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02 R1/4(M5) 28 (4~20mA) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 Rc1/4 ZS-31-X175 1 -8No.PS-OMT0005CN-A M12 C3604+AI203(96)FKM (Nm) R1/4 812 -9No.PS-OMT0005CN-A PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMT0005CN-A DC(+) PSE57-02 15V 1 k N.C.

No.PS-OMG0001CN-H // PSE300 2 8 9 10 10 12 14 16 19 21 23 24 31 31 33 -1No.PS-OMG0001CN-H *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Measurement diagnostics 0: Within range 1: Out of range (HHH) 14 Fixed output 0: Normal output 1: Fixed output (Setting of output check) 15 Error Diagnosis 0: Error not generated 1: Error generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

Initialize mode Function selection Key-lock function mode (Refer to page 20) (Refer to page 31) (Refer to page 26) Items below can be set.

1 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 () DC1224 V10 30 mA IP65 050 () 3585R.H.() 4 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23/4 3/41 11/411/2 -28No.PF-OMN0009CN-F PF3W504 PF3W520 PF3W540 PF3W511 PF3W521 195 g 245 g 395 g 705 g 875 g 270 g 320 g 515 g 840 g 1060 g 295 g 345 g 595 g + 370 g 415 g 715 g +85 g 1323mPas(3 cP) 31

SoG/SoR/REd/GRN(31 ) 5. [F 1] OUT1 -26No.PF-OMN0011CN-C 1. [F 1] [oUt1] 2. ON-OFF -27No.PF-OMN0011CN-C 3. a. ([n_1]) (31 ) b. ([n1L]) [P1H] or [n1H] ([n1H]) (31 ) -28No.PF-OMN0011CN-C c. / -29No.PF-OMN0011CN-C ( [n1AH]) ( [n1dH]) 3 1 3 6 6 1 6 3 1 1 -30No.PF-OMN0011CN-C 4. OUT1 ON : ON : : : OFF : OFF : 5.

[F 2] OUT2 38 No.LFE*-OMY0008 c. / Add/dEC OUT1 (31 ) ( [n2AH]) ( [n2dH]) c.(32 ) 4. 4. 4. 4.

When accumulated output mode is selected" on (page 31) Press the button to set. Return to function selection mode. [F 2] Setting of OUT2 complete. Output mode d. When Accumulated pulse output mode is selected There is no item to set. -39No.LFE*-OMZ0011 [F 3] Response Time The response time of the switch output can be set.

Terminal Terminal resistance resistance 2 2 2 7 5 7 5 7 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Master This product This product This product (first slave) (second slave) (31 slaves) st Do not connect any wire to other PIN numbers.

Terminal Terminal resistance resistance 2 2 2 7 5 7 5 7 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Controller This product This product This product (Second) (31 device) st (First) Do not connect any wire to other PIN numbers.

The actuator not described for pulley ratio is calculated by 1/1. 31 - 5.3.6 Control mode selection To use position control mode (pulse input), navigate to the "Basic" tab of the "Parameter Setting" screen "Control mode selection" Please select "Position control mode". (PA01 parameter in the "Basic" tab of the List display also changes to "000".)

Adapter with throttle Rc1/4 ZS-31-X175 1 pc. -8No.PS-OMT0006-C Names of Parts of Product and Handling Precautions Names of parts of product Only fluids which are non-corrosive to C3604 + electroless nickel plated, AI203 (aluminum oxide) and FKM should be used. Handling precautions When piping, apply a spanner to the piping section of the sensor.

13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 Revision history G: Revise Safety Instructions.

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Construction P.31 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Wiring method and examples of auto switches 31 - 4. Maintenance 4-1. Consumable parts Fig. 14 Replaceable seals 4-1-1. Seal kit Bore size (mm) Order No.

moment of inertia 24 Kinetic energy / Rotation time 24 Allowable kinetic energy and adjustable range of rotation time 24 Moment of inertia 25 Model selection 26 Setting 26 Allowable Load 26 Table rotation range 27 Calculation example of load condition 28 Using body as flange 29 Piping 30 External stopper 30 Mounting position of external stopper 30 Precautions for using external stopper 31