5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

200 100 0 B 800 700 600 500 400 300 200 100 0 C 800 700 600 500 400 300 200 100 0 D 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Compact Type Dual-Rod Cylinder Series CXSJ

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

New

14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium

Parallel Style Air Gripper Series MHZ

8 12 18 22 8 12 18 22 60 135 270 470 70 145 290 515 70 140 290 515 17 45 66 104 Double acting Single acting type, Normally open Normally closed Normally open Single acting Single acting type, Normally closed 13 38 57 85 MHZ MHF Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

VQZ1000/2000/3000

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VQZ2121-C6 800 700 600 500 400 300 200 100 0 VQZ3121-C6 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being

AC

(AR300, 400, 500 only) Bowl can be attached and detached with one hand.

LEC-OM07605CN

PB10 ] _ _ _ 3 _ _ _ 4 22 [Pr. PB08 ] [Pr. PB09 ] [Pr.

MGC

MGCM Slide bearing Data 350, 400, 450, 500 350, 400, 450, 500, 600 75, 100, 125, 150, 350, 400, 450, 500, 600, 40 200, 250, 300 Ball bushing bearing 700, 800 MGCL 350, 400, 450, 500, 600, 50 700, 800, 900, 1000 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Compact Guide Cylinder

mm/s L = 100 mm, V = 400 mm/s 3 3 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 30 30 10 10 Load mass m [kg] Load mass m [kg] 2 2 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 22 MGPK Series Operating Range when Used as a Stopper Bore Sizes 12 to

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

KN Series Nozzles for Blowing

flats H1 H2 Weight (g) Connection thread KNK-R02-400 KNK-R02-600 KNK-R03-400 KNK-R03-600 KNK-R04-400 KNK-R04-600 32 32 40 40 54 54 31.9 31.9 32.4 32.4 34.1 34.1 38 38 39 39 42.2 42.2 17 17 17 17 22 22 17 17 17 17 17 17 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 4 6 4 6 4 6 35 D H2 H1 L1 A 8.5 Reference dimensions after R thread installation.

Booster Regulator/Air Tank

Make sure to refer to the procedure for maintenance. 1018 Booster Regulator VBA Series Dimensions VBA10A-02 With elbow silencer (Option) 150 Pressure gauge (Option) Elbow silencer (Option) 60 IN side gauge port Rc 1/8 OUT side gauge port Rc 1/8 28 7 28 7 ARJ Silencer (Option) 113 113 IN port 1/4 IN port 1/4 OUT port 1/4 AR425 to 935 23 27 23 27 OUT port 1/4 ARX 22 22 60 4 x 5.5 EXH port 1

Modular Design with Uniform Body Style

300 600 0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.7 MPa P1 = 0.7 MPa 0.01 0.01 0 0 0 600 400 200 800 1000 0 100 200 500 400 300 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 72 AFM20-D to AFM40-D Series AFD20-D to AFD40-D Series Dimensions

Single Axis Electric Actuator Series LJ1H

400 450 500 10kg 8kg 18kg 16kg 14kg Allowable dynamic moment Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing m a Vertical Vertical a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer

17

400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Select the load mass from within the range of limits shown in the graphs.

LEF-OM006xx

500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500

15

20 0.01 CY1H 100 400 250 0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Piston speed [mm/s] CY1F M2 M1, M3 [Graph 13] Allowable moment [Graph 11] Allowable moment CYP 200 200 100 100 Moment M1, M3 [Nm] Moment M2 [Nm] D CY1S25-Z CY1S25-Z E F D10 10 -X 5 5 100 400 250 100 400 350 Technical Data Piston speed [mm/s] Piston speed [mm/s] 1495 CY1S Series Calculation of Guide Load Factor Calculation

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

48

30 to 500 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 200 30 to 300 30 to 300 Size 16 25 32 Size 16 25 32 Size 16 25 32 Size 16 25 32 CAT.NAS100-83 RodType AC Servo Motor (100/200 W) Basic type In-line motor type Series LEYmD Series LEY Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 25 32 Size 25 32 CAT.NAS100-83 SliderType Step Motor (Servo/24 VDC) Servo Motor (24 VDC)