Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ P EXH V V V V PE ZQ1 1U-K1 5 6 E F F K E F F KType J1 ZQ1 1U-J1 (With L-type plug connector) Bracket A (Standard) Suction filter Vacuum pressure switch Supply valve 62.8 Pilot pressure exhaust (PE) port M3, Atmospheric release Note 4) 2 x 3.2 through (Body mounting hole) Air pressure supply (P) port M5 Note 4) 69.4 76.3 (63.1) (63.1) Vacuum (V) port (M5) Note 4) SMC PE 20.3 29.4 3 20.2 P
-m For three phase 200 VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Three phase 200 to 230 VAC Single phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should
Nil M5 x 0.8 R1, R2 port 20 20 stations + + + + + + + Nil Rc Applicable solenoid valve 10-SYJ343-(-Q) Single solenoid pilot valve is on same side as the A, B port. P P P S F G A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A A, B port size B B B A, B port M5 x 0.8, C4 A N NPT Applicable blanking plate assembly M5 M5 x 0.8 T NPTF C4 4 One-touch fitting Refer to page 302.
Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.
S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.
01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V] Accessory
Refer to pages 68 and 69 for details regarding dimensions, etc. 9 G 2-P (Hexagon socket head plug) For MY1H16 2-P PP QQ PP QQ RR SS RR SS NC G G Cushion needle UU TT UU TT 2-P (Hexagon socket head plug) 2-P (Hexagon socket head plug) VV VV 2-ZZ (Hexagon socket head plug) 2-ZZ (Hexagon socket head plug) WW XX WW XX P M5 x 0.8 M5 x 0.8 ZZ M5 x 0.8 M5 x 0.8 WW 7.5 10.5 NC 14 17.5 G 14 12.5
P to A/B 3.6 (0.2) A/B to EA/EB 4.14 (0.23) P to A/B 9.18 (0.51) A/B to EA/EB 9.9 (0.55) P to A/B 15.84 (0.88) A/B to EA/EB 14.94 (0.83) Valve effective area Note 2) mm (Cv factor) C6: C8: C10: Manifold base weight W (g) n: Number of stations W = 13n + 35 W = 36n + 64 W = 43n + 64 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides
T2 V W T1 S 6.5 10 18 50 80 11 YB-03 32, 40 Part No.
V V V V V V V V Standard V V V V V V V V V D v v v v v v v V v CM2lF v v v V V v CM2l-l J K V CM2lH V v v V v v v V 10-, 11v v v v v v v 25ANote 6) CM3 CG1 CG3 Note 5) JMB V V V v V v 20Note 4) v v v V v CM2l R V V v V CM2lX v v CM2lM Note 5) MB MB1 v XB6 CA2 v v XB7 v v v v v XB9 v v v v v v XB12 CS1 v v v XB13 CS2 v XC3 v v v XC4 Note 5) v v v XC5 v v XC6 v v v v v XC8
N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.
Slide bearing type MY1M(W) Mechanically jointed rodless cylinder MY1 From P. 956 2 With cover (W) is also available.
Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 A, B port location P, EA, EB port Rc 1 4 M5 x 0.8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C4 (One-touch fitting 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note) For
Inclined operation Vertical operation Horizontal operation Review of load weight and operating pressure First tentative bore size determination W D 1.6 x P First tentative bore size determination 0.1 x Wcos + Wsin D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV
D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV (For vertical operation, refer to page 10-2-79.)
"VER2000" is V type. (Refer to "Best Pneumatics 1" on p.1.17-21 for further information.)
of load mass and operating pressure First tentative bore size determination W D 1.6 x P First tentative bore size determination 0.1 x Wcos + Wsin D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load mass & pressure Inclined operation W WV P PV (For vertical operation, refer to page 1012.)
Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common
Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5
5-M5 Port size M5 x 0.8 M5 M5 thread 58.5 P 50 Mounted on the manifold block to make an independent supply port when each solenoid valve uses different operating pressure.