ISO Cylinder

5 4 4 3.5 3.5 10 6.5 (7) 6.5 (7) 2 (2.5) 2 (2.5) 3 (3.5) 3 (3.5) 10 5 (5.5) 5 (5.5) 4 (4.5) 4 (4.5) 3.5 (4) 3.5 (4) 12 7.5 (8.5) 7.5 (8.5) 3 (4) 3 (4) 4 (5) 4 (5) 12 6 (7) 6 (7) 5 (6) 5 (6) 4.5 (5.5) 4.5 (5.5) 13.5 (10.5) [7.5] 12 (9) [6] 9.5 (6.5) [3.5] 11 (8) [5] 10.5 (7.5) [4.5] 8 (5) [2] 9.5 (6.5) [3.5] 9 (6) [3] 10 (7) [4] 16 7.5 (8.5) 16 6 (7) 3.5 (4.5) 5 (6) 4.5 (5.5

LEC-OM071xx

1 5 Adjustments 5.

5 Port Solenoid Valve

VQC 1/2 Valve + Double check spacer with residual pressure exhaust (VVQ4000-25A1 5 ) q AXT632-17-11 (M3 x 87) 3 w AXT632-41-1 (M3 x 54) 2 Not necessary when mounting the sub-plate. VQC 4/5 VQC 4/5 Valve + Interface regulator (ARBQ4000-00 A B P 1 5 ) q AXT632-17-11 (M3 x 87) 3 w AXT632-17-8 (M3 x 52) 2 Not necessary when mounting the sub-plate.

SX

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Applicable Auto Switch Model

9 10 10 11 9 9 10 10 11 11 11 11 11 10 10 10 10 OUT() 2nd terminal 9 9 9 10 10 11 8 9 9 Note) Average value at normal temperature including hysteresis.

Title not found

(800) 526-7661 Parallel Run LTees 3/8 7/16 1/4 5/16 5/16 1/4 5/16 1/4 8 T1-L1-1 T4-L4-4 T3-L3-3 T2-L2-2 Parallel Run Reducing LTees 3/8 5/16 5/16 5/16 3/4 15/16 5/16 5/16 5/16 5/16 5/16 5/16 1/4 1/4 MEM 27/32 5/8 5/8 3/4 9 RT3-2L-2 RT3-2L-3 RT4-3L-4 RT1-3L-1 RT3-1L-1 RT2-3L-2 1 11/16 Crosses 1/2 15/16 5/16 5/16 11/16 15/16 MEM 1/4 27/32 1 1 33/64 5/8 15/16 3/8 11/16 1 1/8 1/4 5/8 27/32

KJ

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

CV/MVGQ

5 !6 !7 !8 !

CV/MVGQ

5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

Air Cylinder

(0) 1 () 0 () 7 (5) 6 (4) 4 (2) 3 (1) CA2 25 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5 (0) 1 () 0 () 7 (5) 6 (4) 4 (2) 3 (1) CS1 32 11.5 (9) 10.5 (8) 7.5 (5) 6.5 (4) 1.5 (0) 0.5 (0) 7 (5) 6 (4) 3.5 (1.5) 2.5 (0.5) 2 (0) 1 (0) 8 (6) 7 (5) 5 (3) 4 (2) 40 17.5 15.5 13.5 11.5 6.5 5.5 12 11 8.5 7.5 7 6 13 12 10 9 CS2 * ( ): Setting position for the auto switch with

Swivels

Port 1 Port 2 B D Port 2 C PS2490210-20-20 5.91" 4.63" 3.43" 1.27" 2.63" 3.36" 1 1/4-11 1/2 1 5/8-12 150.2 mm 117.5 mm 87.0 mm 32.3 mm 66.7 mm 85.2 mm NPTF UN-2B Port 1 PS2490210-24-24 5.91" 4.63" 3.43" 1.27" 2.63" 3.36" 1 1/4-11 1/2 1 5/8-12 150.2 mm 117.5 mm 87.0 mm 32.3 mm 66.7 mm 85.2 mm NPTF UN-2B Dia PS3290210-32-32 6.75" 5.45" 3.93" 1.52" 3.06" 4.19" 2 11-1/2 2-1/2-12 171.5 mm 138.4

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Fluoropolymer Piping Equipment

Metric size Inch size Series Appearance Class 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/8" 1/2" 3/4" 1" 11/4" 25 4 3 11/4" 1 2 3 4 5 6 7 1 2 3 4 5 6 Male Connector LQ3H P.915 Female P.916 1 2 3 4 5 6 1 2 3 4 5 6 Male P.917 Elbow LQ3L Female P.918 1 2 3 4 5 6 1 2 3 4 5 6 Male P.919 Branch tee LQ3B Female P.920 1 2 3 4 5 6 1 2 3 4 5 6 Male P.921 Run tee LQ3R Female P.922 1 2

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

KQ2

(inch) Min. port size D Note) Mass (g) D L M1 M2 Model MS 5 32 KQ2H01-03 KQ2H01-07 KQ2H03-05 KQ2H03-07 KQ2H05-07 KQ2H07-09 KQ2H07-11 KQ2H09-11 KQ2H09-13 KQ2H11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 32.5 34.5 34 34.5 34.5 38.5 42 42 44 44 16 17 16.5 17 17 18.5 21 21 22 22 3 5 4 4 5 6 11 11 16 17 1 8 Applicable tubing 15.5 2.5 Applicable tubing 1 4 LQ 3 16 5 32 16 3 1 4 1 4 5

15

46 69.8 61.4 M3 x 12 M5 x 40 14 NY M4 x 0.7 8 70 50 5 46 69.8 61.4 M4 x 12 M5 x 40 11 NX M5 x 0.8 9 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 46 69.8 61.4 M3 x 12 M5 x 40 12 NM2 M4 x 0.7 8 50

Table of Contents

AD37 AD37N(5) AD48 AD48N(5) AD47 AD47N(5) AD48 AD48N(5) Float type auto-drain N.O.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

[I/O cable] LEC CK4 Cable length (L) [m] 1 1.5 3 3 5 5 Controller side PLC side (16) (7.9) (10) (11) (30) (60) (L) Conductor size: AWG26 Weight Terminal no.