VBA-OM-S008

VBA11A 150 337 370 307 163 160 100 200 Rc 3/8 257 60 278 130 regulator A B C D E F G H I J K L M URL http://www.smcworld.com Rc 1/4 20 Rc 1/2 39 IN port Rc3/8 Rc 3/8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 170 180 120 312 2008 SMC Corporation All Rights Reserved Assembly dimensions OUT port (J) Maintenance 411 IN port (I) Akihabara

ISA2.eng

Throttle SUP port Rc, NPT, G1/8 Pressure gauge Red Above set position Solenoid : Do not rotate more than 5 times from fully closed, as the orifice will be pulled out. Appropriate set position Green 1 Safety Instructions Detection port Rc, NPT, G1/8 Green 2 Below set position Slot for removal These safety instructions are intended to prevent hazardous situations and/or equipment damage.

SY3000V-OMY0001

-2SY3000-OMY0001 / 1 1.5 *3) 3)1 1 () -3SY3000-OMY0001 SY Series 5 / / () ( ) () 1 DC DC N.O.( 33 AB , 3 , , () 3 EXH 0.1 2 () () C-R ( ) C-R 3 3 1) 2 , 4 No.SY3000V-OMY0001 SY Series 5 / / 2) ,1V & -10 ,1 1 3 1) M5 () 1/61/4 11.5Nm ) 2)Rc N m Rc 1/8 35 Rc 1/4 812 Rc 3/8 1416 5 No.SY3000V-OMY0001 SY Series 5 / DC () m [] ()ISO VG32 (MSDS) IP65 IP67(IEC60529

VF1000-OMP0001

Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN DIN DIN DIN DIN D 68mm Y 4.57mm

VFS4000-OMY0001

1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 12 No.VFS4000-OMY0001 8 1EXH 260 9 () 1 ISO VG 32 0 10 1) SUP (AM)(AF) 2) SF4-*-* Nm M3 0.450.6 Nm M3 0.81.2 M4 1.42.5 13 No.VFS4000-OMY0001 11 1 2 3 14 No.VFS4000-OMY0001 EXH.

VFR6000-OMQ0001

Nm Rc 1/8 7~9 Rc 3/4 28~30 Rc 1 36~38 5 VFR6000-OMQ0001 VFR6000 Series 5 / 1) 2)1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 \ ( ) 5m 6 VFR6000-OMQ0001 VFR6000 Series 5 / ( ) 3 30 () 1 ( )VG32 2 ()ISO VG32 7 VFR6000-OMQ0001 VFR6000 Series/ / / / DIN DIN DIN DIN DIN +COM,-COM VF6000 VF6000 VF6000 VF6000 0.51.5mm 2 8 10mm 1.25Y-3L1.25-3.5S1.25-4M 1.25-31.25-3S1.25Y-3N1.25Y-3S A(1) B+ (3)

VG300-OMI0003

Rc Rc Rc Nm Rc1/8 79 Rc1/2 2830 Rc3/8 2830 Rc1 3638 -5No.VG300**-OMI0003-A VG3 VG3 VG3 VG342 42 42 42(R) (R) (R) (R) Series Series Series Series 5 30 1 VG32 2 VG32 -6No.VG300**-OMI0003-A VG342 VG342 VG342 VG342(R) (R) (R) (R) Series Series Series Series/ / / / M4X0.7 1.4Nm P A R NC 1 2 2 DIN ( ) No. 1 2 No. 2 2 1 DIN DIN DIN DIN 1 1) X 1/8 2)X 1.PE 2.X PE 3.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

L Manual release (non-lock type) : Suffix N G G WL 2-P (Rc, NPT, G) DL Width across flats KA J RF MO DL MM HR E D E HN H1 AL Width across flats B1 2-cushion valve Width across flats of hexagon hole WB A N F K N M H S + Stroke B C ZZ + Stroke Double lock: CBA2B Bore size -WN Stroke Manual release (non-lock type) : Suffix N Manual release (lock type) : Suffix L End lock CBA2 G G WL 2-P (Rc

Large Bore Compact Cylinder Series CQ2

Width across flats 55 M36 x 1.5 21 47 50 64 200 30 30 2-Rc 1/2 (port size) 2 x 4-31.5 depth of counter bore 26 40 62 62 4-19 through 182 226 3 5.5 Flat washer 4 pcs. Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.

Escapements Series MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

Precision Cylinder Series MTS

Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size M5 x 0.8 Rc

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

Compact End Lock Cylinder Series CBQ2

1/8 7 49.5 14 40 7 40 5.5 9 Rc 1/8 7 57 14 50 8 50 6.6 11 Rc 1/4 8 71 19 63 8 60 9 14 Rc 1/4 10.5 84 19 Series CBQ2 Dimensions Foot type/CBQ2L, CDBQ2L (mm) Foot type B + Stroke L With rear lock With front lock Bore size (mm) L L1 LD A B LS A B LS 89.7 65.5 49.5 82.2 58 42 17 38.5 6.6 32 Special cap bolt 99.2 75 59 88.7 64.5 48.5 17 38.5 6.6 40 LH LY 101.7 75.5 52.5 91.7 65.5 42.5 18 43.5

Air Cylinder NCQ7 Series Compact Cylinder

Type 19 o{rsut NPN NPN PNP NPN NPN Appllcalion Relay, lC, Squence conlroller 24YDC rclay, 8elay, rc, 24VDC rclay, Eby, rc, 4.s-28VDC 5-24VDC 5-24VDC 12-24VDC 5-24VOC 5-24VDC 24VDC Max. lOmA I Max.2omA Loaal volleEa ZSVDC or ls! Max.28VDC 10-28VDC Max.28VDC 10-28VDC Max. 28VDC Mar(. 150m4 Max.'l00mA 5-t00mA 5-4omA I 6-40ma hEmsl vollrgE drop {kitgr l@d voftlg!

Compact Cylinder with Air Cushion Series RQ

1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end nut and accessories.

Sine Rodless Cylinder Series REA

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2

For Water Digital Flow Switch Series PFW

For Water Digital Flow Switch Series PFW How to order PFW7 20 03 27 Integrated display type Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Unit specification Thread type Nil M With unit switching function Fixed SI unit Note) Rc NPT G Nil N F Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l 3m lead wire with connector Without lead wire

Solid State Vacuum Regulator Series ITV2090/2091

optional) 2-Rc 1/4 ATM port, OUT port 4-M x 0.8 thread depth 6mm through Mounting hole OUT 2 G 15 19 R3.5 25 7 36 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc 1/4 ATM port, OUT port (7) 36 3

Guide Table Series MGF

Port for extending cylinder Port for retracting cylinder Rc 1/8 relief port 3 Guide Table Series MGF Construction When the cylinder is extended When the cylinder is retracted Description Material Note Parts list Description Material Note Parts list No. No.

Large Type Vacuum Unit Series ZR

(PT) 1/8 port PV (vacuum pump connection port) SMC 2-4.2 (mounting hole) PS 51.5 41.5 2 20 32.5 27.5 Filter block D 16.5 16 PV 2 8 13 3 1.5 Adapter G 1 4 Bracket A Bracket A 128.7 100.8 (9.8) 4.5 Rc(PT) 1/8 port V (vacuum pad connection port)