Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 550mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo Motor

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 400mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 400mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo Motor

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 400mm, Motor Option: w/o Lock, Vacuum Port: Right, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 550mm, Motor Option: w/o Lock, Vacuum Port: Right, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 300mm, Motor Option: w/Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo Motor

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 600mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 800mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo

Series: Clean Series Ball Screw Drive, Accuracy: High Precision Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 100mm, Motor Option: w/Lock, Vacuum Port: Left, Positioning Pin Hole: Body Bottom, 2 Locations, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6

Air-hydro Unit

Effective oil level stroke (mm) Converter nominal size/stroke (mm) 50, 100, 200, 300, 400, 500 100, 200, 300, 400, 500, 600 200, 300, 400, 500, 600, 700, 800 63 100 160 Specifications Operating pressure 0 to 0.7 MPa Proof pressure 1.05 MPa 5 to 50C Ambient and fluid temperature Fluid Turbine oil (40 to 100 mm2/s) Converter Standard Effective Oil Level Stroke/Effective Volume (cm3) Converter

Process Valve

Note 2)) 5 to 50C Note 1) (Air operated type: 60C) Pressure range External pilot air Lubrication Temperature Unrestricted Note 3) Mounting orientation Note 1) No freezing Note 2) Lubrication is not allowed for use with EPR seal material. Note 3) For external pilot solenoid, it is recommended that the pilot solenoid valve be oriented either vertically upward or horizontally.

Process Valve

Air Operated only) Ambient temperature External pilot solenoid VNB0 B C 2 1 1 2 5 to 50C Note 1) (Air operated type: 60C) 1.5 MPa Low vacuum to 0.5 MPa Low vacuum to 1 MPa 0.25 to 0.7 MPa 0.1 + 0.25 x (Operating pressure) to 0.25 + 0.25 x (Operating pressure) MPa Note 3) Refer to Graph (1) on page 568. Not required (Use turbine oil Class 1 ISO VG32, if lubricated.

Coolant Valve

Lubrication Temperature Allowable voltage fluctuation Not required (Use turbine oil Class 1 ISO VG32, if lubricated.) 5 to 50C (Air operated type: 60C) Note 1) SGC 35C or less (when rated voltage is applied.) 50C or less (when rated voltage is applied.)

High Pressure Coolant Valve

Pilot Operated Solenoid Valve Specifications VO307D DZ1(-Q) DIN terminal Pilot solenoid valve Electrical entry Coil rated voltage (V) AC (50/60 Hz) DC 100 V, 200 V, Other voltage (Semi-standard) 24 V, Other voltage (Semi-standard) 15 to +10% of the rated voltage Allowable voltage fluctuation Temperature rise 50C or less (When rated voltage is applied.)

0.4

Flow rate characteristics: C Max. operating frequency 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SZ SUP side pressure (P1) To CYL port VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Buffer stroke 40 50 63 80 100 125 Series ZPT ZPX Related 25 50 75 100 Equipment Pad Material and Characteristics Characteristics Operating temperature range (C) Oil resistance gasoline Oil resistance benzol Base resistance Acid resistance Weatherability Ozone resistance Abrasion resistance Waterproof Solvent resistance (Benzene, toluene) Durometer HS (5C) Material 50C 50C 50C 60C 60C NBR

Air Tank Series AT 1

Use a pressure gauge below 50C. The Max. operating temperature of the standard accessory Pressure gauge is 50C. If temperature of the air tank exceeds 50C, provide a heat radiator (i.e. pipe siphon, etc.) between the tank and the pressure gauge. 3. Please keep the Class 2 Pressure Vessel Certificate in a safe place.

CC

CCVS10-U1 Option Specifications Combined valve Control valve Stop valve, Skip valve Specifications Throttle valve Flow control valve Small flow Large flow Small flow Large flow Timid flow Small flow Large flow 0 to 0.7 MPa 0 to 0.7 MPa 0.3 to 0.7 MPa Operating pressure 0.3 to 0.7 MPa External pilot pressure 1.05 MPa Proof pressure 5 to 50C Ambient & Fluid temperature Turbine

MVGQ

type. 10-16-4 5 Valve Mounted Guide Cylinder Series MVGQ Specifications JIS Symbol Meter-out 12, 16, 20 Bore size (mm) Rod extended when energized Rod retracted when energized Double acting Action Air Fluid Slide bearing (MVGQM), Ball bushing bearing (MVGQL) Bearing type Operating pressure range (MPa) 2 position single 0.15 to 0.7 12, 16: 0.12 to 0.7, 20: 0.1 to 0.7 2 position double 10 to 50C

0.5

The specified ambient temperature range for ionizer is 0 to 50C, and for AC adapter is 0 to 40C. Avoid sudden temperature changes even within specified ambient temperature range, as it may cause condensation. 2. Do not use this product in an enclosed space. This product utilizes a corona discharge phenomenon.