Rotary Actuator

V V V J* Z* J* J, Z* J* -XA56 Change of double shaft length (Both with four chamfers) V V V Z* -XA57 Change of double shaft length (Without keyway, With hour chamfers) V V V J* -XA58 Reversed shaft, Change of shaft length (With four chamfers, Without keyway) V V V V T* J* -XA59 Reversed shaft, Change of shaft length (With four chamfers) V V X* MRQ Combination Chart of

Dual Rod Cylinder Series CXSJ/CXS

Tightening Torque of Auto Switch Mounting Screw (Nm) Auto switch model Tightening torque D-A9(V) D-M9(V) D-M9W(V) 0.10 to 0.20 0.05 to 0.15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. Normally closed (NC = b contact), solid state auto switches (D-F9G and D-F9H type) are also available. For details, refer to page 1746.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Position (Detection at stroke end) and Its Mounting Height CJ2Y-Z CM2Y-Z CG1Y-Z MBY-Z CA2Y-Z CS2Y CQSY CQ2Y-Z CJ2X-Z CM2X-Z CQSX CQ2X CUX (mm) Auto Switch Proper Mounting Position Auto switch model Band mounting D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-H7m D-H7C D-H7NF D-H7mW D-H7BA D-C7m D-C80 D-C73C D-C80C D-A9m D-A9mV A B A B A B A B Bore size 10 (5) 6 (5) 6 (1) 2 (1) 2 2.5 2.5 1.5

Aluminum High Vacuum Angle Valve

K (DN) E H V I G L H A V V M A C U U Flange side r Temperature specifications/Heater t Auto switch type Symbol Nil Auto switch model Without auto switch (without built-in magnet) Remarks Symbol Nil Temperature 5 to 60C Heater With 100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

12 125 140 160 63 80 100 50 16 20 25 32 40 D-A7(H)(C) D-A80(H)(C) D-A9(V) D-Z7 D-Z80 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V)L D-F7NTL D-F79F D-F9(V) D-F9W(V) D-F9BA(V)L D-Y59 D-Y69 D-Y7P(V) D-Y7W(V) D-Y7BAL D-P5DW 13 13 13 12 12 13 10 10 12 12 12 12 11 11.5 9 11.5 9.5 9.5 9.5 14 14 14 15 15.5 CUJ 6 9 9 8.5 6.5 6.5 7 6 5.5 6 5.5 5 6 CU CQS 5.5 6.5 5.5 6.5 5.5 5.5 CQM CQ2 11.5 11.5 11.5 12

Free Mount Cylinder Series CU

D-A9 V D-M9 V D-M9WV 20 (22) 7.5 (5) ( ): Denotes the values of D-A9V.

MY1

guide type) Data MY1H (High precision guide type) D-F9NW(V), D-F9PW(V), D-F9BW(V) Bore size (mm) Applicable cylinder series 16 20 25 32 40 10 50 63 80 100 MY1B (Basic type) MY1M (Slide bearing type) MY1C (Cam follower guide type) MY1H (High precision guide type) D-Y59 , D-Y69 , D-Y7P(V) A B A B Bore size (mm) Applicable cylinder series 16 20 25 32 40 50 63 80 100 MY1B (Basic type)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MB = ~Hs Auto switch = ~ Hs Auto switch MB1 CA2 CS1 Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NTL D-G5BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF C76 D-G5NTL D-G59F D-H7C D-G5BAL D-C7/C8 D-H7 D-H7W D-H7F D-H7BAL D-B5/B6 D-B59W D-G5/K5 D-G5W D-K59W Auto switch model D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-B59W C85 Bore size (mm) C95 HS

NCQ8

NCDQ8A(B)Z-(C)(M) (in) NCDQ8A(B)Z-100T(M) (025st to 100st) (in) D-A9, D-A9V D-M9(V), D-F9W(V) D-A9, D-A9V D-M9(V), D-F9W(V) D-F9BAL D-F9BAL Bore size Bore size A B HS A B HS A B HS A B HS A B HS A B HS 056 075 106 150 200 250 056 075 106 150 200 250 0.24 0.14 0.33 0.31 0.2 0.35 0.04 0.08 0.12 0.12 0.2 0.28 0.71 0.81 0.96 1.18 1.45 1.6 0.39 0.3 0.49 0.47 0.35 0.51 0.2 0.24 0.28 0.28 0.35 0.43

Table of Contents

90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.

Table of Contents

Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.

CXS

Zener diodes OUT() Blue [Black] Dimensions D-A90, D-A93, D-A96 D-A90V, D-A93V, D-A96V Auto Switches Made to Order The dimension inside ( ) is for D-A93. 41 Solid State Switches: Direct Mounting Type D-F9N(V), D-F9P(V), D-F9B(V) Specifications Grommet D-F9, D-F9V (with indicator light) D-F9BV D-F9B D-F9NV D-F9N Perpendicular D-F9PV D-F9P Auto switch part no.

Rotary Actuator/Vane Type

The angle is 60 when any of the following are used: D-90/90A/97/93A The angle is 69 when any of the following are used: D-S99(V)/T99(V)/S9P(V) 67 A Free Mount Type Rotary Actuator Vane Type CRBU2 Series Size: 10, 15, 20, 30, 40 RoHS How to Order S E y CRBU2 20 180 Z W CDRBU2 S 20 180 L Z M9B W With auto switch q e w !

Table of Contents

PSE Z I SE3 5 V Output voltage F PS F.S. F.S. is the abbreviation for Full Span or Full Scale. The maximum fluctuation width. EX.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

The length is 24 when any of the following auto switches are used: D-90, D-90A, D-S99(V), D-T99 and D-S9P(V). The length is 30 when any of the following auto switches are used: D-97 and D-93A 2. The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97 and D-93A. The angle is 69 when any of the following auto switches are used: D-S99(V), D-T99(V) and D-S9P(V).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.

4/5 Port Solenoid Valve

DC specifications of type "D" and "DO" is only available with 12 and 24 V DC.

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

MB

CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto Switch Mounting Height (mm) MB D-Z7/Z-80 D-Y59 D-Y7P D-Y7W D-F5, D-J5 D-F59F D-F5W, D-J59W D-F5BAL, D-F5NTL D-A5 D-A6 D-A59W D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV Bore size D-Y7BAL D-A44 D-P5DWL MB1 (mm) Ht Hs

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?