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l~1 "fd" , ,01 R(PT)1IB M5 X 0.8 With One-touch fillings R{PT)1/4 Rc(PT)lIB 03 'I R(PT)318 02 Rc(PT)1/8 R(PT)1/2 Rc{PT)1/4 04 R(PT)lf4 F02 G(PF)118 f03 R(PT)3/8 G(PF)lIB F04 R(PT)112 G(PF)li4 NOI NPT1/8 lO-32UNF N02 NPTl14 NPT1/8 NPT3/8 N03 NPT1/8 NPT1/2 NPTli4 1'04 Needle Valve/Flow Rate Characteristics ASP330F ASP430F 400 6 'E o,7,08,OY; E 06 12 ~300 200 3 'E ( 0 4 % r !

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

JIS Symbol How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body JIS Symbol Body size Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

5/16" 3/8" Inch size 3/16", 1/4" 1/4" 5/16" Controlled flow (Free flow) Flow rate (/min (ANR)) 130 290 460 420 660 1050 1390 920 230 100 Effective area (mm 2) 2 4.5 7 6.5 10 16 21 14 1.5 3.5 Note) Flow rate values are measured at 0.5 MPa and 20C Flow Direction Symbols on Body How to Order JIS Symbol Symbol 1F 06 D 200 AS Type adjustable by flat head screwdriver Body size 100 200 205 300 400

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Body size 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard Applicable tubing O.D. 1/2 standard Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" With One-touch fittings 4 5/32" 6 3/16" 8 1/4" 10 5/16" 12 3/8" 1/2" Use 1/8" tube. 15-9-97 7 Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS1201FG-M5, AS1211FG-M5 AS1301FG-M5, AS1311FG-M5 AS2201FG-01, AS2211FG-01 AS2301FG-01, AS2311FG-01 AS2201FG-02, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400

reduces flow setting time

Valve/Flow Rate Characteristics AS101FS-M5, AS111FS-M5 AS201FS-01, AS211FS-01 AS201FS-02, AS211FS-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 500 AS-F AS-F Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Flow Rate Characteristics AS201FSG-01, AS211FSG-01 AS201FSG-02, AS211FSG-02 AS101FSG-M5, AS111FSG-M5 300 600 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 500 AS-F Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body Hexagon lock nut Round lock nut J Nil Lock nut option Body size Indication symbol Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Made to Order Refer to page 622 for details. Applicable tubing O.D.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

With One-touch fitting Port size U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 Needle Valve/Flow Rate Characteristics AS2201F-U02, AS2211F-U02 AS2301F-U02, AS2311F-U02 AS2201F-U01, AS2211F-U01 AS2301F-U01, AS2311F-U01 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 06, 07 200 400 01, 23 300

Cylinder

Spring Retracting FOFce {g~ ) Bore size Stroke I0 Stroke 1 Stroke Stroke(mm) 5 I 10 I ' 5 Mopel (mm) (mm) end 6 5"10,15 I 15a I 400 _ _ C _ J_ pe_ 6_ + _ _ ,a.6 ' 131 " t 15.6 CJP. IO 28J3 3 38 10 5 , 1O,~ 25a 610 15 5.10,'5 450 I 1100 *' WeIght of hose nipple(.dgf) IS not included. lllSame spring force 1 0 f each stroke.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Weight (g) Vane type Single vane Double vane CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D 90 Model CRB2BW40-D CRB2BW10-S 90 180 180 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

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Smooth Cylinder 400 _ 800 '200 1600 Strni

Micro Mechanical Valve Series VM1000

Application Weight (g) Actuator Model Polyacetal roller 300 310 320 320 330 420 410 420 400 Basic VFM250-02-00 Mechanical operation Manual operation VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever VFM250-02-01 VFM250-02-01S Hard steel roller One way roller lever VFM250-02-02 VFM250-02-02S Polyacetal roller Hard steel roller Straight plunger VFM250-02-05 Polyacetal

VS 8-2/VS 8-4

number 4 2 1 3 L2 L1 (n-1) x 27 27 36.5 21 56 56 2 21 98 Indicator light Manual override 173 (Double dual 3-port) 139.5 (Single) 188.5 (3-position) 157.5 14 14 14 14 PWR 131 115 COM series EX500 12 12 12 12 SMC 8 SI unit 4 x M5 mounting holes Formula: L1 = 27n + 85, L2 = 27n + 130 n: Stations (Maximum 16 stations) Dimension (mm) 7 L n 9 328 373 112 157 1 166 211 301 346 8 274 319 10 355 400

7

For a 15 orifice (VXD242/Port size 1/2), P 0.16 MPa, for a 20 orifice (VXD252), P 0.055 MPa, for a 25 orifice (VXD262), P 0.032 MPa 1,000 Port size 2 50 Cv = 49 VX2 Port size 1 1/2 40 Cv = 31 500 400 Port size 1 1/4 35 Cv = 23 Port size 1 25 Cv = 12.5 VXK 300 Port size 3/4 20 Cv = 9.5 VXD VXD 200 VXZ Flow rate Q [L/min] Port size 1/2 15 Cv = 5.5 100 VXS Port size 3/8 15 Cv = 4.5 VXB 50

Stability of suction position,

Use a vacuum ejector with a high suction flow rate. 400 Model Selection Condition & Description of improvement Contributing factor Countermeasure Initial adsorption problem (During trial operation) Pressure drop of vacuum piping is large. Reconsider vacuum piping. Use a shorter or larger tube (with appropriate diameter).

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0.019 0.077 0.173 0.307 0.483 0.81 IT,lmtig 400 0.017 0.068 0.154 0.273 0.427 0.72 35~ 0.Q15 0.060 0.135 0.239 0.374 I 0.63 " . > JOCt 0.013 0.051 0.115 0.205 0.320 0.54 , , I?a:20 . 25 I 932 >40 1>50 2T 3T 4T Response time (sec) Aclsorpti&." area (em:!)

Clean Regulator/Fluororesin Type

MPa Deionized water (Pure water), N2 5 to 60C 10 cm3/min or less (fluid: water) 0.24 Maximum operating pressure (pilot pressure) Fluid Ambient and fluid temperature Valve leakage Tubing Integrated fittings With nut 0.08 1.2 Weight (kg) 0.10 0.28 1.3 Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/mL) Particle diameter: 0.1 m or larger 400

CRB2/CRBU2/CRB1

Weights (g) Vane type Single vane Double vane Model CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-D CRB2BW10-S Rotation 90 180 180 90 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange assembly