Type: [Fitting] One-Touch Coupling, Fitting Type: Union with different diameters, Tube Size 1(φ): -, Body Material: [Brass] Brass (Electroless nickel plating), Application: Standard/Mini, Packing, Material of O-Ring: [Fluororubber] Fluorine Rubber, Tube to Tube Reducing Union Shape: [Unequal Dia. Union Y] Unequal Dia. Union Y, Compatible Fluid: Water / Air, Number of Connection Tubes(piece

Type: [Fitting] Pipe/Plug, Fitting Type: Other shapes, Body Material: 316 Stainless Steel, Application: Standard/Mini, Packing, Material of O-Ring: [Fluororubber] Fluorine Rubber, Shape: [Others] Sputtering Cover, Compatible Fluid: Water / Air, Applicable Fitting Size (mm): -, Applicable tube fitting size (inches): 3/8

Type: [Fitting] One-Touch Coupling, Fitting Type: Union with different diameters, Tube Size 1(φ): -, Body Material: 316 Stainless Steel, Application: Standard/Mini, Packing, Material of O-Ring: [Fluororubber] Fluorine Rubber, Tube to Tube Reducing Union Shape: [Unequal Dia. Union Straight] Unequal Diameter Straight, Compatible Fluid: Water / Air, Number of Connection Tubes(piece): 2

Type: [Fitting] One-Touch Coupling, Fitting Type: Union with different diameters, Tube Size 1(φ): -, Body Material: [Brass] Brass (Electroless nickel plating), Application: Standard/Mini, Packing, Material of O-Ring: [Fluororubber] Fluorine Rubber, Tube to Tube Reducing Union Shape: [Unequal Dia. Union Tee] Unequal diameter Straight, Compatible Fluid: Water / Air, Number of Connection Tubes

Type: [Fitting] One-Touch Coupling, Fitting Type: Union with different diameters, Tube Size 1(φ): -, Body Material: 316 Stainless Steel, Application: Standard/Mini, Packing, Material of O-Ring: [Fluororubber] Fluorine Rubber, Tube to Tube Reducing Union Shape: [Unequal Dia. Union Tee] Unequal diameter Straight, Compatible Fluid: Water / Air, Number of Connection Tubes(piece): 3

Body Size: -, Applicable Tubing: -, AS: AS, Size: 3/8 Basis, 1F: 1F, Tube Size: 3/8"

Body Size: -, Applicable Tubing: -, AS: AS, Size: 1/2 Basis, 1F: 1F, Tube Size: 3/8"

Size: 15 [71scfm, 120m³/hr (ANR)], Voltage: Single-phase, 115VAC, 60Hz, Connection Port Thread: -, Option: -

Size: 6 [25scfm, 43m³/hr (ANR)], Voltage: Single-phase, 115VAC, 60Hz, Connection Port Thread: -, Option: -

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: AC100V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Applicable Cylinder Diameter(Ø): -, Pressure Rating(MPa): 0.1 to 0.7, Driving Type

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: AC100V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Applicable Cylinder Diameter(Ø): 100 or Less, Pressure Rating(MPa): 0.15~0.7, Driving

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: AC100V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Retaining, Valve Positions: 2-Position Normally Open, Applicable Cylinder Diameter(Ø): -, Pressure Rating(MPa): 0.1 to 0.7, Driving Type: Pilot Type Spool, Pilot

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: AC100V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Retaining, Valve Positions: 2-Position Normally Open, Applicable Cylinder Diameter(Ø): -, Pressure Rating(MPa): 0.1 to 0.7, Driving Type: Pilot Type Spool, Pilot

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: AC100V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-PositionExhaust Center, Applicable Cylinder Diameter(Ø): -, Pressure Rating(MPa): 0.2 to 0.7, Driving Type: Pilot Type

Series: 3 (VQ30), Stations: 11 Stations

Piping: 2 (Top Direction), Body Color: W (Urban White), Piping Type: Rc, Connection Size: 11 [S Coupler Plug (Rc Type Only)]

Piping: 2 (Top Direction), Body Color: BU (Dark Blue), Piping Type: Rc, Connection Size: 11 [S Coupler Plug (Rc Type Only)]

Piping: 1 (Bottom Direction), Body Color: W (Urban White), Piping Type: Rc, Connection Size: 11 [S Coupler Plug (Rc Type Only)]

Piping: 1 (Bottom Direction), Body Color: BU (Dark Blue), Piping Type: Rc, Connection Size: 11 [S Coupler Plug (Rc Type Only)]

Size: 11 [59scfm, 100m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz)