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Tubing Size Symbol Type Body Class Tubing outside diameter Metric size 4 04 6 06 8 08 10 10 1/8 03 3/16 05 1/4 07 3/8 11 1/2 13 3 J Inch size Table 2. AC Insert Pin. Holder Assy Model Number LQ-GPJ LQ-GPJ-N LQ-GPJS LQ-GPJS-N LQ-GJLQ-GJ-NLQ-GJSLQ-GJS-NLQ-GC Larger Diameter Tubing How To Order LQ GC Nil B None With bracket Type Table 1.

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

PSxx-OMG0005CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Safety Speed Control Valve (SSC Valve) Series ASS 1

ASS 00 3 AQ ASV Body size Accessory 1 8 Nil None With bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc NPT

AMP

10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

PSxx-OME0003CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Safety Instructions

Also, in order to use it under the optimum state, conduct a regular inspection once a half year. 17-6-10

90

-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

Series LX Construction and Mounting

Description Material Aluminum alloy Stopper B Motor 1 10 Sensor plate Direct acting guide 2 11 Chromated Mild steel Coupling 3 Resin/Alloy steel Aluminum alloy 12 Nut Alloy steel Magnet Rolled screw 4 13 Bumper Body Rubber Anodized 5 14 Aluminum alloy Resin Motor cover Anodized Aluminum alloy Table 6 15 Anodized Aluminum alloy End plate Photo micro sensor 7 16 Anodized Aluminum alloy

EX600-SMJ_eng

SPEEDCON connector wiring method is explained below. (1)Align the mark B on the metal bracket of the cable side connector (plug/socket) with the mark A. Wiring Setting and Adjustment Address X10 OFF OFF OFF OFF OFF OFF OFF OFF 10 Mbps OFF OFF ON OFF OFF (3)When the mark B of the connector has been turned 180 degrees (1/2 turn), wiring is completed.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

lVFl 10

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

Stainless Steel One-touch Fittings Series KG

D1 D2 L1 L2 A M M5 0.8 KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 3.5 2.7 10 19 3.5 7 9.5 16 13.5 15 13 4 1 8 1 4 10 14 7 11.5 22 26 23 25 10.4 10 18 16 4.2 4.2 M5 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20

VQ4000

SY SYJ 0 VQ4 0 1 Plug-in SX 2 5 VQ4 1 Plug lead VK VZ Enclosure Configuration Dust-proof 2 position single 3 position closed center VF (A) 4 (B) 2 (A) 4 (B) 2 Dust tight, jet proof (Applicable to IP 65) W 3 1 VFR 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 VP7 Metal Rubber B: Locking slotted style : Non-locking

33

Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.