Electric Actuator Triple Axis P&P Unit

Motor Mounting Applicable motors Mitsubisi Electric Corporation Length(mm) Weight(kg) Yaskawa Electric Corporation Length(mm) Weight(kg) OMRON Corporation Length(mm) Weight(kg) 1.1 1.1 HC-PQ23 89 0.96 SGME-02F12 96.5 1.1 R88M-W20030 96.5 HC-MF23 99.5 0.99 SGM-02312 96.5 1.1 R88M-U20030A 96.5 HC-MFS23 99.5 0.99 SGMAH-02AA21 96.5 1.1 HC-KFS23 99.5 0.99 HC-KQ23 89 0.96 1.6 1.6 HC-PQ23B 121 1.6

Air Slide Table Series MXQ

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377

MXS Series Air Slide Table

50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA M 83 83 83 93 108 147 200 254 306 NA 2 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41 51 61 71 96 121

MXW Series Long Stroke Slide Table

thread depth 6 (Helisert) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth 4.5 5H9 +0.03 Bottom through hole 3.3 0 5H9 +0.03depth 4.5 0 F E G F E Model HH H GG J Z N L K NN 64 106 71 MXW875 30 19 92 228 5 45 31 1 98 112 106 MXW8100 32 34 115 278 5 70 56 1 121

Low Profile Slide Table MXF Series

MXF Series Product Features .page 120 MXF Series How to Order .page 121 Specifications .page 122 Table Deflection .pages 123-124 Construction/ Parts List, Seal Kits .page 125 Dimensional Drawings.pages 126-129 Auto Switch Specifications and Mounting .page 130 Please see safety instructions on page 18. 119 MXF Series 8, 12, 16, 20 Low Profile Slide Table 120 Low Profile Slide Table MXF

CV/MVGQ

58.5 56 69.5 59 56 112 63 57.5 62 57.5 104 121 112 Operating Range C J G5-S CV Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Blue F-2815-101-B80-NORYL F-2815-101-B85-NORYL .011 Black / Orange F-2815-111-B80-NORYL F-2815-111-B85-NORYL .012 Green F-2815-121-B80-NORYL F-2815-121-B85-NORYL .013 Black / Yellow

Compact Guide Cylinder

161 201 241 281 IN 302 60 90 121 151 181 211 25 (20 x 2) 10 OUT 628 126 188 251 314 377 440 IN 471 94 141 188 236 283 330 32 (25 x 2) 12 OUT 982 196 295 393 491 589 687 IN 756 151 227 302 378 453 529 40 (32 x 2) 16 OUT 1608 322 483 643 804 965 1126 IN 1206 241 362 483 603 724 844 50 (40 x 2) 18 OUT 2513 503 754 1005 1257 1508 1759 IN 2004 401 601 802 1002 1203 1403 63 (45 x 2) 20 OUT 3181

Basic Type/Direct Mount Type

44 55 67 85 97 CB 2 2 2 3 3 3 5 5 5 CR 0.5 0.5 0.5 1 1 1.5 2 2 3 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 WS 6 8 7 7 7 7 7 10 10 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121

Pin Clamp Cylinders

181 241 302 362 422 13.5 to 20.0 121 181 241 302 362 422 483 543 603 Note 1) It takes approximately 0.3 seconds for the cylinder to operate to generate clamping force from an unclamping state (when no speed controller is installed).

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

112 121 19 Series CLA2 Minimum Stroke for Auto Switch Mounting n: Number of auto switches [mm] Auto switch model Number of auto switches Brackets other than center trunnion Center trunnion 40 50 63 80 100 2 (Different surfaces, same surface), 1 15 80 95 110 115 D-M9l D-M9lW D-M9lA n (n = 2, 4, 6, 8) Note 1) 15 + 40 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n 4) 2 (n

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121

CNA

31 4 2 8.5 69 0 0.5 11.5 1.5 38 73 69 38.5 0 0 80.5 3.5 35 43.5 50 50 9.5 86.5 2 10.5 0 78 35 4 2 8.5 77 0 0.5 11.5 1.5 43.5 78.5 77 42.5 0 0 86 3.5 42 49 63 63 13 93.5 4.5 13 2 85 42 6.5 5.5 12 91 1.5 3 14 5 50.5 85.5 91 48 2.5 3.5 93 6 50 55.5 80 80 15.5 102 8 16.5 4.5 93.5 50 10 8 14.5 107 4 6.5 17.5 7.5 59 94 107 54 6 6 101.5 9.5 57.5 63 100 100 18 112 9.5 18 7 104 57.5 11.5 10.5 17 121

CP95

D EE PL RT I12 KK SW G BG (MIN) L8 E R VD VA WA WB WH ZZ ZY I2 I9 M10 x 1.25 32 22 30 12 G 1/8 13 M6 x 1 6 10 27 16 94 4 4 4 6.5 26 146 190 46 32.5 15 4 M12 x 1.25 40 24 35 16 G 1/4 14 M6 x 1 6.5 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121

Aluminum High Vacuum Angle Valve

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

XM, XY

92.1 10.5 9 9 486 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Dimensions XYC-25, 40/In-line type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121

C95

) B e11 E R BG (MIN) AM D EE PL RT L12 KK SW G L8 VD VA WA WB WH ZZ ZY L2 L9 22 24 32 32 40 40 30 35 40 45 45 55 12 16 20 20 25 30 G 1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121

CP95

20ZY + Stroke Data Bore size (mm) AM KK L8 SW B D G EE BG (MIN) PL RT I12 E R VD VA I9 WA WB WH ZZ ZY I2 M10 x 1.25 32 6 16 94 22 30 10 27 12 G 1/8 13 M6 x 1 4 15 4 4 4 6.5 26 146 190 46 32.5 M12 x 1.25 40 6.5 16 105 24 13 35 16 27 G 1/4 14 M6 x 1 4 17 4 4 4 9 30 163 213 52 38 M16 x 1.5 50 8 16 106 32 16 40 20 31.5 G 1/4 15.5 M8 x 1.25 6 24 5 4 5 10.5 37 179 244 65 46.5 M16 x 1.5 63 8 16 121

MU

side flange style RQ MU D-X 20Data Spring return ZZ + Stroke Spring extend ZZ + 2 x Stroke (mm) ZZ 104 111 124 149 155 FZ 24 28 32 39 50 FY 66 82 102 126 148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Single clevis style Double clevis style Single clevis style Double clevis style (mm) ZZ 121

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

25 36 x 32 32 45 x 40 40 55 x 50 50 68 x 63 63 87 x 80 80 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 145 218 290 363 436 508 581 653 726 MGZ20 10 Foot MGZ-L05 MGZ-L06 MGZ-L08 47 71 94 118 141 165 189 212 236 Flange MGZ-F05 MGZ-F06 MGZ-F08 217 326 434 543 651 760 868 977 1085 MGZ25 12 76 113 151 189 227 265 302 340 378 324 486 648 811 973 1135 1297 1459 1621 MGZ32 16 Switch spacer 121