SMC Corporation of America
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System Error If the error can not be reset after the above measures are taken, then please contact SMC. -54NO.TQ1050188-OM002 Specification Specifications Rated pressure range 100 to -100 kPa Set pressure range 105 to -105 kPa Proof pressure 500 kPa Smallest settable increment 0.1 kPa Applicable fluid Air Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (Protected against reverse

ZQ-OM01501 How to order ZQ ZSV A M W 2 A (1) (2) (3) (4) (1) Vacuum pressure switch Symbol Pressure range [kPa] output specifications A -100 to 100 NPN1 output + Energy Saving Function B PNP1 output + Energy Saving Function (2) Vacuum pressure switch unit specifications Nil Note 1 With unit switching function M Fixed SI unit [kPa] Note 1 ) The unit conversion function is not for use in Japan

JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - () () () () 4 - () * 100 JIS B 8392-1 1.1.21.6.2:2003 5 - * FG 100 m/ s2 ,() 6 - *() 6 33 () () 10m DC(-)() * ( ) () CE CE , 550 7 - * ON, , 1015 10 1% 1745 1 ,OFF 4 OFF * 8 - ZQ ZSV A M W 2 A (1) (2) (3) (4) (1) [kPa] A -100 to 100 NPN 1 + B PNP 1

Ignores excess current per unit for 100 msec after inrush. Disable Does not ignore excess current. Enable Ignores excess current.

48.2 50.0 factor 1.00 1.02 1.05 1.07 1.10 1.12 1.15 1.18 * The DewPoint refers to an ambient temperature of +100F with inlet air at 100 psig and +100 F.

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

0 25 50 75 1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min (ANR)) 14-5

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 100 100 Electronic gear numerator *3 PA06 1 100(Positioning mode: 10) Electronic gear denominator *3 PA07 1 24 16 8 30 20 10 27 42 Feel length multiplication (STM) (Multiplier) PE02 0 0(Less than stroke 1000)/ 0001(Stroke 1000 or more) Home position return type PE03 0010 3Stopper type *4 Home position

(Additional range) Relation between analog input and digital display Set value A B 0.002 0 kPa 2 kPa -0.1 0 kPa -101 kPa F0.1 -100 kPa 100 kPa 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa 1 0 MPa 1 MPa 2 0 MPa 2 MPa 5 0 MPa 5 MPa 10 0 MPa 10 MPa 20 0 MPa 20 MPa 25 0 MPa 25 MPa USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

/4" x 11/10" 11/4" 31.75 11/10" 27.95 O.D. 3.18 0.086" 2.18 1/16" 1.58 I.D.

Fluid Pressure range Scale range (Angular) Accuracy Class HEP Air 100 to 100 kPa 230 3% F.S.

Male thread nozzle High efficiency nozzle 600 400 KN-R02-250 KNH-R02-200 350 Flow rate [l/min (ANR)] Flow rate [l/min (ANR)] 500 300 400 KN-R02-200 250 KNH-R02-150 200 300 KN-R02-150 150 200 KNH-R02-100 100 KN-R02-100 100 50 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Supply pressure [MPa] Supply pressure [MPa] Low noise nozzle with male thread Copper extension

(Additional range) Relation between analog input and digital display Set value A B 0.002 0 kPa 2 kPa -0.1 0 kPa -101 kPa F0.1 -100 kPa 100 kPa 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa 1 0 MPa 1 MPa 2 0 MPa 2 MPa 5 0 MPa 5 MPa 10 0 MPa 10 MPa 20 0 MPa 20 MPa 25 0 MPa 25 MPa USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure

Auto switches are shipped together, (but not assembled). 50 63 80 100 20 25 32 40 50 mm 63 mm 80 mm 100 mm 20 mm 25 mm 32 mm 40 mm Locking direction Extension locking Retraction locking F B Cylinder stroke (mm) Refer to Standard Stroke on page 9-11-21. Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16

Nm (mm) 20 1.5 2.0 0.5 25 2.9 2.0 0.5 32 2.9 2.0 0.5 40 4.9 2.0 0.5 50 11.8 5.0 1.0 63 24.5 5.0 1.0 80 24.5 20.0 2.0 100 42.2 20.0 2.0 6 7 8 9 2-4. 1 2) 3 4 5 6 7 11 1 2 3 1.5~2 2 2. 12 2-5. ,AS 2-6. 2-6-1. CG5N 2-6-2. CG5A 11~2 2 31 4 5 6 7 13 2-6-3.

Replacement partsA 32 40 50 63 80 100 125 Seal kit no. MB32ZCA2-40Z CA2-50Z CA2-63Z CA2-80Z CA2-100 Z-PS MB125-PS PS -PS -PS -PS -PS Rod seal 1 pc Contents of Piston seal 1 pc the seal kit Cushion seal 2 pc Cylinder tube gasket 2 pc Note) Seal kits include grease pack.