AC Servo Motor Driver manual adjustment) . 7 8 7.4 Interpolation mode . 7 -11 8.
COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.
11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66
11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66
70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.
12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82
, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.
, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke will be exceeded.
(mm) a=2000 400 LEC-MR-RB-032 LEC-MR-RB-032 LEC-MR-RB-032 LEC-MR-RB-032 A1 A2 B1 B2 a=3000 a 200 L3 Mey 0 2 4 6 8 10 Transfer load m (kg) Refer to page 45 for deflection data.
L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25
Vespel is a registered trademark of DuPont. 11 Intermediate flow (Tied-diaphragm) Single Stage Regulator for Ultra High Purity Series AP1400T Sub-atmospheric pressure delivery option Tied-diaphragm design For UHP gas delivery High inlet pressure type Standard: Max. 2300 psig(15.9 MPa) HR(option): Max. 3000 psig (20.7 MPa) Flow capacity : to 400 slpm Body material: 316L SS secondary remelt
D-H7NF Bore A B A B 32 8 7 7 6 40 14 12 13 11 Aim at this number.
401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125 40 12.5 25
400, 450, 500, 600 CLJ2 350, 400, 450, 500, 600, 700, 800 Intermediate strokes and short strokes other than the above are produced upon receipt of order.
11 15 17 10 14 18 18 22 26 27 36 5 7 8 8 10 10 13 16 23 27 30 31 37 40 45 55 11 11 14 14 19 19 42 52 74 84 90 98 116 126 160 180 17 19 24 24 30 30 41 55 136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32
Bar length (mm) IZN10-G-100-X226 IZN10-G-200-X226 IZN10-G-300-X226 IZN10-G-400-X226 IZN10-G-500-X226 IZN10-G-600-X226 100 IZN10-11 200 300 400 500 600 Recommended supply pressure: 0.05 to 0.15 MPa 459 IZN10 Series Made to Order 2 This product is an individually applicable product. For details about the delivery time and price, please consult with SMC representative.
Formula: L1 = 16n + 57, L2 = 16n + 163 n: Stations (Maximum 16 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 73 89 105 121 137 153 169 185 201 217 233 249 265 281 297 313 179 195 211 227 243 259 275 291 307 323 339 355 371 387 403 419 200 225 237.5 250 262.5 287.5 300 312.5 337.5 371 362.5 375 400 412.5 425 450 210.5 235.5 248 260.5 273 298 310.5 323 348 360.5 373 385.5
V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option) (Only 200 V as an option) Indoor use Electrical box: IPX4 CH1 0.1 15
auto switch: 10C to 70C, With auto switch: 10C to 60C (No freezing) Piston speed 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s +1.4 Stroke length tolerance 0 Basic style/Axial foot style/Rod side flange style/Head side flange style Mounting style 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Grade 2, 21-: Grade 3 11-/22-: Grade 1 Grease Particle generation grade (Refer
11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 D-F5, J5 D-F5W, J59W D-F5BAL, F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 5.5 5.5 6 6 6 D-F5LF 5 9 4 9 4 9 4 10 4.5 10 4 11 6 D-G39, K39 11 D-P5DWL 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.