Fluoropolymer Piping Equipment

3/4" x 5/8" 1/2" 12 x 10 3/4" 1/2" 1" x 7/8" 3/4" 19 x 16 1" 3/4" 7 B 1 1/4" x 1.1" 1" 7 C 25 x 22 1 1/4" 8 C 1 1/2" x 1.33" 1 1/2" Fitting type H, piping type M: Male connector only.

MXQ

5H9 depth 5 +0.030 0 6 B A NN-M6 x 1 thread depth 12 24 9.5 9.5 5.1 5.1 10.5 10.5 B H A 21 9 21 9 (NN 1) x H G Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118

Title not found

N P FD FT FX FZ H zz I h 22 1 3 6 (3s) 3 . 1 9 (81) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 ( 1 0 ) 0.67 ( 1 7 ) MAx1.25 024 l7t M18x1.5 1 . 1 4 (30) 3 5 4 (90) 2 7 6 (70) 0 3 5 ( s 0 ) (.12) 3.54 (90) 1.97 (50) 4.33 ( 1 1 0 ) 2.28 (54) 6 3 0 o60) 205 (52) 11 2l 2.60 (66) s T o 6.61 (168) 1.38 {3s) 3.98 ( 1 0 1 ) 3.35 (85) 2.52 (s) 0 7 9 (20) (40) 0.39 ( 1 0 ) 0.67 ( 1 7 ) 0 2 8 t7l

CQS

Q I RA K RB L T M N OA E D 6 8 10 12 C B 22 22 26 29 A 34 34 45 49 B 27 27 36 39 12 16 20 25 25 29 36 40 6 8 7 12 5 to 30 5 to 30 5 to 50 5 to 50 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 7.5 7.5 9 11 32 38 47 52 7 7 10 10 5 6 8 10 4 4 7 7 3.5 3.5 4.5 5 0.5 0.5 1 1 15.5 20 25.5 28 3.5 3.5 5.4 5.4 Note 1) For basic style 20 and 25 with 5 stroke, through-hole

Air Cylinder CP Series Cylinder Positioner Assembly

N P FD FT FX FZ H zz I h 22 1 3 6 (3s) 3 . 1 9 (81) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 ( 1 0 ) 0.67 ( 1 7 ) MAx1.25 024 l7t M18x1.5 1 . 1 4 (30) 3 5 4 (90) 2 7 6 (70) 0 3 5 ( s 0 ) (.12) 3.54 (90) 1.97 (50) 4.33 ( 1 1 0 ) 2.28 (54) 6 3 0 o60) 205 (52) 11 2l 2.60 (66) s T o 6.61 (168) 1.38 {3s) 3.98 ( 1 0 1 ) 3.35 (85) 2.52 (s) 0 7 9 (20) (40) 0.39 ( 1 0 ) 0.67 ( 1 7 ) 0 2 8 t7l

MG

@2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

Table of Contents

D2 D3 L1 L2 L3 L4 M1 L5 Weight T D1 H(1) D2 D3 L1 L2 L3 L4 M1 L5 H(1) A(2) A(2) AQ Weight (g) (g) Model Min.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 20 25 32 40 50 63 80 100 Without rod boot With rod boot on one side With rod boot on both sides Bore size (mm) TA Air-hydro TC H 35 40 40 50 58 58 71 71 ZZ 147 157 159 187 218 218 264 264 e 30 30 35 35 40 40 52 62 f 16 17 17 17 17 18 10 7 h 55 62 62 70 78 78 80 80 IJ 27 32 38 48 59 72 59 71 JH

CM2

41 45 45 50 H1 5 6 6 8 0 0.033 0 0.033 0 0.033 8 10 12 14 1/8 1/8 1/8 0 0.039 1/4 With Rod Boot S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 h Symbol Bore size (mm) 20 25 32 40 e f B3 Stroke Bore size (mm) 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

L8 + Stroke H + Stroke A WH + Stroke G With rod boot at one end d e f l h h + L8 + H + 2 x Stroke With rod boot at both ends d e d e L8 + Stroke h f l 2 x h + L8 + 2 x Stroke h + Stroke l + Stroke f A B d11 D EE PL RT L12 KK SW G BG L8 VD WA WB WH ZY Bore size (mm) Stroke range (mm) L2 L9 32 40 50 63 80 100 125 190 26 7 4 4 94 16 32 10 M10 x 1.25 6 M6 x 1 13 G 1/8 4 12 15 30 Up to 1000 22

CNG

KA MM NA PG PH PL S FD FT FX FY FZ XA XB P l H 0.25 ZZ e f h ZZ 198 (206) 26 141 (149) 35 178 (186) 30 22 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 215 (223) 31 151 (159) 40 193 (201) 30 24 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 5.5 7 60 30 75 3 12 M5 x 0.8 218 (226) 38 154 (162) 40 196 (204) 35 24 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 6.6 7 60 30 75 3 12

MGP

8 32 15 34 30 96 44 110 78 98 63 48 300 83 121 171 32 46 11 7.5 Rc 1/8 38 18 38 30 104 44 118 86 106 72 48 124 200 300 84 122 172 40 48 14 9 Rc 1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 50 14 9 Rc 1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88 124 174 63 MGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A DB E Bore size (mm) Bore size (mm) X XA XB XC

LJ1H

1 B G LJ1 H 10 100 F W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact specification 2 pcs.

C95

R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20

Proposals for Energy Saving

ON YES Hysteresis mode OFF P-1 P-2 Real-time flow rate "P" H H Sensors Measuring Instruments ON Window comparator mode H: Hysteresis NO OFF P-1 P-2 Real-time flow rate OUT1 Output mode ON YES Hysteresis mode OFF n-1 n-2 Real-time flow rate "n" H H ON Window comparator mode H: Hysteresis OFF NO n-2 n-1 Real-time flow rate Accumulated pulse output ( ) Accumulated switch output ( )

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

•

g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

Cylinder with Lock Series CNG

52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 to 300 301 to 500 20 to 300 301 to 500 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 P K KA MM NA PG PH PL S FD FT FX FY FZ XA XB J l 0.25 ZZ 182 H e f h ZZ 202 35 30 16 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 220 198 40 30 17 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 5.5 7 60

F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T