Compact Cylinder Series CQS

Model Cushion Auto switch mounting Bore size (mm) 12 16 20 25 12 16 20 25 Standard stroke (mm) Port size Lubrication Action Model Rubber Air 10-CQSXB12 10-CQSXB16 10-CQSXB20 10-CQSXB25 11-CQSXB12 11-CQSXB16 11-CQSXB20 11-CQSXB25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Non-lube Double acting single rod M5 x 0.8 5, 10, 15, 20, 25, 30 5, 10

MHZ

Axial Ported (with M5 port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) End boss assembly E D1 B D2 Model A 0.016 0.043 MHZJ2-10S CM 40 12f8 11 15 7 D2 0.016 0.043 MHZJ2-16S CM 43.5 16f8 15 20 10 0.020 0.053 MHZJ2-20S CM 51.7 20f8 19 22 12 D1 0.020 0.053 MHZJ2-25S CM 61.3 25f8 24 25 15 Other dimensions and specifications correspond to the standard type. 5 B E A Auto switch

MHZ

Axial Ported (with M5 port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) End boss assembly E D1 B D2 Model A 0.016 0.043 MHZJ2-10S CM 40 12f8 11 15 7 D2 0.016 0.043 MHZJ2-16S CM 43.5 16f8 15 20 10 0.020 0.053 MHZJ2-20S CM 51.7 20f8 19 22 12 D1 0.020 0.053 MHZJ2-25S CM 61.3 25f8 24 25 15 Other dimensions and specifications correspond to the standard type. 5 B E A Auto switch

Series VQ Base Mounted Metal Seal/Rubber Seal

VFR Terminal No. 20 18 16 14 12 10 8 6 19 17 15 13 11 9 7 5 SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B { 1 station VP7 Irrespective of the valves or options, the internal wiring is made double (connected to SOL. A and SOL. B) for respective stations of the manifold.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

0 0.3 B 0 0.3 Drawing of view (E) (mm) Bore size 16 10 15 15 B GA FX FT F A 18.3 15 C 20 17 5 4 8 8 5.5 5.5 2.3 2.3 33 33 20 20 5 5 FB FY D FC FZ 12-0.027 10-0.022 H NA NDh8 Z S NN 11 11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 M4 x 0.7 28 28 122 121 20.5 20.5 0 M5 x 0.8 11 B CJ2RA-Z Series 10-/1121-/22Stroke Length Tolerance 10, 16 How to Order Clean series 10 11 Relief type Vacuum

Air Slide Table Series MXQ

M 15 25.5 MXQ-CS 6 (L)-X11 5 18 MXQ-CS 8 (L) B MXU 8 7 22 3 9 7.5 16.6 14.6 8 9.8 MXQ 8 (L) M6 x 1 15 M3 x 8 M3 x 10 28 MXQ-CS 8 (L)-X11 F 25 38 MXQ-CS 8 (L)-X12 MXS 5 22 MXQ-CS12 (L) G E MXQ12 (L) M8 x 1 M4 x 12 M4 x 12 12 9.5 29 4 14 11 20.5 18.5 11 13 15 32 MXQ-CS12 (L)-X11 C MXQ 25 MXQ-CS12 (L)-X12 42 5 23 MXQ-CS16 (L) Table mounting section MXF M10 x 1 MXQ16 (L) 14 11 36 5 17 M5 x 16

10

A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

F

17 14 31.5 15.5 13 15.5 3.4/2.9 5/32 1/4 KQE03-35 1/2-20 17.46 17.46 31.5 15 14 16 3 4 18 KQE04-01 M12x1 14 14 27.5 11 13 16 5.6 3/16 1/8 KQE05-34 9/16-18 17.46 17.46 28.5 13 15 16.5 3.5 4 14 KQE04-02 M12x1 17 14 31 15 13 16 5.6 1/4 1/4 KEQ07-35 9/16-18 17.46 17.46 30.5 14.5 15 17 4.6 6 18 KEQ06-01 M14x1 17 17 28 11 15 17 13.1 5/16 3/8 KQE09-36 3/4-16 22.23 22.23 35.5 15 20 18.5 6 6 14 KQE06

