SFOD-OMT0005CN

20m * Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (2) 1 2 (5.5) (14) (1) B1 A1 5 6 (17.7) (3) 2 1 (18) A6 B6 (6.3) 15 16 (11) (30.7) -58- 14.3 ()[5m ] (1) (2) LE CP B A B-1 2 A A-1 1 (L) B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shield Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-

Basic Type/Direct Mount Type

Grease pack part number for 6, 10: GR-F-005 (5 g) For external sliding sections GR-S-010 (10 g) For tubing interior Grease pack part number for 15 to 63: GR-S-010 (10 g) 6: not available 6 to 15: not available Phosphate coated C type retaining ring for hole Wear ring A Wear ring B Piston seal Lube-retainer Cylinder tube gasket 6: not available 6, 10 only 1470 CY3B Series Magnetically Coupled

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

60

NBR C37/ B Medium vacuum, Non-leak, Oil-free Note 1) FKM C37/ B Select the built-in full-wave rectifier type for AC spec. Note 2) Water Heated water NBR C37/Cu B EPDM C37/Cu H B Oil Note 3) FKM C37/Cu H Steam PTFE C37/Cu H EPDM C37/Cu Other combinations B PTFE Note 1) The leakage amount (10 6 Pam 3/s) of the option V is a value when the differential pressure is 0.1 MPa.

Hydraulic Filters

Reset button 12 Suction Guard Series FHG Dimensions A 135 170 10 A I 10 Port size: 04 to 16 Port size: 20, 24 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 B H 10 10 L L M C D M Cap C D Cap Air breezer Air breezer (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

energy saving effect

Applicable model Rated current [A] Sensitivity of leak current [mA] Short circuit display method HRSH100--20-B 30 Earth leakage breaker HRSH150--20-B HRSH200--20-B 40 HRSH250--20-B 50 HRSH300--20-B 30 Mechanical button * 400 V type is equipped as standard.

Applicable Auto Switch Model

11 11 11 10 10 9 9 8 8 10 10 Surge absober 10 11 11 11 9 10 10 10 9 9 8 8 10 10 Note) Average value at normal temperature including hysteresis.

Air Slide Table Series MXW

Width across flats 8 5H9 + 0.030 0 depth 4.5 Operating port M5 x 0.8 6 x M4 x 0.7 thread depth 6 Note) A Operating direction (Insert) 6 (Plug: M-5P) 58 27 46 5 24 26 29 26 103 6.5 Operating port M5 x 0.8 Y Y 26 B Operating direction 5H9 + 0.030 0 depth 4.5 (Plug: M-5P) Operating direction B A 9 8 10 15 15 10 7.5 19.2 A 35 26.5 20 Z A Cross section AA 3 4 x M5 x 0.8 thread depth 10 3 x H G

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model D-M9W D-M9A Bore size (mm) D-A9 D-A9V D-M9 D-M9V D-M9WV D-M9AV D-P3DW No. of auto switch mounted 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 10 10 10 10 10 10 10 5 10 10 10 5 10 5 10 5 10 5 10 5 15 15 10 10 10 10 10 5 15 15 15 15 15 15 15 15 15 15 15 15 5 5 5 5 5 5 5 5 5 5 10 5 10 5 10 5 10 5 10 5 10 10 10 10

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

ZSP PS B 10 10 A ISA B PSE With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 IS A ISG (mm) (mm) PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 ZSM A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common Dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 14.4 10 3.4 01: R1/8 N01: NPT1/8 3 8 With across flats 12 M5 x 0.8 7 M5 x 0.8 833 Low Differential Pressure Sensor Series PSE550 Series

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

C + (COM) SOL SOL C (+) B Reset Indicator light ZNR 10 mm Single solenoid type Double (Latching) Note 1) In the case of double (latching), the electromagnetic valve channel is, A(set): P A, B R B(reset): P B, A R A-side energization: A light (orange) illuminates. B-side energization: B light (green) illuminates. Equipped with a wiring error prevention (stop diode) mechanism.

REC

1000 1/4 181 23 10 27 264 10-2-96 10 Sine Cylinder Series REC Rod side flange style: RECF H2 2-RcP Width across flats B2 2-NN G I G H1 Width across flats B1 Plugged (M5 x 0.8) Standard port 2-Eh8 RE A B FY D B MM REC AL Mounting hole 4-7 NA FT K A FX FZ CX F N N Z S + Stroke H CY In the case of 40 ZZ + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

High Power Cylinder:

2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area So (mm2)

CJ2X/CUX/CQSX/CQ2X/CM2X

0.8 10-3-16 16 Series 10-, 11-CM2X Microspeed Cylinder for Clean Room Series 10-, 11-CM2X How to Order Clean Series Mounting style 10 11 Relief type Vacuum type B L F G BZ Basic style Axial foot style Rod side flange style C(D)M2X L 40 10 150 F9BW Head side flange style Boss-cut basic style Boss-cut rod style Flange style RE A B Built-in magnet FZ REC Low speed cylinder Bore size 20 25 32

CJ2X/CUX/CQSX/CQ2X/CM2X

0.8 10-3-16 16 Series 10-, 11-CM2X Microspeed Cylinder for Clean Room Series 10-, 11-CM2X How to Order Clean Series Mounting style 10 11 Relief type Vacuum type B L F G BZ Basic style Axial foot style Rod side flange style C(D)M2X L 40 10 150 F9BW Head side flange style Boss-cut basic style Boss-cut rod style Flange style RE A B Built-in magnet FZ REC Low speed cylinder Bore size 20 25 32

MY1

support B MY-SB 2 x J 2 x H C D A B A B C D E F G H J Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A 61 71.6 15 26 4.9 3 6.5 3.4 M4 x 0.7 B MY-S20A 67 79.6 25 38 6.4 4 8 4.5 M5 x 0.8 B MY-S25A 81 95 35 50 8 5 9.5 5.5 M6 x 1 B MY-S32A 100 118 45 64 11.7 6 11 6.6 M8 x 1.25 B 120 142 MY-S40A M10 x 1.5 55 80 14.8 8.5 14 9 B 142 164 MY-S63A 172 202 M12 x 1.75

XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

3 Position Cylinder Series RZQ

O 2 x N 4.2 b Section b-b Use two through-holes for mounting. 50, 63 Flat washer: 4 positions (Included) 4 x RR 4 x RH Washer b' 4 x O 4 x N b' Section b'-b' Use four through-holes for mounting.

Air Cylinder Series CS1

B B B B B B A A A A A A A Bore size 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 9.5 7.5 13.5 12.5 7 5 3.5 1.5 7.5 5.5 10 8 15 13 12 10 16 14 9.5 7.5 6 4 10 8 12.5 10.5 17.5 15.5 The mounting position should be referred for reference only for the auto switch mounting position at the stroke end

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

I = I + IA kgm (m to m : Mass of I to I kg) D Calculation example When d1 = 0.1m, d = 0.05m, D = 0.04m, a = 0.04m, b = 0.02m m = 1kg, m = 0.4kg, m = 0.5kg, m = 0.2kg, Gear tooth ratio = 2 Cylinder: I I = 0.2 x = 0.03 x 10 -3kg m I = 1 x = 1.25 x 10 -3 kgm 0.1 8 0.04+0.02 12 b IB = (0.13 + 0.1 + 0.03) x 10 -3= 0.26 x 10 -3 kgm 0.05 8 I = 0.4 x = 0.13 x 10 -3 kgm a IA = 2 x 0.26 x 10 -3 = 1.04