Clean Air Module SFD-EL050) t Check that two connecting brackets B are attached to the filter body, and assemble the filter body to the groove of the block. GD y Mount the connecting bracket A on the assembled filter body, and tighten the hexagon socket head cap screw with the following torque.
When r the center shaft lowers, t the bearing holder plate is pressed, and the table is locked.
The pressure in the pilot chamber r increases and operates on the upper surface of the diaphragm t. As a result, the air supply valve y linked to the diaphragm t opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u.
Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.
unit only) 2 x 3.4 Mounting hole Connection valve 24 VDC 4 W or less 3.5 6.4 Max. load current 80 mA 4 3 2 1 Max. applied voltage 30 VDC OUT Note) 2 x 6.4 Residual voltage 1 V or less (At load current 80 mA) ESD MONITOR 12 35.5 Short circuit protection With short circuit protection 34.5 30 SMC 44 56 No-voltage input, Low level input 10 ms or more, Low level 0.4 V or less Trigger input 1 T
T VMG Applicable tubing Connection thread (With seal) Male Elbow: KXL (High speed) H (width across flats) Applicable tubing O.D.
The voltage drop will occur due to the internal circuit of S, Z and T types (with energy saving circuits). Allowable voltage fluctuations should be within the range below.
1 SRH MPa e SRP SMC t q SRF OUT IN ITV MC cartridge element u IC i Seperation element Flow hole A ITVH y Auto-drain type w ITVX !0 PVQ o r VY1 VBA VBAT AP100 Drain Port size 1 4 Drain Component Parts Replacement Parts No. Description AMR3000 AMR4000 AMR5000 AMR6000 Model Material Qty Part no. Description No.
If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.
VEA 0.50 0.25 VY1 0.45 VBA VBAT 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point AP100 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 705 Series ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t
VBA VBAT Rc 1/2 0.50 0.25 AP100 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 763 ARP20/30/40 Series Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t
D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T
T 4-J x E 0 -0.1 L Cylinder tube outer circumference: TC Hard chrome plated + special treatment WP X F GW GP 4-LD D QW PW 2 x 4-MM thread depth M W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31 171. 2 4.2 171. 14 M5 x 0.8 x 7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2 241. 11 M6 x 1 x
Dimensions L5 D4 Applicable tubing O.D. d H (Width across flats) A L4 D1 L3 D3 L1 M D2 T L2 [mm] Model T H D1 D2 D3 D4 L1 L2 L3 L4 L5 A M Weight [g] AS221F-G01-06W2D G1/8 12 13.2 14.2 14 7.2 23 31 17.6 39.2 1.2 34.7 17 26 AS221F-G01-08W2D 15.2 25.3 32.4 18.5 28 AS221F-G01-10W2D 18.5 32.1 39.2 21 30 AS221F-G02-06W2D G1/4 17 13.2 18.5 17 7.2 25.2 34.4 20.2 42.8 1.2 36.8 17 46 AS221F-G02-08W2D
9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.
L CKZP 57 T 25 TF TF T 25 CKZP 71 Switch output display Bore size Retracted Extended Nil Yellow Red 71 71 mm R Red Yellow Port thread types TF G TN NPT Proximity switch T TURCK P P&F Stroke 25 25 mm 50 50 mm Proximity Switch Specifications Specifications Bore size 57 71 Manufacturer TURCK P&F Power supply voltage 10 to 30 VDC 10 to 30 VDC Fluid Air Output N.O., PNP N.O., PNP Maximum operating
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11
r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust