5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

-52-1A Bushing assembly 6 Refer to page 7.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

Air Cylinder

D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM3 D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 CG1 D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) CG3 D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) JMB D-C7 D-C80 5 15

VM

Push button (Flush) VM220-02-33 VM230-02-33 JIS Symbol 2 port 3 port Panel mounting hole EXH port (3 port only) 0.5 MPa supply 4.9 mm P.T. 52 N F.O.F. 2-5.5 mounting hole 1.6 mm O.T. 6.5 mm T.T.

VM

Push button (Flush) VM220-02-33 VM230-02-33 JIS Symbol 2 port 3 port Panel mounting hole EXH port (3 port only) 0.5 MPa supply 4.9 mm P.T. 52 N F.O.F. 2-5.5 mounting hole 1.6 mm O.T. 6.5 mm T.T.

VS 8-2/VS 8-4

1) x 19 52 3 U side D side n Station number 4 5 2 1 Indicator light L2 L1 45 45 (n-1) x 19 45 88 15 19 2 2 Manual override 152 (Double dual 3-port) 133 118 (Single) 165(3-position) 6.5 112 99 4 x M5 mounting holes Formula: L1 = 19n + 71, L2 = 19n + 123 n: Stations (Maximum 16 stations) Dimension (mm) 7 L n 6 5 4 3 2 9 242 294 90 142 1 128 180 223 275 8 204 256 10 261 313 11 280 332 12 299

42

52 VQ4000 3/8 Exhaust center Metal seal VQ440 5 0 6.2 0.18 1.5 6.9 0.17 1.7 45 47 47 0.28 (0.34) Rubber seal VQ440 5 1 7.0 0.38 1.9 7.3 0.38 2.0 50 52 52 3-position Pressure center Metal seal VQ450 5 0 6.2 0.18 1.6 6.4 0.18 1.6 45 47 47 0.28 (0.34) Rubber seal VQ450 5 1 7.0 0.38 1.9 7.1 0.38 2.0 50 52 52 Double check Metal seal VQ460 5 0 2.7 3.7 55 57 57 0.50 (0.56) Rubber seal VQ460

REA/REB

V V 100 80 50 40 30 REAHT32 REAH(T)25 Load weight W (kg) 20 REAH20 10 REAH15 REAH10 1 0.5 100 200 300 Maximum speed U (mm/s) 10-2-52 52 Series REAH Model Selection 3 Selection Calculation The selection calculation finds the load factors (n) of the items below, where the total (n) does not exceed 1. n = 1 + 2 + 3 1 RE A B Load factor n 1 = W/Wmax

REA/REB

V V 100 80 50 40 30 REAHT32 REAH(T)25 Load weight W (kg) 20 REAH20 10 REAH15 REAH10 1 0.5 100 200 300 Maximum speed U (mm/s) 10-2-52 52 Series REAH Model Selection 3 Selection Calculation The selection calculation finds the load factors (n) of the items below, where the total (n) does not exceed 1. n = 1 + 2 + 3 1 RE A B Load factor n 1 = W/Wmax

Table of Contents

OFF n-3 Accumulated flow rate Note 1) n Note 1) Output mode is set to inverted output at the factory before shipment.

ZPT/ZPX

Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread) Misc.

CNG

32 100 D Standard Type With Auto Switch CDNG L N 32 100 D B53 Number of auto switches With auto switch (with magnet) 2 pcs.

CM2

NEW ZEALAND SMC Pneumatics (N.2.) Ltd.

PA300/500/700

Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212 7 260 245 8 293 278 9 326 311 10 359 344 2 95 80 3 128 113 4 161 146 5 194 179 5-5-23 12 Series VPA300/500/700 Dimensions Common exhaust: VV3PA7-41Station 1-04 NO NC 112 (R port) Rc 1/2 40 (Mounting hole) 2-8.5 24 PA 52 119.5 112.5 48 3(R) 119.5 86 1(P) 52 PA (P port) Rc 1/2 (Pitch) (PA port) Rc 1/8 41 37 8 L2 112.8 L1

Table of Contents

Refer to page 3-8-52 for details.

LEC-OM02704CN

2)0 RX(n+2)0 RY(n+2)1 RX(n+2)1 RY(n+2)2 RX(n+2)2 1 PT0 RY(n+2)3 6 DI5 RX(n+2)3 2 PT1 RY(n+2)4 7 DI6 RX(n+2)4 3 PT2 RY(n+2)5 8 DI7 RX(n+2)5 4 PT3 RY(n+2)6 TL1 RX(n+2)6 5 PT4 RY(n+2)7 PC RX(n+2)7 6 PT5 RY(n+2)8 CDP RX(n+2)8 7 PT6 RY(n+2)9 RX(n+2)9 8 PT7 RX(n+2)A RY(n+2)A RX(n+2)F RX(n+3)0 RY(n+2)B / RX(n+3)9 RY(n2)C RX(n+3)A ALM 15 RY(n+2)F RY(n+3)0 RX(n+3)B Ready CRD RY(n+3

Cylinder with Lock

n 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 100 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 55 60 65 70 75 D-M9AV n 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 70 + 30 (n 4) 2 (n = 4, 8,

MNB

Double rod type n n pcs. Type of auto switch Mounting bracket Nil Without auto switch B Basic type Select the applicable auto switch type from the table below.

VQZ1000/2000/3000

20 330 340 362.5 373 L1 L2 L3 L4 2-7-51 Base Mounted 52 52 Series VQZ1000/2000/3000 Dimensions: VQZ3000 VV5QZ35Stations Port size C Grommet (G) 49 (12) (7.5) (35) 44.5 mounting hole DIN rail clamp screw 41 19.5 (5.5) 9.4 2n-C6, C8, C10 C10: One-touch fitting for 10 C8: One-touch fitting for 8 C6: One-touch fitting for 6 U side n A 4 B 2 Manual override 5 4 SMC SMC (L3) (L4) L1 L2 3 SMC SMC

TABLE OF CONTENTS

Special Consult Factory Splice Box N Metered Exhaust Port U Metered Exhaust Adapter Built-in Muffler V (For use with valve adapter) Potted Coil in Housing P Spade Terminal Coil Molded KM n/a Universal Mounting Bracket 20-2416 n/a Universal Bracket Top Mount B96 3RD Wire Ground CC Weather Proof Seal W n/a n/a Aluminum Shading Rings A Silver Shading Rings S Consult Factory for price fluctuations