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

SYJ300/500/700

M3 x 0.5 (P, R port) 15 (Bracket) 11 10 P R 22.1 6.7 1.2 (PE port) 7 9.2 L plug connector (L): SYJ32-L-M3 M plug connector (M): SYJ32-M-M3 M8 connector (WO): SYJ32-WO-M3 58.5 [60.7] (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) (2) 48.7 [50.9] 57.6 (2) 50.2 43.7 13.5 13.5 13.5 15 15 15 22.1 22.1 22.1 Refer to page 4-4-61 for dimensions

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 0.5 45.5 1.5 50 Z ZZ H G (NN 1) x H 11.5 29 11.5 29 B A 5.1 9.5 11 11 5H9 depth 5 +0.030 0 30 NN x M6 x 1 thread depth 12 A B 6 HA GA Section AA Section BB 5H9 depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 N 4 4 4 4 6 6 6 8 8 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 GA

Air Slide Table

Retraction stroke end Applicable size Model Stroke adjustment range (mm) A B C F G H J K 1) E 5 16.5 MXQR-AT 6 MXQR 6 17.5 19 8.5 7 2.5 6 M5 x 0.8 M2.5 x 9 15 26.5 MXQR-AT 6-X11 5 19.5 MXQR-AT 8 MXQR 8 M6 x 1 M3 x 11 21 22 11 15 29.5 8 3 7 MXQR-AT 8-X11 H E 25 39.5 MXQR-AT 8-X12 5 23.5 MXQR-AT12 G MXQR12 28 29 14 15 33.5 12 M8 x 1 M4 x 14 4 10 MXQR-AT12-X11 B 25 43.5 MXQR-AT12-X12 J 5 24.5

42

2 B 2 B 2 B 2 B 8 A A A A A A A A B B B B B B B B VQC 4/5 7 SMC SMC SMC SMC SMC SMC SMC VQZ 6 SQ 5 VFS L1 L2 4 VFR 3 VQ7 2 44 P = 25 1 50.5 X Stations 12 Electrical entry on D side (LD) 47.7 80.8 D side 11.7 43.2 49.7 163 58.2 96.2 Dimensions Formula: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 88 113 138 163 188 213 238 263

Applicable Auto Switch Model

80 13 40 11 15 16 8.5 20 9.5 9 10 8.5 25 9.5 9 10 32 11 11 Note) qIn the case operation load is an inductive load.

C95

54 10 24 22 28 35 36 11 6.6 50 9 11 12 15 12 50 65 12 33 30 32 45 45 12 63 11 12 15 16 52 67 14 37 35 40 50 50 15 9 80 11 12.5 14 18 16 66 86 18 47 40 50 60 63 15 100 18 20 13.5 50 60 70 71 15 19 11 76 96 20 55 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5

Compact Rotary Actuator Series CRQ2

Rotation starting point End of rotation R e 10 g ot 10 n at ra L io n B Rotation starting point End of rotation n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 A A R e o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Size 10 15 20 30 40 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 The figure shows the view from

REA/REB

-X 20Stop Data 10-2-11 11 Series REA Dimensions REA25/32/40 Effective thread depth J L 0 0.1 B NN G 4-MM H G 2-port size X D I NB NB T N K W N S + Stroke F NA F R ZZ + Stroke (mm) B D F G H I K L MM x J N NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16

REA/REB

Packaged with Each Cylinder d C H B C d Part no. SN-032B SN-040B Applicable bore size (mm) 25, 32 40 M26 x 1.5 8 32 37 H B M32 x 2.0 11 41 47.3 10-2-12 12 Sine Rodless Cylinder Direct Mount Type Series REAR 10, 15, 20, 25, 32, 40 How to Order RE A B REA R 25 300 Y7BW REC CX Number of auto switches CY Nil 2 pcs. S 1 pc.

VS 8-2/VS 8-4

Insulation resistance M/km, 20C 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 5 or more Note) The minimum bending radius of the D-sub connector cables is 20 mm.

C95

10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14 18 16 66 86 18 47 40 50 60 63 15 11 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45