Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

V

I O N S S E R I E S AQ240F/340F W I T H S I L E N C E R S Y M B O L S W I T H B U I LTI N S I L E N C E R S Y M B O L S W I T H O U T S I L E N C E R H O W T O O R D E R S E R I E S AQ240F/340F AQ 40 Models O.D size d D1 D2 D3 L1 L2 L3 M1 Weight AQ240F-04-00 4 9.5 8.9 10 39.3 5 14.1 13 4.2 B O D Y S I Z E AQ240F-06-00 6 11.5 11 10 43.9 6 15.2 14 5.2 AQ340F-06-00 6 11.5 11 11.8 45.2 6.3 20

7ND9071en

or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0 130.0 602 282 17200 1 10 mm or 3/8" 752 441 26900 1 10 mm or 3/8" B1J B1JA Stroke volume dm3 / in3 NPT Piping Air (s) Spring (s) Piping Air (s) Spring (s) Piping Air (s) Spring (s) 6 0.47 28.7 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 10 mm or 3/8" [6 mm or 1/4" (x)] 8 0.9 55

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

SFOD-OMT0009CN

17 9 () 1.2 LEFS LEFS16 LEFS25 A B H A B [mm] 10 5 20 12 6 [mm] 500 500 500 600 700 800 600 700 800 600 700 800 [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] 10 5 20 12 6 () [mm/s] 17 9 33 20 10 () LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] 24 16 8 () [mm/s] 39 26 13 () 108

Table of Contents

P . 15-11-3 15-9-2 2 Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS How to Order 2 2 0 01 06 S AS 1F Nil Option Body size 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard None With seal Hexagonal lock nut Electroless nickel plated S K N If more than one option is required, write option part numbers in the order of S, K, N.

Electric Grippers

to 28 6 to 14 25 16 14 6 4 to 8 32 20 22 52 to 130 10 16 to 40 11 to 28 40 25 30 84 to 210 14 F Type (2 fingers) S Type (3 fingers) Can hold various types of workpieces with a long stroke.

SFOD-OMT0010

) Min. speed [mm/s] 17 9 33 20 10 (Speed tuning control) Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and 24 16 8 interpolation) Min. speed [mm/s] 39 26 13 (Speed tuning control) 110 No.SFOD-OMT0010-B Model LEFS40 Lead symbol H A B Lead

JXCx-OMU0026

12 6 Min. speed [mm/s] (Speed tuning control) 17 9 33 20 10 Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke (mm) 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and interpolation) 24 16 8 Min. speed [mm/s] (Speed tuning control) 39 26 13 Model LEFS40 Lead symbol H A B Lead [mm] 30 20 10 Stroke

JXCx-OMT0001CN

12 6 [mm] 500 500 500 600 700 800 600 700 800 600 700 800 mm/s 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] () 10 5 20 12 6 [mm/s] () 17 9 33 20 10 LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 mm/s 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] () 24 16 8 [mm/s] () 39 26 13 -108No.JXC-OMT0001CN-C LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000

JXCx-OMT0002

12 6 Min. speed [mm/s] (Speed tuning control) 17 9 33 20 10 Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke (mm) 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and interpolation) 24 16 8 Min. speed [mm/s] (Speed tuning control) 39 26 13 -108No.

ITV

valve EXH ITV ITV 11 8.5 11 8.5 SUP OUT SUP OUT IC EXH (3) EXH (3) 13.5 13.5 ITVX Dimensions not shown are same as on page 826.

NCA1

Description Material 1 Rod Cover Aluminum alloy NCA200-02AQ3609-S NCA200-03-Q3609-S NCA250-02AQ3610-S NCA250-03-Q3610-S NCA325-02AQ3611-S NCA325-03-Q6311-S 2 Head Cover Aluminum alloy 3 Cylinder Tube Aluminum alloy Please See below for How to order Cylinder Tube 4 Piston Rod Carbon steel Available only as an Assembled Item.

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

15

V = 1.4 x Va V = 1.4 x 250 V = 350 mm/s Va M1E = 1/3 x FE x Z = 1/3 x 188.7 x 100/1000 = 6.3 [Nm] (A) M1E (z) m x g Z 3A = M1E/M1max = 6.3/17.1 = 0.37 Find the value M1Emax when Va = 350 mm/s from Graph (11) v. Va Examine M3E.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

C76

D-H7NF Bore A B A B 32 8 7 7 6 40 14 12 13 11 Aim at this number.

C76

Without magnet, Built-in magnet Bore Stroke B C95 CP95 NCM NCA D-X 20Data S + Stroke ZZ + Stroke (mm) AM 20 24 C 12 14 D 37.5 46.5 EE G 1/8 G 1/4 F 42.4 52.4 FF M6 x 1 depht 11 FX 30 36 G1 22 27 G2 9 12 H 36 40 K 10 12 KK M10 x 1.5 M12 x 1.75 N1 29 38 N2 17 22 NB 34.5 42.5 NDh8 S 80 105 SW 17 19 WH 16 16 ZZ 116 145 Bore 26 0 0.033 32 40 32 0 0.039 M8 x 1.25 depht 14 6-10-39 40 Series C76R

Compact Manifold Regulator

0.5 56 28 SMC MPa SMC SMC K K P P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

Step Motor Driver （ Pulse input type ）

From the point of 100mm, pushing starts at 30mm/s for 30mm with 50% of pushing force.