Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Standard Nil A Both ends adjuster P Note) Axial piping CS Extension

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard Nil P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

Compact Cylinder: Plate Type Double Acting, Single Rod Series CQU Size: 20, 25, 32, 40

Size Rod end thread 20 25 32 40 Piston area equivalent to 20 mm Piston area equivalent to 25 mm Piston area equivalent to 32 mm Piston area equivalent to 40 mm Rod end female thread Rod end male thread Nil M Cylinder stroke (mm) Size Stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 20, 25 32, 40 Applicable Auto Switches/Refer to pages 13 through

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

V IC circuit Solid state auto switch Reed auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V,12 V Relay, PLC 24 V Grommet Yes 12 V 5 V,12 V Water-resistant (2-color indicator) IC circuit 12 V 2-wire (Non-polar) Magnetic field resistant (2-color indicator) 3-wire (NPN equivalent) A96V A96 5 V IC circuit Yes Grommet A93V2 A90V A93 A90 100 V Relay, PLC 2-wire 12

Solid State Auto Switch

D-M9NA D-M9NAV D-M9PA D-M9PAV D-M9BA D-M9BAV Lead wire orientation In line Perpendicular In line Perpendicular In line Perpendicular Wiring 3-wire 2-wire Output NPN PNP Applicable load IC circuit/Relay/PLC 24 VDC Relay/PLC Power supply voltage 5/12/24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40

ITV0000

(For details, refer to "Specific Product Precautions 1" on Page 11.) 26.5 Bushing assembly 2.7 Note) For dimensions of the cable connector, refer to single unit on page 6. 7 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Manifolds 20 40 20 40 4-M3 x 0.5 thread depth 3 Mounting hole 11 11 L2 Port position L1 25 No. 9.5 9.5 z x c 1 3 5 ITV00 EXH SUP OUT ITV009 PWR PWR PWR PWR ATM

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10

Air Cylinder Double Acting, Single Rod JMB Series ø 32, ø 40, ø 45, ø 50, ø 56, ø 63, ø 67, ø 80, ø 85, ø 100

Air Cylinder Double Acting, Single Rod JMB Series 32, 40, 45, 50, 56, 63, 67, 80, 85, 100 How to Order With auto switch JMDB 32 50 M9BW B With auto switch (Built-in magnet) Not available without magnet Number of auto switches Nil 2 S 1 3 3 n n Mounting B Basic Auto switch Bore size Nil Without auto switch 32 32 mm 40 40 mm 45 45 mm 50 50 mm 56 56 mm 63 63 mm 67 67 mm 80 80 mm 85 85 mm 100

Air Cylinder: Standard Type Double Acting, Single Rod Series NCG/CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Bore size 20 25 32 40 50 63 20 mm (3/4) 25 mm (1) 32 mm (1-1/4) 40 mm (1-1/2) 50 mm (2) 63 mm (2-1/2) Cylinder stroke (inch) How to Order Without auto switch 40 L 25 N CG1 L N 25 M9NW 40 CDG1 With auto switch Number of auto switches Built-in magnet Mounting style Nil S n 2 pcs. 1 pc. n pcs.

76

Therefore, the amount of condensed water is as follows. 140 (60) 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218 psi (1.5 MPa) 189 psi (1.3 MPa) 160 psi (1.1 MPa) 131 psi (0.9 MPa) 102 psi (0.7 MPa) 73 psi (0.5 MPa) 44 psi (0.3 MPa) 15 psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4 (20

XLDV Series

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

DIN terminal: VKF334-D-01 Base mounted Grommet: VKF334-G-01 33.5 16.7 26 4 Manual override (Non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 MAX.10 2-4.3 (Mounting hole) Applicable cable O.D. 4 to 6.5 48.5 300 26 4 Pg.7 3 27 (Lead wire length) Manual override (Non-locking) A 20.5 18.5 mPm 3 32 59 68 78 70.5 43.5 12 7.5 P R 7.5 12 43.5 13.5 11 33.5 P R 13.5 11 Refer to grommet type for other

3 Port Solenoid Valve Metal Seal Series VZ200 1

10 2-M5 x 0.8 L side Max.10 91 23 18 (Lead wire length) Manual override (Non-locking) 300 300 2-M5 x 0.8 300 (Lead wire length) (Lead wire length) 92 84.3 Stations n: Stations Formula L1 = 19n + 12 L2 = 19n + 40 2 50 78 3 69 97 4 88 116 5 107 135 6 126 154 7 145 173 8 164 192 9 183 211 10 202 230 Symbol L1 L2 4-15-17 18 Series VZ200/400 Precaution 1 Be sure to read before handling.

MVGQ

light only) With energy saving circuit MVGQ 12/16 10, 20, 30, 40, 50, 75, 100 100 V 0.78 (With indicator light: 0.81) M L 20, 30, 40, 50, 75, 100 125, 150, 175, 200 110 V [115 V] 0.86 (With indicator light: 0.89) [0.94 (With indicator light: 0.97)] MVGQ 20 Apparent power (2) CV AC (VA) Intermediate stroke (mm) 200 V 1.18 (With indicator light: 1.22) MVGQ As for the intermediate strokes (by

VHK

VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 9.7 7.2 3 8 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64 71 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 22 46 78.2 30.5 47.7 80.2 31.5 48.7 21.5 4 20.8 21.8 14 3.2 72 70 22 70 72 10 12 VHK-B2A 49 17 1 30 25

DOC1020530

Actuator operation from host . 40 8.1 CiA 402 drive profile . 40 8.1.1 FSA state . 40 8.1.2 Controlword / Statusword . 41 8.1.3 Control mode . 42 8.2 Parameter setting . 43 8.3 Servo-on and Homing . 44 8.4 Positioning operation (Profile position mode) . 45 9.

EXxx-OMZ0016

Registration of Remote 10 (Wireless channel 10) Remote Registration of Remote registration 11 (Wireless channel 11) information Wireless Registration of Remote 12 channels (Wireless channel 12) 8-15 Registration of Remote 13 (Wireless channel 13) Registration of Remote 14 (Wireless channel 14) Registration of Remote 15 (Wireless channel 15) *1: The LED indicator W-MS indicates the system

2/3 Port Valve for Various

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

ChemicalThermo-con

12 Pressure loss Pressure loss 60 60 9 9 40 40 6 6 20 20 3 3 0 0 5 10 15 0 0 5 10 15 Flow rate (L/min) Flow rate (L/min) 179 Series HED Dimensions Unit: inch (mm) HED003-W2ll Heat exchanger HED003-HWl Temperature controller HED003-C2l Communication connector The RS-232C uses only lower side connector.