8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.
Stations: 02, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: w/o Option, Manifold Individual Supply: w/o Option
Stations: 02, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option
Stations: 02, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: w/o Option, Manifold Individual Supply: w/o Option
Stations: 02, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option
Grommet terminal, Conduit terminal, DIN terminal 1 (P) 3 (R) Note 1) Use dry-air at low temperature.
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: B1 [Supply Valve (N.O.); Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor)
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: D (Push-turn
Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: B2 (Supply Valve, N.O.), Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: D (Push-turn Locking Slotted
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor)
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: K2 (Supply Valve, N.C.), Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor)
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: B1 [Supply Valve (N.O.); Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor)
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: K2 (Supply Valve, N.C.), Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor)
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking
Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: K2 (Supply Valve, N.C.), Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking
Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.
Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.
Stations: 05 (5 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.