1

40 88 40 16.5 24.5 3/8 29 32 77.5 35 64 52.5 71.5 28 77.5 69.5 69.5 57.5 104.5 71.5 73.5 6 XSA Series Special Option/Replacement Parts Special Option Special Electrical Entry Direction 2 1 S 5 G 1 XSA 2 Enter standard product number.

Clean Regulator/Fluororesin Type

Description Material Note 12 Fluorine coated Valve spring 1 14 15 16 Insert bushing Nut Collar New PFA New PFA New PFA 13 Fluorine coated Valve spring 2 883 SRF Series Dimensions/SRF10 Integrated fittings 23 Pilot port Rc, NPT 1/8 12 R 54 32 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 IN OUT 26 32 5.5 (81) HEX.18 With nut 23 Pilot port Rc, NPT 1/8 12 R 48 32 40 1 2 SMC 4 x 3.5 (Mounting hole

PFxx-OMU0002

(reed or solid state input) for 30 ms or longer 18 No.PF-OMU0002-D NPN + Analogue output type PF3A7H--ES/FSMaximum load current: 80 mA Internal voltage drop 2 V max.

Digital Flow Monitor

(increment of 1 sec.), 20 sec., 30 sec., 40 sec., 50 sec. and 60 sec.

MWP_E

Replace the switch with a new one if the problem is not solved. switch -18- Basic Construction Fig.5 MWPU63-40-5-** Assembly drawing Fig.6 MWPU63-40-5-** Assembly drawing Fig.7 MWPQ125-40-5-** Assembly drawing Fig.8 MWPQ125-40-5-** Assembly drawing -19- Fig.5 -20- Fig.6 -21- Fig.7 -22- Fig.8 -23- Revision history Initial Release SZ Edition A *Document report P.13 TP Edition B *Document report

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

LEJ-OM004xx

The vacuum aspiration fluence shows the fluence immediately before piping in the actuator. 5 - 3.How to Order 11LEJS 40 A 500 S2 1 10 9 8 7 4 5 3 2 6 *1 (2) Motor type (3) Lead [mm] (1) Size 40 LEJS40 LEJS63 Output [W] Actuator size Compatible controller Type 63 16 A 20 AC servo motor (incremental encoder) S2 10 8 B LECSA-S1 40 100 (5) Motor option AC servo motor (incremental encoder) S3

Compact Low Friction Cylinder Compact Low Friction Cylinder Compact Low Friction Cylinder Compact Low Friction Cylinder Metal Seal Type Metal Seal Type Metal Seal Type Metal Seal Type MQ MQ MQ MQ Series Series Series Series (M

Compact Low Friction Cylinder Compact Low Friction Cylinder Compact Low Friction Cylinder Compact Low Friction Cylinder Metal Seal Type Metal Seal Type Metal Seal Type Metal Seal Type PRODUCT NAME MQ MQ MQ MQ Series Series Series Series (MQQ10 (MQQ10 (MQQ10 (MQQ10 40/MQM6 40/MQM6 40/MQM6 40/MQM6 25/MQP4 25/MQP4 25/MQP4 25/MQP4 20) 20) 20) 20) MODEL / Series / Product Number Contents

Solenoid Valve

Note)With quick response type, approximately -40 V of coil surge voltage is generated when the valve is switched OFF. Double solenoid type SQ1000/2000 3 position type SQ1000/2000 4 position dual 3 port type SQ1000/2000 Note) With quick response type, approximately -40 V of coil surge voltage is generated when the valve is switched OFF.

Compact Guide Cylinder

40 6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198 46 65 11 10 64 148 63 77 49 12 16 192 212 58 75 11 10 78 162 80 96.5 56.5 16 24 238 262 54 90 13.5 16 91.5 202 100 116 66 19 31 280 308 62 100 15.5 22 111.5 240 Caution Do not use this cylinder as a stopper.

A

31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth

FILTER REGULATOR

Applicable tube D.O. 10 NPT3/8" 18 Option Note 2 Note 2 Semi-standard Semi-standard Semi-standard 2 Port thread Part no. Part no. Port thread Rc Rc AD48-A AD48-2-A G G NPT AD48N(-Z)-A NPT AD48N-2(Z)-A Semi-standard 6 External B B Port thread Part no. appearance Rc drawing and AD48-6-A part no. G NPT AD48N-6(Z)-A Applicable tube D.O.

F/ISE

Reference page Item 3 Output type Example of internal circuit and wiring 4 Auto shift function, Chattering prevention function 5 Measures to be taken when error occurs 6 11 For General Fluids High Precision Digital Pressure Switch Series ZSE60F/ISE60 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 Bracket A ZS-24-A View A Bracket D A 30 20 20 45 55 4.5 4.2 11.5 40

70pvvna

VDW VQ Flow characteristics Weight (kg) External pilot solenoid Port size Rc Orifice size (mm) Air operated Model Cv Effective area (mm)2 VX2 VNA4-25A VNA5-32A VNA6-40A VNA7-50A 1 25 32 40 50 220 320 500 770 0.8 1.3 2.1 3.1 0.9 1.4 2.2 3.2 12 18 28 43 VX 1 4 1 2 1 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Drain Separator for Vacuum Series AMJ 1

41 16 53 14 169 (171) 53 1/4, 3/8 AMJ3000 194 (195) 2.3 70 10.5 8.5 26 54 50 17 70 18 205 (206) 70 3/8, 1/2 AMJ4000 273 (274) 3.2 90 13 11 35 66 70 23 90 24 284 (285) 90 3/4, 1 AMJ5000 Note) ( ) is the case for metal bowl. 13-13-5

V

Suction Flow Air Consumption Nil Without E15L Solid State (NPN) E55L Solid State (PNP) M21L Reed M15L Non-contact NZM05H 5Kgf/cm2 / 75PSI 630mmHg 18 12 NZM07H 5Kgf/cm2 / 75PSI 630mmHg 24 23 NZM10H 5Kgf/cm2 / 75PSI 630mmHg 36 46 NZM13H 5Kgf/cm2 / 75PSI 630mmHg 40 95 NZM07M 3.5Kgf/cm2 / 50PSI 630mmHg 20 16 NZM10M 3.5Kgf/cm2 / 50PSI 630mmHg 26 32 NZM13M 3.5Kgf/cm2 / 50PSI 630mmHg 36 70 FOR FURTHER

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specications Model HRSH090-Al-20-l HRSH090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) (GWP1975) Refrigerant charge kg 1.32 Control method PID control Ambient temperature/humidity Note 1), 9) C/% 5 to 45/30 to 70% Circulating uid Note 2) Tap water, 15% Ethylene

Drain Separator for Vacuum Series AMJ

70 205 (206) 18 70 17 50 54 26 8.5 10.5 70 2.3 194 (195) 3/8, 1/2 AMJ4000 90 284 (285) 24 90 23 70 66 35 11 13 90 3.2 273 (274) 3/4, 1 AMJ5000 Note) ( ) is the case for metal bowl. 13-13-5

Digital pressure switch for energy-saving control ejector

(page 40, "3,"). 2, After the security code is entered and the indication changes to [UnL], Press and hold the and buttons simultaneously for 5 seconds or longer. [000] is displayed and the new security code should be entered. For how to input the security code, refer to "How to input and change the security code".

Soft Start-up Valve AV2000/3000/4000/5000

31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth