ZX

PS PV PD EXH PS PV 1(PV)(PS PD) M-3P PD Plug PE P3200152-12 (M2.5 x 28) PS Manifold base PV Philips screw Plug M-5P Table (1) Single unit In the case of manifold Quantity 2 1 1 1 1 Part no.

10-my1b-z-e

MY1B25 MY1B32 MY40-16AStroke MY1B40 Qty. 1 Seal belt 14 MY32-16CStroke MY25-16CStroke Urethane Polyamide Dust seal band 15 MY1B25-16BStroke MY1B32-16BStroke MY1B40-16BStroke Stainless steel 1 KA00311 KA00320 KA00320 O-ring 28 NBR 2 (7.15 x 3.75 x 1.7) (7.15 x 3.75 x 1.7) (5.1 x 3 x 1.05) 14, 15, 28, 33 and 37 are not included in the seal kit.

10-my1w-e

No. 16 20 25 32 40 50 63 Seal belt 12 MY16-16AStroke MY20-16AStroke MY25-16AStroke MY32-16AStroke MY40-16AStroke MY50-16AStroke MY63-16AStroke 1 Dust seal band Note) 13 MY16-16BStroke MY20-16BStroke MY25-16BStroke MY32-16BStroke MY40-16BStroke MY50-16BStroke MY63-16BStroke 1 KA00309 KA00311 KA00311 KA00320 KA00402 KA00777 KA00777 O-ring 18 2 (4 x 1.8 x 1.1) (5.1 x 3 x 1.05) (5.1 x 3 x 1.05

Mechanically Jointed Rodless Cylinder/Basic Type Series MY1B-Z

MY1B25 MY1B32 MY40-16AStroke MY1B40 Qty. 1 Seal belt 14 MY32-16CStroke MY25-16CStroke Urethane Polyamide Dust seal band 15 MY1B25-16BStroke MY1B32-16BStroke MY1B40-16BStroke Stainless steel 1 KA00311 KA00320 KA00320 O-ring 28 NBR 2 (7.15 x 3.75 x 1.7) (7.15 x 3.75 x 1.7) (5.1 x 3 x 1.05) 14, 15, 28, 33 and 37 are not included in the seal kit.

Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

Modular Type Filter Regulator Series AW

Modular Type Filter Regulator Series AW Filter regulator Series AW Filtration Accessory Model Port size AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 Pages 56 through 60 Filter regulator with back flow mechanism Series AWK 5m AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket Square embedded type pressure gauge (except for AR10) AW40K-06 3/4 Pages 63 through

air-filter-e

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

Air Preparation Equipment

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

Serial Transmission System Series EX250 Series EX500

(SD0) Without input block With 1 input block 0 1 Ports 2, 4 size (inch) Ports 2, 4 Symbol N7 N9 N11 NM Ports 1, 3, 5 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting Mixed 8 With 8 input blocks 1: 1/2 3, 5: 3/4 Note) When an AS-i compatible S kit is used, there is a limit on the maximum number of stations.

Soft Start-up Valve

1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/4 128 59 53 74 53 Width across flats 36 52 AV5000-m06, 10-

PSE200

CAT.ES100-41 A Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE

Process Valve

2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

PSE530/200

for 1 second or longer.

CJ2X/CUX/CQSX/CQ2X/CM2X

Contents J (1) Head side flange style (1) 20 25 Clevis integrated style CM2X20-PS D1 pc. Rod seal: CM2X25-PS 32 40 (1) Single clevis style CM2X32-PS (1) Double clevis style (3) Grease pack (10 g): 1 pc. -X CM2X40-PS (1) (2) Rod side trunnion style 2. Grease pack When maintenance requires only grease, use the following part numbers to order.

CJ2X/CUX/CQSX/CQ2X/CM2X

Contents J (1) Head side flange style (1) 20 25 Clevis integrated style CM2X20-PS D1 pc. Rod seal: CM2X25-PS 32 40 (1) Single clevis style CM2X32-PS (1) Double clevis style (3) Grease pack (10 g): 1 pc. -X CM2X40-PS (1) (2) Rod side trunnion style 2. Grease pack When maintenance requires only grease, use the following part numbers to order.

Title not found

3/8 5 AF4000 1/4, 3/8, 1/2 Float style auto drain AF4000-06 3/4 Pressure differential auto-drain 3/4, 1 AF5000 AF6000 1 Mist Separator Series AFM AFM2000 1/8, 1/4 Bracket AFM3000 1/4, 3/8 0.3 Float style auto drain AFM4000 1/4, 3/8, 1/2 Pressure differential auto-drain AFM4000-06 3/4 Micro Mist Separator Series AFD AFD2000 1/8, 1/4 Bracket AFD3000 1/4, 3/8 0.01 Float style auto drain AFD4000

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Symbol -X80, -X81 Main Value Double Acting Type 1 A N 06 5 1 4 VP31 1 D Z X81 Body size CE marking Nil Q None CE-compliant 4 6 8 1/2 1 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 2 Port size (IN, OUT port) Thread type Symbol VP3145 VP3165 VP3185 Port size Nil F N T D/DO/DZ/DU only Rc G NPT NPTF 03 04 06 10 12 14 20 Type of actuation X80 X81 Double solenoid Single solenoid External pilot Passage, Type

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without

Low Differential Pressure Sensor

CAT.ES100-49 A Low Differential Pressure Sensor Rated differential pressure range: 0 to 2 kPa 0 to 2 0 to 2 kPa kPa 0 to 2 0 to 2 kPa kPa Accuracy: 1% F.S. 1% % F.S. F.S. 1% % F.S. F.S.