Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without

5 Port Solenoid Valve

0.24 2.6 11 0.23 2.8 50 53 0.65 Rubber seal VQC5301 12 0.33 3.4 13 0.37 3.7 60 63 0.58 VQC5000 1/2 Exhaust center Metal seal VQC5400 12 0.13 2.9 14 0.18 3.4 50 53 0.65 3-position Rubber seal VQC5401 14 0.39 3.9 16 0.35 4.5 60 63 0.58 Pressure center Metal seal VQC5500 12 0.23 2.9 13 0.24 3.3 50 53 0.65 Rubber seal VQC5501 13 0.32 3.4 14 0.40 3.9 60 63 0.58 Double check Metal seal VQC5600

C95

64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 6.6 7 8 11 10 38 51 10 21 18 26 31 32 10 40 9 10 11 12 41 54 10 24 22 28 35

Sine Rodless Cylinder Series REA/REB

20 40 0 60 80 20 40 0 60 Moment (Nm) Moment (Nm) Moment (Nm) Note) Deflection when a moment other than the above is applied can be specified by extending the lines in the graphs above.

C85

Construction 6-11-47

Cylinder with Lock

DL B DA DC DDH10 (hole) DE DF DH DO DR DS DT DU DX Z CA2-B04 CA2-B05 CA2-B06 CA2-B08 CA2-B10 +0.058 0 60 57 65 85 52 40 35 10 9 8 17 11 15 234 10 +0.070 0 70 57 65 85 52 40 35 10 9 8 17 11 18 261 12 12 60 162 +0.070 0 85 67 80 105 66 50 40 12.5 11 10 22 13.5 25 280 16 80 100 +0.084 0 102 93 100 130 90 65 60 15 13.5 12 24 16.5 31.5 337 20 +0.084 0 116 93 100 130 90 65 60 15 13.5 12 24 16.5

C85

Construction 6-11-47

Refrigerated Air Dryers

400, 400 to 415, 415 to 440 VAC (60 Hz) 11 440, 460 VAC (50 Hz) 440 to 460, 460 to 500 VAC (60 Hz) * Refer to pages 36 and 37 for dimensions.

Support Guide/11-LEFG Series

310 6 2 240 11-LEFG25-S-250 380 257 360 11-LEFG25-S-300 430 307 410 8 3 360 11-LEFG25-S-350 480 357 460 11-LEFG25-S-400 530 407 510 35 528 Support Guide 11-LEFG Series Dimensions: Ball Screw Drive 11-LEFG32-S 42 70 (122) 5H9 (+0.030 0 ) depth 5 4 x M6 x 1 thread depth 9.9 LEF 44 60 LEJ 5.5 5H9 (+0.030 0 ) depth 5 LEL 48 70 A (Table traveling distance) L 61 (62) 10 10 LEM 60 46.8 LEY (60)

REA/REB

Construction/Dimensions (mm) R Note 2) F Note 1) Model PA M MD MM LA L C HB B HA W A REA25 36 5 M4 M5 x 0.8 30 70 8.0 28.5 46 21 47 20 5.5 7 REA32 47 6 M5 M6 x 1.0 35 80 9.5 36 60 27.5 61 22.5 6.0 8 REA40 55 6 M5 M6 x 1.0 40 92 9.5 41 70 28.5 71 26 6.0 8 REA50 65 8 M6 M8 x 1.25 40 110 11 49 86 35 87 35 6.0 11 REA63 80 10 M6 M8 x 1.25 50 122 18 57 100 42 101 36 7.0 11 Note 1) Dimension F provides

VFS

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(0.6) C6: 8.6(0.48) C8: 9.9(0.55) M plug connector AC Non-locking push style SYJ3000 3 position 50 60 50 100V AC Hz 110V AC Hz 200V AC Hz 220V AC Hz Closed center Exhaust center Pressure center 60 50 60 M5 X 0.8: 1.8(0.1) 50 60 (1) AC Push-turnlocking slotted style With light and surge voltage suppressor SYJ5000 Rc(PT)1/8: 4.5(0.25) SYJ7000 Rc(PT)1/8, 1/4: 12.6(0.7) Note 1) All AC voltage

SYJ300/500/700

Power saving circuit is only available in the Z type. 3 220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 For type W, DC voltage is only available.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 0.5 45.5 1.5 50 Z ZZ H G (NN 1) x H 11.5 29 11.5 29 B A 5.1 9.5 11 11 5H9 depth 5 +0.030 0 30 NN x M6 x 1 thread depth 12 A B 6 HA GA Section AA Section BB 5H9 depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 N 4 4 4 4 6 6 6 8 8 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 GA

CRB2/CRBU2/CRB1

depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 82 98 3 8 14 21 80 39 5 34 83 17 45 52 60 8 75 9 R30 CDRB1BW 63-E CDRB1BW 8030 32 M8 x 1.25 depth 12 17 0.006 0.017 30 0 0.052 1/4 R8 95 110 3 8 15 21 90 48 5 34 94 19 53.5 63 70 7.5 88 9 R30 CDRB1BW 80-E CDRB1BW 100M10 x 1.5 depth 13 25 0.007 0.020 45 0 0.062 1/4 R11 125 140 4 13 11.5 21 103 60 5 39 120 28 65 78 80 7.5 108 11 R30 CDRB1BW

C95

64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 7 8 11 10 38 51 10 21 18 26 31 32 10 6.6 40 11 12 41 54 10 24 22 28 35 36 11

Table of Contents

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Bore size (mm) A N AD AC M AF L AE F K AB C E J AA AP B D G H I 99 45 75 16.5 25 80 30 60 11 92 55 24 5.5 12 25 108 60 30 20 75, 100, 125, 150, 200 M5 x 0.8 depth 10 9.5 depth 6 M8 x 1.25 depth 14 109 54 85 16.5 35 100 30 70 13 26.5 113 6.6 65 16 30 130 65 35 25 11 depth 8 M10 x 1.5 depth 18 M6 x 1 depth 12 75, 100 125, 150 200, 250 300 129 60 100 19 35 106 35 80 16 118

AS

36 60 6 35.3 17.9 21 3/8" 17 12.8 27.8 39.3 AS321F-02-08 AS321F-02-07 60 63 8 27.8 39.3 13.2 17 15.2 1/4" 18.5 41 29.5 23 37.8 21.3 42.8 43.3 48.3 AS321F-02-10 AS321F-02-09 67 18.5 63 10 29.5 21.3 48.3 18.5 43.3 42.8 15.2 41 21 37.8 5/16" 23 43.3 31.8 AS321F-02-12 AS321F-02-11 67 69 12 43.3 21 31.8 17.9 20.9 3/8" 22 44.3 32.8 19 19 AS321F-03-06 AS321F-03-07 55 55 6 39.3 17 27.8 13.2 12.8