ZP

-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

MB

Z Bore size (mm) Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

Fluoropolymer Piping Equipment

LQ3T11-R1 4 3 4 3.5 10 9 10 9 10 9 4.8 9.5 11 11 11 28.5 27.5 28.5 27.5 28.5 27.5 14 14 14 2 LQ3T11-R5 4 3 LQ3T21-R1 4 6 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2.5 LQ3T21-R2 3 6 2 LQ3T21-R5 6 4 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 2.5 LQ3T21-R6 6 3 2 LQ3T31-R1 6 8 10 25 25 6.4 LQ3T31-R2 6 10 17 16 16 38 37 20 4 LQ3T31-R5 10 8 22.5 19.5 21 21 47.5 44.5

CXS

80 100 0.05 15 Overhang L (mm) Graph up to 30mm 8 10 0 0.01 V = up to 100mm/s V = up to 300mm/s 20 40 60 80 100 0.05 Overhang L (mm) Weight m (kg) Graph V = over 400mm/s; up to 10mm 11 2 CXSM CXSL 1 CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang L (mm) 25 Graph up to 50mm 9 0.1 20 0.05 V = up to 100mm/s V = up to 300mm/s 0.05 0.04 15 0.03 10 Weight m (kg) 0 0.01 20 40 60

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D5080 72 36 5 20 10 45 16 16 11 11 95 90 50 100 D5100 89 41 5 25 10 55 20 20 11 12 115 110 60 125 D5125 110 50 7 30 10 60 25 26 13.5 10 Max. 157 130 70 * Supplied with 4 mounting screws, clevis pin, and clevis pin bracket. l1 Clevis pivot bracket (E) [mm] Bore size [mm] Part no. d2 CK S5 K1 K2 (Max.) l3 (Max.)

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

x 1.75 10 26 131 Bore size [mm] M MM N P PG PH PL PW S FV FD FT FX FY FZ Without rod boot With rod boot H ZZ d* e* f h l ZZ 40 11 M14 x 1.5 27 1/4 42 11 20 45 153 60 9 12 80 42 100 51 215 52 43 15 59 1/4 stroke 223 50 11 M18 x 1.5 30 3/8 46 10 21 50 168 70 9 12 90 50 110 58 237 58 52 15 66 1/4 stroke 245 63 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 86 11.5 15 105 59 130 58 254 58 52 17.5 66 1

KJ

11 !2 !33 !4 !5 !

Compact and Lightweight

60 60 60 60 60 Suction flow rate Air consumption 40 40 40 40 40 40 Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 10 20 50 40 30 60 Supply pressure [MPa] 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 5 10 25 20 15 30 Supply pressure [MPa] Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH13SA ZH13LA Exhaust Characteristics Flow Rate Characteristics Exhaust

ZP

A8 ZPT3507U ZPT13UT 4 3.5 13 14 4.8 1.8 1.6 0.8 0.5 7 4.3 7.8 1.5 ZPT06U-0-A8 ZPT4010U ZPT16UT 6 4 16 17 7 2 0.8 10 5 11 2.5 2.5 ZPT10CT 10 11 0.8 ZPT08U-0-A8 8 9 1 ZPT13CT 13 14 Dimensions by Stroke 1 ZPT16CT 16 17 F D E G: 4 G: 6 Model ZPT 6-0-A8 18 15 60 61 ZPT10-0-A8 23 93 94 ZPT15-0-A8 28 43 98 99 ZPT25-0-A8 38 108 109 13-11-16 17 Series ZPT Vacuum Pad: Vertical Vacuum Entry with Buffer

7.5

SJ 60 X90 (T) 2 3 Part no. Entry is the same as standard products.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without

5 Port Solenoid Valve

0.24 2.6 11 0.23 2.8 50 53 0.65 Rubber seal VQC5301 12 0.33 3.4 13 0.37 3.7 60 63 0.58 VQC5000 1/2 Exhaust center Metal seal VQC5400 12 0.13 2.9 14 0.18 3.4 50 53 0.65 3-position Rubber seal VQC5401 14 0.39 3.9 16 0.35 4.5 60 63 0.58 Pressure center Metal seal VQC5500 12 0.23 2.9 13 0.24 3.3 50 53 0.65 Rubber seal VQC5501 13 0.32 3.4 14 0.40 3.9 60 63 0.58 Double check Metal seal VQC5600

C95

64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 6.6 7 8 11 10 38 51 10 21 18 26 31 32 10 40 9 10 11 12 41 54 10 24 22 28 35

Sine Rodless Cylinder Series REA/REB

20 40 0 60 80 20 40 0 60 Moment (Nm) Moment (Nm) Moment (Nm) Note) Deflection when a moment other than the above is applied can be specified by extending the lines in the graphs above.

C85

Construction 6-11-47

Cylinder with Lock

DL B DA DC DDH10 (hole) DE DF DH DO DR DS DT DU DX Z CA2-B04 CA2-B05 CA2-B06 CA2-B08 CA2-B10 +0.058 0 60 57 65 85 52 40 35 10 9 8 17 11 15 234 10 +0.070 0 70 57 65 85 52 40 35 10 9 8 17 11 18 261 12 12 60 162 +0.070 0 85 67 80 105 66 50 40 12.5 11 10 22 13.5 25 280 16 80 100 +0.084 0 102 93 100 130 90 65 60 15 13.5 12 24 16.5 31.5 337 20 +0.084 0 116 93 100 130 90 65 60 15 13.5 12 24 16.5

C85

Construction 6-11-47