HRX-OM-Y098

(Refer to About TEMP READY function (P.527) for TEMP READY function.) Display [ ] if the circulating fluid discharge pressure has reached the pressure limit value. (Refer to About control function of circulating fluid discharge pressure (P.5-32) for details of PRESS LIMIT.) Ready / P.

HRX-OM-X037

P.5-12 (16) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (17) Operation mode P.5-12 Common or serial communication ( mode). (18) Operating condition display It indicates the run and stop status of the product. P.5-12 (19) Run/Stop To run/stop the product.

ZPT/ZPX

Calculation D n W P t : Pad diameter (mm) : Number of pads used : Lifting force (N) : Stable vacuum pressure (kPa) : Safety factor: Horizontal pad contact: 4 (dynamic) Vertical pad contact: 8 (dynamic) Pad W D = 3.14 x P x n x t x 1000 4 1 W Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

PF2x7.eng

U P DOWN Press and SET : Accumulation starts and flashes.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

VDW

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

CL

For stopping accuracy, refer to Series CLJ (P. 9-2-12), Series CLM2 (P. 9-2-20), Series CLG1 (P . 9-2-30), and Series CL1 (P . 9-3-2) respectively. 7. In order to further improve stopping accuracy, the time from the stop signal to the operation of the lock should be shortened as much as possible.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P

PF2D

Real-time switch output Unit switching Hysteresis mode ON YES Display Real-time flow rate Accumulated flow OFF P-1 P-2 L/min L Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (L/min, L, m3 or m3x10) will be set for the type without the unit switching function.

MQQ

P-80 (N)

IDX-OM-W095

11 T T 11.1 11.2 AC240V / DC24V 5A() / 2A() DC20V 3mA IDFC60/70/80/90 Series 11-1 IDX-OM-W095 T 11.3 AC230V ON A(4-5) B6-7 A4-5A B6-7B 3 5 /() OFF 3 OFF6.2 IDFC60/70/80/90 Series 11-2 IDX-OM-W095 T 11.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFC60-23-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series

SYA3000/5000/7000

R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1 N NPT Port size Without sub-plate Symbol Applicable series Nil NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 1 4 Port size Without sub-plate Symbol Nil With sub-plate 02 SYA5000 1 4 3 position closed

Clean Gas Filter

Construction q t e r w IN Description No.

AC Servo Motor Driver (CC-Link Type)

Select 'MR-J3-T' through Model" "New" and "Project". -7- 1.

Title not found

P Signals and terminal status can be monitored. P Parameters can be set.

VK300

Solenoid direction Port size Opposite side of A port Nil 1 8 Rc G NPT NPTF 01 Rc Nil C4 4 cassette F N T Same side of A port S C6 6 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station CE-compliant VV061 20 20 stations Q CE-compliant Nil P port: Rc 1/8 R port: Rc 1/8 VV100 Note) Applicable only for DIN terminal

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Basic weight 0.74 P Additional weight 0.11/50 stroke P Cylinder stroke 100 stroke P Locking weight 0.08 (Locking at head end, manual release non-locking style) 0.74+0.11X100/50+0.08=1.04kg All mounting bracket 0.11 0.16 0.26 0.27 0.42 0.56 Additional weight per 50 stroke Single knuckle 0.15 0.23 0.26 0.26 0.60 0.83 Accessories Double knuckle (with pin) 0.22 0.37 0.43 0.43 0.87 1.27 1.7-

Microspeed Cylinder

Vertical actuation I II P W A P a (b) (a) P P a A W (1) Basically adjusted with meter-out control. When meter-in control is also used, lurching is reduced. (1) Basically adjusted with meter-out control.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Nil Rc 2 position single G F Port size 1 N NPT Symbol Applicable series Nil Port size Without sub-plate NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 Symbol Nil Port size Without sub-plate Without sub-plate (Pilot port: Expect RC) 1 4

Digital Flow Switch

E N T S 3-Color Display Digital Flow Switch for Large Flow PF3A7H Series PFG300 Function Details PF3A7 H 3-Screen Display Digital Flow Monitor PFG300 Series 3-Color Display Digital Flow Switch for Large Flow PF3A7H Series How to Order p. 9 Specifications p. 10 Flow Range p. 11 Analog Output p. 11 Pressure Loss p. 11 IN Side Straight Section and Accuracy p. 12 Internal Circuits