Compact 5-Port Solenoid Valve

Molded cover L Seal (Length) 2 x M2.6 x 0.45 16 44 8 (2.4) 015 Connector JBZ-25S-3 made by J.S.T. Mfg. Co., Ltd. Connector hood L Terminal no.

1.1

[mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] 1.

0.55

Note VP344 VP544 VP744 VP 3 1 202 00 8 Gasket HNBR VP300-217-1 VP500-217-1 VP700-217-1 VP300-202-l VP500-202-l VP700-202-l 9 Sub-plate Aluminum die-casted Hexagon socket head bolt (1 pc.)

5 Port Solenoid Valve

5 Lead wire housing assembly VVQC1000-L25-0-1 L kit with 0.6 m lead wire VVQC1000-L25-1-1 L kit with 1.5 m lead wire VVQC1000-L25-2-1 L kit with 3.0 m lead wire !6 Circular connector housing assembly VVQC1000-M26-1 M kit, 26 pins 677 VQC5000 Series Manifold Assembly Part No. D-side end plate assembly Manifold block assembly !8 Manifold block assembly part no. !

Slider Type Ball Screw Drive/11-LEFS Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

PF-OMM0004_C

min 216 L/min 540 L/min 10100 L/min 50250 L/min 3.555.0 L/min ( 3.5 L/min 0.0) 1.722.0 L/min ( 1.7 L/min 0.0) 0.355.50 L/min ( 0.35 L/min 0.00) 20350 L/min ( 20 L/min 0) 7140 L/min ( 7 L/min 0) 0.355.50 L/min 1.722.0 L/min 3.555.0 L/min 7140 L/min 20350 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 090 () 070 ( ) L/minL

High Purity Fluoropolymer

Model H G F L M N E B (E) 2-B 4 6 LQ2T22 LQ2T21 4 6 L 18 19 12 34.5 19.9 1/4 10 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) 43 SMC 5 6 8 24 22 9 18 26.2 52 42.5 (E) (E) G H 12 19 10 12 L L 6 30 28 11 22 33.1 21 59.5 51 Class 2, 3 7 36 32 14 28 40 46 58.5 (M) N Inch sizes Applicable tubing O.D.

VEX1

plug connector (L) M plug connector (M) M5 x 0.8 (P2) Refer to Table (1).

Plug-in Unit

1.5 m L dimension Part no.

JXCx-OMT0023

Refer to section 11.4 for the wire used for the extension cable. 2m or less MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L LE-CSM50m or less Driver Servo motor Servo amplifier Extension cable CNP1 AWG 19(red) AWG 19(white) AWG 19(black) AWG 19(green/yellow) U V U V M W W (Note) a) Relay connector for extension cable (Note) b)

Cylinder

<-III o ~ \ ~ r c-~~ ~ d" -, Rod end without L --' thread r~ \ A~OSW'tCh MM 8 NN LZ --' l S (Across H at) .. s .I w J 2051 3Gst 1561 I (mm) ,5 st lost ~ 1551 sst l. l0S" 20" 1.30>1. P .

Environment

L : Stroke [mm] (Operating condition) V : Speed [mm/s] (Operating condition) a1: Acceleration [mm/s2] (Operating condition) a2: Deceleration [mm/s2] (Operating condition) T2 = [s] L 0.5 V (T1 + T3) V T4: Settling time varies depending on the motor type and load. The value below is recommended.

Programless controller Step motor (servo 24 VDC)

When alarm is being generated, it displays the alarm group ("L" is not displayed). (b) (h) (g) (j) (i) When the set button (g), forward button (i), or reverse button (j) (l) (k) is operated, "L" will be displayed for 3 seconds before returning to the display of before operating those buttons.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)

155

D-M9P (Example) Nil Lead wire length 0.5 m 1 m M 3 m L 5 m Z Note 1) Applicable auto switch with 5 m lead wire Z Manufactured upon receipt of order as standard.

VEX1

plug connector, with lead wire L plug connector, without lead wire L plug connector, without connector M plug connector, with lead wire M plug connector, without lead wire M plug connector, without connector DlN connector 3 110V AC (50/60Hz) L 04 1 2 4 220V AC (50/60Hz) LN LO 5 24V DC 6 12V DC M 7 240V AC (50/60Hz) MN MO 9 Other Option D DO DlN terminal, without connector Caution Refer to

VQ5000

Note 3) Available only with F , L and T1 kits. Note 4) Specify the wiring specifications on the manifold specification sheet. (Except L kit) . . . . . . Minimum number of stations depends on the kit. (Refer to the table below.)

5 Port Solenoid Valve, Series VQC

Example: OMRON Corporation XS2Z-12 4 1 Signal H CAN_H 4 Signal L CAN_L 5 Compatible with DeviceNet specification Micro Style connector.

JXCx-OMU0004

B A-6 8 3 14.2 2 1 14 5.5 B1 A1 17.7 5 6 2 1 18 B6 A6 6.3 16 15 L 11 30.7 63 No.JXC-OMU0004-A 11.3 [5m ] A B-1 2 A A-1 1 L B B-2 6 LE-CP-1 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 S 8 3 4 + B-1 5 A-1 1 + B-3 2 A-3 8 14.2 B1 A1 17.7 2 1 14 18 10.2 6 A6 B6 5 B1 A1 B3 A3 2 1 5.7 15 16 L

VS7-6

AN110-01 Silencer for pilot EXH 1.19-22 VS7-8 Manifold/Dimensions L: Dimensions Common EXH n L L1 Equation n: stations L1=56n+64 L2=56n+80 n: stations L1=56n+90 L2=56n+106 M if ld i ht l f l M 0 96 0 77 (k ) Size 1 2 3 4 5 6 7 8 9 10 120 176 232 288 344 400 456 512 568 624 1 2 L2 136 192 248 304 360 416 472 528 584 640 L1 146 202 258 314 370 426 482 538 594 650 3 4 SV L2 162 218 274 330