VXD21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G Connection Applicable model VXD2130-02 VXD2130-03, VXD2140-03 VXD2130-04, VXD2140-04 VXD2150-06 VXD2260-10 VXD2270-32 VXD2380-40

Air Cylinder

MB1 D-G5/K5/G5W/G5BA D-K59W, D-G59F, D-G5NT 20 to 100 D-C7/C8, D-C73C/C80C 20 to 63 CA2 CS1 Hs Hs CS2 24.5 16 A B B A D-B5/B6/B59W 20 to 100 D-H7/H7W D-H7NF/H7BA/D-H7C 20 to 63 Hs Hs 24.5 16 B A A B Auto Switch Mounting Height (mm) D-H7 D-H7W D-H7NF D-H7BA D-C7/C8 Auto switch model D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-G5NT D-G59F D-H7C D-G5BA D-C73C D-C80C

Compressed Air Preparation Filter

Example) AMK30-N03B-6RZ-D q e r t y w V w Symbol Description Body size 20 30 40 50 60 V q Filter type AMK Activated carbon filter V V V V V + V e Thread type Nil Rc V V V V V N NPT V V V V V F G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V 10 1 V V + V r Port size a Mounting Nil Without mounting option V V V V V Option V t B1 With bracket V V V V V + Nil Polycarbonate

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-G59F 5 5 5.5 6 7 7.5 8 7.5 D-B5/B6 BA -04 BA -05 BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

-fl Seies

,qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

D 5 D 5 Individual SUP block assembly Individual EXH block assembly U side D side U side D side B A B A B A B A B A B A B A B A P P R R P R [When supplying different pressure only to an intermediate valve] Indicate the arrangement of the individual SUP block assembly and SUP blocking disk on a manifold specification sheet.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

,qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!

Flow Control Equipment

Model Port size AK M3 X 0.5 0.3 0.3 ASV120F-M3 M5 X 0.8 1.3 1.3 ASV220F-M5 ASS R(PT)1/8 8 7 ASV310F-01 R(PT)1/4 8 7 ASV310F-02 R(PT)1/8 14 13.5 ASV410F-01 R(PT)1/4 14 13.5 ASV410F-02 R(PT)3/8 14 13.5 ASV410F-03 R(PT)1/4 27 23 ASV510F-02 R(PT)3/8 29 27 ASV510F-03 R(PT)1/2 29 27 ASV510F-04 Specifications Model ASV120F ASV220F ASV310F/410F ASV510F 1.5MPa Proof pressure 1MPa Max. operating

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

asilltr

Switches D-A73.D-A73H D-A76H D-A72, D-A72H comact pror6ctiv6 iifrffi I co.'rua i Lishl 'ni'ng dr.d iFolec''v r-o'" . --{%!fi; ,Ek---r iE I ll zenrdDd i i-:--:-:]"ffi -l*L r-Choks i n"a El6ctric (-) o-A73c it\ihr ;ifie ;rod; i :t r**G}ri 'p D-479W / rwo @tor6 Solid. Sta,te Suitches D-J79. D-J79C, D-F7BV D-F79.D-F7NV l--;;;-;-l .."

Air Cylinder NCQ7 Series Compact Cylinder

Switches D-A73.D-A73H D-A76H D-A72, D-A72H comact pror6ctiv6 iifrffi I co.'rua i Lishl 'ni'ng dr.d iFolec''v r-o'" . --{%!fi; ,Ek---r iE I ll zenrdDd i i-:--:-:]"ffi -l*L r-Choks i n"a El6ctric (-) o-A73c it\ihr ;ifie ;rod; i :t r**G}ri 'p D-479W / rwo @tor6 Solid. Sta,te Suitches D-J79.

MGG

R Y + Stroke View D-D' 63 to 100 Reinforcing bracket Mounted in case of 301mm or longer strokes Front mounting flange Width across flats HT B HS C D View C-C' HU D' C' A R Y + Stroke View D-D' Auto switch mounting position Auto switch mounting height (mm) (mm) D-A72, A7H, A80H D-A73C, A80C D-F7, F7V, F7W D-F7WV, F7BAL D-J7 D-A7H, J79W D-A80H, F7BAL D-F7, F7F D-J79, F7NTL D-F7W D-A7, A8 D-F7V

PSxx-OMM0002CN

P PNP Max.80 mA 1 V -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F

ZX

Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common

33

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 195 Thermo-chiller Basic Type HRSE Series

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Title not found

Air operated style fluid control valve Vacuum valve Vacuum pad 2(A) 1(P) 2(A) 1(P) 2(A) 1(P) 2(A) 3(P) 3(R) 3(R) 3(R) 1(R) Atmospheric air or micro pressure for vacuum release 22 Multi-purpose Valve Series VCA Direct Operated 2 Port Solenoid Valve for Air Improved durability (Nearly twice the life of the previous series) Operating resistance of moving parts reduced for improved longevity

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

3 Port Solenoid Valve Rubber Seal Series SY100 1

0.5 (With indicator light: 0.55) (A) 2 0.9 (With indicator light: 1.0) 100 V 110 V [115 V] 1.0 (With indicator light: 1.1) [1.1 (With indicator light: 1.2)] 3 (R) 1 (P) 1 (R) 3 (P) Apparent power (VA) AC 1.8 (With indicator light: 1.9) 200 V 1.9 (With indicator light: 2.0) [2.2 (With indicator light: 2.3)] 220 V [230 V] Made to Order Specifications (For details, refer to page 4-3-17.)