 6 1 4 1 4 8 8 3 8 3 8 10 10 1 2 1 2 12 12 Flame Resistant Type (UL-94 Standard V-0 equivalent) 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): Male thread 2(A) 2(A) Port size R Applicable tubing O.D. (mm) 1 8 1 4 3 8 1 2 1(P) 4 6 8 10 12 1(P) Applicable tubing O.D.

15

M2 T2 PD PP LEC SS-T NZ M5 x 0.8 10 70 50 3.5 22.5 78 M3 x 12 1.5 M5 x 22 3 14 17.7 NY M4 x 0.7 8 70 50 3.5 22.5 78 M3 x 12 3.6 M5 x 22 3 14 17.7 NX M5 x 0.8 10 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NW M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 9 11.7 NV M4 x 0.7 8 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NU M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 11 11.7