High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

48

] 400 400 500 mm stroke or less m 300 300 L5 600 mm stroke or less 600 mm stroke 200 200 100 100 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 300 300 250 250 Overhang: L6 [mm] Overhang: L6 [mm] 500 mm stroke or less 200 200 600 mm stroke or less m L6 150 150 100 100 600 mm stroke 50 50 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8

Mechanically Jointed Rodless Cylinders

MY3A40MY3B40 MY3A50MY3B50 MY3A63MY3B63 A B A B A B MY-S16 MY-S20 MY-S25 63.6 77.6 91 115 130 160 182 A B MY-S32 M8 x 1.25 45 64 11.7 6 11 6.6 A B MY-S40 M10 x 1.5 55 80 14.8 8.5 14 9 Note) A set of side supports consists of a left support and a right support.

7.5

Flow Characteristics SJ2000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b b Cv 0.04 0.55 0.13 0.13 0.50 0.04 C2 C8 0.08 0.16 0.33 0.36 0.13 0.08 C4 0.52 0.06 0.18 0.20 0.29 M3 0.06 SJ3000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b 0.04 0.56 C2

Applicable Auto Switch Model

10 12 12 13 13 13 CD-P11 CD-P12 OUT( ) Blue(Black) B P CDXW 6 6 6 CDY1S CY1L RSDQ MDU CE1 MK, MK2 CXT 6 6 6 6 6 6 11 13 11 11 11 Note) qIn the case operation load is an inductive load. wIn the case the wiring length to load is > 5m. eIn the case the load voltage is 100 or 200V AC.

VZ3000

pitch 12.5) D side connector (Station n)(Station 1) (mm) 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 9 223 212.5 200 11.5 10 248 237.5 216 16 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 C4C C6C Separation lever (Push type) VV5Z3-45FU DStation B(2 to 10 stations) C4C C6C VV5Z3-45FUStation C4C C6C VV5Z3-45FBStation (11

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1-B 270 LE-CA-3-B 520 LE-CA-5-B 870 LE-CA-8-B 1370 LE-CA-A-B 1710 LE-CA-B-B 2560 LE-CA-C-B 3400 U V W Red White Black Connector A2 terminal no. B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Series KV2 Fittings

100/200 100/200 100/200 100/200 100/200 100/200 * Dimension A reference after installation. 11 Series KV2 Union Y KV2U_ _-_ _ Applicable Tube A Applicable Tube B P MB MA L2 L1 4.2 8 Q MC D1 Applicable Tube C D2 L3 D3 App.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

CDA2 B 50 200 X1184 B31J S With built-in special magnet Number of auto switches Cylinder stroke Description 2 pcs. 1 pc.

45

M3 Terminal screw A: Orange B: Green (Rail mounting hole pitch 12.5) Block separation lever (Push type) (Station n) (Station 1) (DIN rail dimension) (mm) 2 stations 3 4 5 6 7 8 9 10 stations Stations n L1 L2 L3 L4 148 148 160.5 173 185.5 198 210.5 210.5 223 137.5 137.5 150 162.5 175 187.5 200 200 212.5 112.5 123 133.5 144 154.5 165 175.5 186 196.5 SS5X3-45T1UStations B(18 pins) C4 C6 17.5

LEC-OM07605CN

(c) AERSBAN-_SET SD [:mm] (A B) 40 [mm] [mm] 2-5 17.5 30 B0.3 10 L A 35 C +0.3 6 -0.2 24 0 24 0 3 7 6 22 ()M4 3 5 11 . A B C L AERSBAN-DSET 100 86 30 2 A 70 AERSBAN-ESET 70 56 B1 B 45 11 22 11.

10

A 24 VDC 5 Size 2 B E A B 4 N.C. Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet 7 N.O. 110 VAC With surge voltage suppressor 200 VAC Size 3 C F A B 5 N.C.

0.

173 162.5 138 17.5 125 12 185.5 175 148.5 18.5 135.5 13 198 187.5 159 19.5 146 14 210.5 200 169.5 20.5 156.5 15 210.5 200 180 15.5 167 16 223 212.5 190.5 16.5 177.5 17 235.5 225 201 17.5 188 18 248 237.5 211.5 18.5 198.5 19 260.5 250 222 19.5 209 20 273 262.5 232.5 20.5 219.5 L1 L2 L3 L4 L5 85.5 75 43.5 21 30.5 11 Body Ported Series VQZ100/200/300 Dimensions: VQZ200 VV3QZ22C Stations Grommet

HRX-OM-X037

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

AS

Material Note Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 PBT PBT PBT Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Brass Brass Electroless nickel plated KE Electroless nickel plated Brass Electroless

CNG

A B CL 26 33 CL1 D-H7, D-H7W D-H7NF, D-H7BAL D-C73C, D-C80C MLGC HS HS Auto switch Auto switch 8.5 8.5 CNG 16 16 MNB A B A B 29 (36) 36.7 CNA ( ): denotes the values of D-H7LF .

Booster Regulator/Air Tank

VY1 Connected to VBA20A, 40A VBAT20A1 VBA VBAT VBA VBAT Material: Carbon steel Connected to VBA22A, 42A AP100 Tank IN port Rc 1/2 Booster regulator IN port Booster regulator IN port Tank OUT port Rc 1/2 C C Spare port Rc 1/2 EXH: C EXH: C (A) (B) (A) D (B) OUT OUT 305 180 206 206 4 x 13 4 x 13 50 50 200 100 100 400 Drain port Rc 1/4 200 674 (mm) D Note) 469 493 685 A 481 520 444 477 B 394

CATALOG VC10

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

Rotary Clamp Cylinders

19.5 (20) 23.5 (24) B 11 13.5 19 22.5 20 24 A 73.5 74.5 90 120 92 122 B 8 10.5 16 19.5 17 21 A 70.5 71.5 87 117 89 119 A 70 85.5 115.5 87.5 117.5 B 9 14.5 18 15.5 19.5 A 60.5 61 76 77 92.5 122.5 94.5 124.5 A 73 (73.5) 74 (74.5) 89.5 (90) 119.5 (120) 91.5 (92) 121.5 (122) B 9 11 13.5 16 21.5 25 22.5 26.5 A 56.5 57 72 73 88.5 118.5 90.5 120.5 B 5 7 9.5 12 17.5 21 18.5 22.5 A 63 63.5