Air Slide Table

A A1 B C D1 E F G H1 M (Fine pitch) P2 MXQ8(L, A, C, CL) MXQA-CS8-X2202 40 2 2.5 3 M3 x 12 18 5.8 8.3 2 M6 x 0.75 M3 x 6 MXQ12(L, A, C, CL) MXQA-CS12-X2202 45 2.8 2.5 4 M3 x 12 24 7.1 10.4 2.8 M8 x 1 M4 x 8 MXQ16(A) MXQA-CS16-X2202 50 3.6 3 5 M4 x 12 29.4 9.2 12.6 3.6 M10 x 1 M5 x 10 MXQ20(A) MXQA-CS20-X2202 57 4.4 4 6 M5 x 12 36 11.2 16.2 4.4 M12 x 1 M6 x 12 MXQ25(A) MXQA-CS25-X2202 64 5.5

ZP

x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK ZP2-R6020WK ZP2-R8020WK 2 x 1.5 0.5 0.5 0.5

ZP

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

SYJ300/500/700

Valve Location Base A port Porting specifications Top Direction Side M5 x 0.8 1 /8 M5 x 0.8 1/8 P, R port M5 x 0.8 C4 (One-touch fitting 4) Port size M3 x 0.5 A port M3 x 0.5 M5 x 0.8 X port Note) M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Effective area (mm2) Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(s bar)] 1(P), 3(R) Port 2(A) Port b Cv C

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

AS

Metric size: White Inch size: Orange Port size M5 M5 x 0.8 U10/32 10-32 UNF Note 2) Use 1/8" tubing. 2 0 F A 1 AS 1 M5 06 Body size 1 2 0 S F A 1 AS 2 01 06 Body size 2/3/4 Thread type Body size Nil R M5 x 0.8 1 Push-lock type 10-32 UNF N NPT 2 3 4 1/8, 1/4 3/8 Port size Seal method 1/2 01 02 03 04 Nil Without sealant 1/8 S With sealant 1/4 3/8 Elbow 1/2 Applicable tubing O.D.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Base Side Valve Top Location A, B port Porting specifications Direction P: 1/8 R: M5 x 0.8 Port size M5 x 0.8 1/8 P, R port A, B port M3 x 0.5 M5 x 0.8, C4 (4 One-touch fitting) Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported

Table of Contents

11.5 11 4 CRBU2WU30-S 0 0.043 0.005 0.014 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 8 16 2 22 29 47.5 50 17.5 12 1 12 13 4.5 Double vane type CRBU2WU10-D CRBU2WU15/20/30-D Illustrations below show size 20 actuators. 2-3.5 through 2-M3 x 0.5 through 2-3.5 through 2-3.5 through Free mounting rotary actuator (Connection port) B port A port A port B port Angle adjuster Cap Illustrations above show

Vacuum Pad

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

Vacuum Pad

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

Vacuum Pad

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

4 CRBU2 CRB1 85 MSU CRJ 2-M5 x 0.8 through 2-5.5 through CRA1 25h9 0 0.052 38 CRQ2 10g6 0.005 0.014 11.5 2 MSQ 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MRQ 20 30 2-5.5 through D2-5.5 through 38 20 3 205 5 16 14 (98) 53 B port A port 2-M5 x 0.8 15 4.5 10g6 -0.005 -0.014 CRBU2W40-SE/DE 25h9 0 -0.052 63 A port B port 20 2-M5 x 0.8

NCQ2/CQ2

C 3 9 2 X W 2 Q The same dimensions as the CQ1W 12, 20 12, 20 (With auto switch) 32 to 100 Auto switch 2 x H thread depth C 2 x H thread depth C 2 x H thread depth C B + Stroke B + Stroke B + Stroke S + 2 (Stroke) L L L S + 2 (Stroke) A + 2 (Stroke) S + 2 (Stroke) A + 2 (Stroke) A + 2 (Stroke) Without Auto Switch 12 20 5 10 20 33 26 3.5 29.5 32 40 5, 10 20, 30 40 46.5 40 3.5 43 M6 x 1 9 50

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

11.5 11 4 CRBU2WU30-S 0 0.043 0.005 0.014 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 8 16 2 22 29 47.5 50 17.5 12 1 12 13 4.5 Double vane type CRBU2WU10-D CRBU2WU15/20/30-D Illustrations below show size 20 actuators. 2-3.5 through 2-M3 x 0.5 through 2-3.5 through 2-3.5 through Free mounting rotary actuator (Connection port) B port A port A port B port Angle adjuster Cap Illustrations above show

Air Fittings & Tubing

<M5> (1) (2) Tube O.D.

Base Mounted Metal Seal/Rubber Seal Series VQ

5.5 9 (4(A), 2(B) port) 9 9 9 SMC 5 3-C4, M5(1(P), 4(A), 2(B) port) M5(5(R1) , 3(R2) port) 8.7 8.7 C4: One-touch fitting for 4 M5: M5 thread < >: AC 2 position double: VQ025 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 10.5 25 18 A A B B ~ = ~ = EB P EA EB EB P EA EA 23.4 mounting holes 38 31 Lead wire length = 300 121<131> M plug connector 108<118.5> L plug connector 51 (

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

4-O counterbore 2-M5 x 0.8 (Port size) B + Stroke A + Stroke With Boss in Head Side With boss in head side Bore size (mm) 12 16 20 25 Th9 G 15 0 0.043 20 0 0.052 13 0 0.043 15 0 0.043 1.5 1.5 2 2 Note 1) With boss in rod side: Option (Suffix -XC36 to the end of part number.)

Metal Seal/Rubber Seal Series VQ Body Ported

8 7 6 5 4 3 2 1 U side VQD P P A A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

CRB2/CRBU2/CRB1

25h9 0 0.052 38 10g6 0.005 0.014 11.5 2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 20 30 2-5.5 through 2-5.5 through 38 20 3 5 5 16 14 (98) 53 B port A port 2-M5 x 0.8 CRB1 15 4.5 10g6 0.005 0.014 CRBU2W40-SE, DE 25h9 0 0.052 63 A port B port 16 2-M5 x 0.8 56 3-5.5 x 17.5L (Circumference divided in 3 equivalents) 43 Series CDRBU2 Dimensions

Air Cylinder

MM GA NDh8 D MM NN GA Piping port 2 x M5 x 0.8 NN C D B 0 0.3 Z + 2 x Stroke S + Stroke H NA F A NA F H + Stroke A B 0 0.3 Stroke With air cushion: CJ2WB 10 16 AZ Mounting nut WA WA Rod end nut 45 GA Piping port 2 x M5 x 0.8 GA C B 0 0.3 NA NA B 0 0.3 Z + 2 x Stroke S + Stroke For details of the mounting nut, refer to page 63.