CHKD/CHKG

mm stroke For 75 mm stroke For 100 mm stroke For 125 mm stroke For 150 mm stroke For 175 mm stroke 32 40 50 63 80 100 Dimensions CHKGB--XC63 Stroke Bore size (mm) 55, 60, 65, 70 80, 85, 90, 95 105, 110, 115, 120 130, 135, 140, 145 155, 160, 165, 170 Dimensions A B A B A B A B A B 32 141 131 166 156 191 181 216 206 40 150 140 175 165 200 190 225 215 250 240 50 156 145 181 170 206 195 231

CJ2X/CUX/CQSX/CQ2X/CM2X

-CM2X Microspeed Cylinder for Clean Room Series 10-, 11-CM2X How to Order Clean Series Mounting style 10 11 Relief type Vacuum type B L F G BZ Basic style Axial foot style Rod side flange style C(D)M2X L 40 10 150 F9BW Head side flange style Boss-cut basic style Boss-cut rod style Flange style RE A B Built-in magnet FZ REC Low speed cylinder Bore size 20 25 32 40 CX Number of auto switches

5 Port Solenoid Valve Series VQZ1000/2000/3000

4" 8, 5/16" 10, 3/8" 9.4 1/4 [4(A), 2(B) port] SJ 1/4 SY SV 1/4 [5(R1), 3(R2) port] D side U side L4 L3 SYJ 11 L5 PE port 3/8 [1(P) port] Manual override SZ Output no. (5.5) 5.5 + + 13 11 VP4 + + (8) 9 7 (DIN rail) S0700 150.3 [154.7] 50.4 (42) 136.8 [141.2] 36.9 42 1 P 5 R1 3 R2 1 P 3 R2 5 R1 B B B B B B B 21 21 73 (35) VQ 23 26 35.9 67.9 [70.1] A A A A A A A (5.5) VQ4 34.5 VQ5 12 10 8 6

Parallel Style Air Gripper Series MHZ

-MHZ2-25 MHZ2, 11-MHZ2 40 120 100 30 Overhang H (mm) Overhang H (mm) Overhang H (mm) H Pressure 0.2 MPa 0.5 MPa Pressure 0.2 MPa 80 0.6 MPa 0.5 MPa 0.7 MPa 20 60 0.3 MPa Gripping point 0.7 MPa 0.6 MPa 0.3 MPa 0.4 MPa L 0.4 MPa 40 10 20 MHZAJ2, MHZJ2 0 20 40 60 80 100 120 0 10 20 30 40 Gripping point L (mm) Gripping point L (mm) H MHZ2-10/11-MHZ2-10 MHZ2-32 60 150 50 Gripping point Pressure

mb1

Bore size (mm) A B A + B + 90 32, 40 50, 63 80, 100 25 40 30 45 60 160 190 175 55 6-7-10 11 Series MB1 Square Tube Type Air Cylinder: Standard Type Double Acting, Single Rod Accessory Bracket Dimensions Rod end nut (Standard equipment) Knuckle joint pin Clevis pin 30 Dd9 d 2-d D C L l m H B d Bore size (mm) Clevis Knuckle Part no. Bore size (mm) Part no.

70astamb1

Bore size (mm) A B A + B + 90 32, 40 50, 63 80, 100 25 40 30 45 60 160 190 175 55 6-7-10 11 Series MB1 Square Tube Type Air Cylinder: Standard Type Double Acting, Single Rod Accessory Bracket Dimensions Rod end nut (Standard equipment) Knuckle joint pin Clevis pin 30 Dd9 d 2-d D C L l m H B d Bore size (mm) Clevis Knuckle Part no. Bore size (mm) Part no.

Compact Cylinder Series CQS

32 32 41 44 F 7.5 7.5 9 11 L A B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 200 35 to 200 75 to 200 75 to 300 6 8 7 12 6 8 10 12 25 29 36 40 M4 x 0.7 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 20.5 M3 x 0.5 32 38 47 52 5 6 8 10 15.5 20 3.5 3.5 5.4 5.4 45.5 13.5 25.5 34 M4 x 0.7 20.5

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

MHZ

Gripping point L (mm) Gripping point L (mm) DMHZ2-40 MHZ2-16/11-MHZ2-16 200 2060 50 150 Overhang H (mm) Overhang H (mm) Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa 40 0.3 MPa 0.3 MPa 100 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.3 MPa 30 0.4 MPa 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.6 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 20 0.7 MPa 50 10 0 50 100 150 200 0 10

MHZ

Gripping point L (mm) Gripping point L (mm) DMHZ2-40 MHZ2-16/11-MHZ2-16 200 2060 50 150 Overhang H (mm) Overhang H (mm) Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa 40 0.3 MPa 0.3 MPa 100 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.3 MPa 30 0.4 MPa 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.6 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 20 0.7 MPa 50 10 0 50 100 150 200 0 10

LEY-OM007

1630 ( 1 ) * 1 2 () 1 2 LEY25200 LEY32100 LEY16100 LEY25200 LEY32200 LEY32 30 150 200 250 300 150 200 250 300 30 50 100 350 400 450 500 50 100 350 400 450 500 LEY25 LEY16 LEY32 LEY32 LEY25 LEY16 / P.38 6.3 <> NPNPNP LEY16B-100 NPN -11- 2.3. 28 28 29 30 29 30 / 14 14 15 15 25 26 27 25 26 27 11 11 12 12 19 19 21 21 18 18 16 16 22 22 24 24 17 17 12 13 12 13 23 23 1 2 3 4

Slide Unit Series CX2/CXWM/CXWL

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

Slide Unit Series CX2/CXWM/CXWL

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Step Motor Driver （ Pulse input type ）

Vcc B-4 Brown 12 C 20m *1) GND A-4 Black 13 A B-5 Red 7 *1) produced upon receipt of order A A-5 Black 6 B B-6 Orange 9 Only Robotic type cable can B A-6 Black 8 be selected. 3 signal Terminal no. Lock B-1 Red 4 Lock A-1 Black 5 Sensor B-3 Brown 1 Sensor A-3 Blue 2 Electric Actuator side Driver side 11 - (5) I/O Cable Pin No.

Refrigerated Air Dryers

Singleturn IDF-TR4000-7 440, 460 V (50 Hz) 440 to 460, 460 to 500 V (60 Hz) 200 V (50 Hz) 200, 220 V (60 Hz) 355 299 320 42 kg A 4 x 11 220 [mm] IDF-TR 8 C E G Specifications/Dimensions B Part no.

REC

range 1 8 30 20 M20 X 1.5 146 8 10 32 32 52 192 202 150 to 700 20 1 8 34.5 M26 X 1.5 25 146 9 10 40 40 60 196 206 150 to 700 20 1 8 42.5 M26 X 1.5 32 159 9 10 40 40 60 209 219 150 to 1000 22 1 4 51 M32 X 2 40 181 10 11 53 53 77 236.5 247 200 to 1000 26.5 4.9-13 Series REC Construction !

48

200 200 900 mm stroke 100 100 1000 mm stroke 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 300 300 250 250 500 mm stroke or less Overhang: L3 [mm] Overhang: L3 [mm] 200 200 m L3 600 mm stroke or less 150 150 100 100 600 mm stroke 50 50 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 300 300 250 250 Overhang: L4 [mm] Overhang: L4 [

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Double Double Double Double Double Double Double Single Single Single Single Single Single Single Single Single Single SI unit SI unit A B A B A B A B A B A B A B A B A B A B A A A A B A A B A 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 0 1 2 3 7 8 4 5 9 11 6 10 11 Mixed wiring is available as an option. Use the manifold specification sheet to specify this.