Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + G, Semi-Standard 1: 0.02 to 0.2MPa Setting, Semi-Standard 2: NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + G, Semi-Standard 1: Metal Bowl, Semi-Standard 2: R + Z, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + G, Semi-Standard 1: Metal Bowl, Semi-Standard 2: NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + G, Semi-Standard 1: Nylon Bowl, Semi-Standard 2: Flow Direction: Right to Left, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + G, Semi-Standard 1: Nylon Bowl, Semi-Standard 2: R + Z, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + G, Semi-Standard 1: Non-Relieving Exhaust Mechanism, Semi-Standard 2: Standard, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + G, Semi-Standard 1: Non-Relieving Exhaust Mechanism, Semi-Standard 2: NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + G, Semi-Standard 1: Standard, Semi-Standard 2: R + Z, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + C, Semi-Standard 1: Metal Bowl, Semi-Standard 2: Flow Direction: Right to Left, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + C, Semi-Standard 1: 1 + 6, Semi-Standard 2: NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + C + G, Semi-Standard 1: 1 + 6, Semi-Standard 2: NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + C, Semi-Standard 1: Nylon Bowl, Semi-Standard 2: NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + C + G, Semi-Standard 1: Nylon Bowl, Semi-Standard 2: NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + G, Semi-Standard 1: 1 + N, Semi-Standard 2: Standard, Made to Order: -
Body Size: 10, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: M5, Option: B + C, Semi-Standard 1: 0.02 to 0.2MPa Setting, Semi-Standard 2: Standard, Made to Order: -
High Vacuum L Type Valve A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257
Tightening torque Tightening torque Model Screw (Nm) A M6 4.8 B M5 2.8 MHT2-32DZ C M8 12 A M6 4.8 B M6 4.8 MHT2-40DZ C M8 12 A M8 12 B M8 12 MHT2-50DZ C M10 24 A M10 24 B M10 24 MHT2-63DZ C M10 24 13 - 3-4. Construction / Parts list Components No.
: JIS B 8361: JIS B 9960-1: -(1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / 1 1.5 () 3 - 1. (610)1 1 M6234 (M410) 4 1 1 4(TU0425) 2m (KQ2L01-99A1) 1 4 - 2.
8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / 1 1.5 () 3 - (610) 1 (M623) 4 1 1 1 (M410) 4 MOTOMAN-HC10DT 1 MOTOMAN-HC10 1 JMHZ2-16D-X7400B-HC10DT-(*) JMHZ2-16D-X7400B-HC10-(*) (M6x12) 4 (610)1 (M48) 2 2 (M46) 2 2 4 M8-Molex 1 (TU0425BU-100) 2m 4 - 2.
Auto switches / Proper mounting position for stroke end detection A B Proper mounting position (mm) Bore size A B 40 63 100 32.5 0 16 0 27.5 0 Note) The above mentioned values are indicated as a guide for auto switch mounting position for stroke end detection.