1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Compact Cylinder

Without Magnet for Auto Switch AS121F-M3-04 V V AS121F-M5E-04A V V V AS121F-M5E-06A V V V Elbow type Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 10 or more 5 10 or more 5 or more Male connector (with hexagon socket head) AS131F-M3-04 V V AS131F-M5E-04A V V V AS131F-M5E-06A V V V Universal type KQ2S04-M3G V V KQ2S04-M5m V V V V V KQ2S06

PA300/500/700

, 3/8 30.7 26.1 3.5 7 (Bottom existing hole) M5 x 0.8 through hole 1(P) 3(R) 77.2 A B Body ported: VPA542V26.1 31 3.5 NO NC 2(A) 32 26 Switch mark 24.2 41.5 (Mounting hole) 24.2 Bracket (Mounting groove for M5 thread) 2-R 2.7 (PA port) Rc 1/8 PA 45.9 40.5 45 45 28 4.5 1.6 41.6 22 60 50 9 90.9 (Piping port) Rc 1/4, 3/8 30.7 26.1 3.5 7 1(P) 3(R) (Bottom existing hole) M5 x 0.8 through hole

SZ3000

Model A L D KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A A A B B 5 Series SZ3000 DIN rail dimension table/weight table D-sub connector (25 pins)/cable assembly VZ1000-11-11 VVZS3000-21A~ 3 Refer to the L dimension table Enter a number from the DIN rail dimension table below in the .

Series IDG

Inlet air pressure [MPa] Inlet air temperature [C] Allowable pressure drop P [MPa] Compressed air supply capacity Q [l/min (ANR)] Note: F = (C x 1.8) + 32 1MPa = 145psi 1l/min = 0.0353SCFM Dew point temperature conversion chart 60 0.5MPa 0.7MPa 0.9MPa 50 0.3MPa 40 Atmospheric pressure 0.1MPa Pressurized dew point temperature C 30 20 10 0 10 20 30 40 50 60 50 60 20 10 0 10 20 30 40 30 Atmospheric

3 Port Air Operated Valve

) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 1561 VPA300/500/700 Series VPA700 Series/Body Ported/Dimensions Standard/VPA742-1(-F) 03 04 A B 3/8, 1/2 2(A) port

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S

IDG

0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14-19-10 7 Membrane Air Dryer Series IDG Calculation of inlet air flow rate Q1, and confirmation of compressed air supply capacity.

Compact 5-Port Solenoid Valve

Block Connector Connecting Base For the JJ5SY1-10, JJ5SY3-10, JJ5SY5-10 No.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

Auto Switch Guide

D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 10-20-27 Grommet 10-20-28 Connector 10-20-29 Band 10-20-30 Terminal conduit 10-20-31 10-20-32 Grommet 10-20-33 Rail 10-20-34 Connector 10-20-35 Grommet Tie-rod 10-20-36 Terminal conduit 10-20-37 10-20-40 10-20-38 10-20-41 Grommet

Speed Controller with

-X214 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Restrictor (Without check valve) 04 4 06 6 08 8 10 10 12 12 With One-touch fittings Example) AS2002FG-06A-X214 Stainless steel type (Stainless steel 303) 10Clean Series Example) 10-AS2002FG-06A The material can be visually identified by color of the release button.

Auto Switch Guide

BJ2 -010 BJ2 -016 BA-06 BA-08 BA-10 BA -01 BA -02 BA -32 BA -04 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -05 BA -06 BA -08 BA -10 BA01 BA02 BA32 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.

Applicable Auto Switch Model

(RedGreenRed) CDJ2, CDVJ3, 5 10, 16 CDQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 CDlXW Plate mounted(P), 10, 16, 20, 25, 32, Housing mounted(B), 16, 20, 25, 32 CDY1S, CY1L 6, 10, 15, 20, 25, 32, 40 RSDQ 20, 25, 32, 40, 50 MDU 25, 32, 40, 50, 63 CE1 12, 20, 32, 40, 50, 63 MK, MK2 20, 25, 32, 40, 50, 63 CXT 32, 40 Specifications PLC: Programmable Logic Controller D-F7lW/D-J79W

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Auto switch type D-A3, A4 D-G3, K3 D-B5, B6 D-G5, K5 D-A5, A6 D-F5, J5 Cylinder bore size (mm) Bore size (mm) Standard stroke (mm) Long stroke (mm) Model 1800 (1401 or more with tie-rod reinforcing ring) Note 2) 32 25 to 800 32 40 50 63 80 100 32 40 50 63 80 100 32 40 50 63 80 100 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 BAF-32 BAF-04 BAF-05 BAF-06 BAF-08 BAF-10 BGS1-032 BH2-040 BH2-050 BA-06

HRX-OM-Q026

: 32 oC 25 Cooling capacity [kW] 20 Facility water temperature: 40 oC 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-14: Cooling Capacity (HRSH200-W-20/40-) 8.4.9 HRSH250-W-20/4035 Facility water temperature: 32 oC 30 25 Cooling capacity [kW] Facility water temperature: 40 oC 20 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-15: Cooling Capacity

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32