SMC Corporation of America
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Filter Series FN1/FN4 Blocking Characteristics (Repeatability) P Fluid: Potable water P Supply pressure: 0.2 MPa P Flow rate: 20 l/min P Test dust: AC course test dust P Test method: Per SMC test method Filter part no.: FN1101N-10-Sl, FN4102N-20-Sl Element: END100-020 (Cylindrical type, 20 m) 0.2 Pressure loss (MPa) 0.1 0.01 0 T1 T2 T3 T4 T5 100% 100% 100% 100% 100% 0 0 0 0 Time it takes

IDFA4E to 8E-23-T IDFA11E-23-T GFGI For Option R GFGI For Option R 1 2 3 L N PE 1 2 3 L N PE TB TB MC TDR MC TDR ILS ILS For Option V EVD For Option V MC TDR EVD MC TDR PTC OLR MC PTC OLR MC PE CM PE CM PE FM1 PRS PE FM1 P PRS FM2 PE MC TDR P FM2 PE In FM2, only for DFA6E/8E MC TDR IDFA15E1-23-T Symbol Name Operation Failure L N PE 1 3 2 TB CM Compressor Motor TDR MC FM1,FM2 Fan Motor ILS

Note 6) Block, Auto switch capable, S and T only available as special.

Calculation Pad W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm 2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more Horizontal lifting Vertical lifting W = P x S x 0.1 x 1 t This type of application should basically be avoided.

-11 CM MC C1 CM ILS MC ILS V V CN CN MC V V CN CN PRS PRS IDFB37E IDFB55E/75E-46 CM GFCI R FM FM16 MC THR MC1 MC1 MC2 CM PE PRS MC2 PRS1 FM PE PRS2 PRR PRR ILS C01 THR W1 TB T TB1 W2 TB2 MC1 PRR C01 CM C1 MC2 PRS1 GFCI P PRS2 THR OLR P EDV PC EDV PE T V IDFB Series 6-4 6-3 IDX-OM-W035 6 6-5 (IDFB55E,75E) (IDFB22E,37E) ,, IDFB Series 6-5 6-4 IDX-OM-W035 7

low particulate generating vacuum grease. p r Non-contact construction a w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tube's exterior surface and the slide table's internal surface. a t e l u g c Reduced initial particulate generation 3 e i t n r a e p r a w t i o o n L No contact Cleaned, assembled,

0.8 1 (SUP) port 2-M5 0.8 3 (EXH) port L2 L1 3 10.5 7 P = 7.2 4.3 8 21.5 4.3 4.0 11.9 3 1 3 1 18.9 24 22 5 150 (lead wire AWG#26) 22 2-3.4 Mounting hole 6.4 n U side 1 2 3 4 5 D side (21.5) (10.5) 21.5 2 2 3.9 P = 7.2 11 n-M3 0.5 2 (OUT) port Dimensions Formulas: L1 = n 7.2 + 8.8, L2 = n 7.2 + 14.8, n: Stations (maximum 20 stations) n L 12 95.2 101.2 19 145.6 151.6 2 23.2 29.2 3 30.4

( di spl ayed al t ernat el y) Press Skey f or 2 seconds or m ore, t hen go out f rom det ai l set t i ng m ode. ( Sel ect t he m enu w i t h or keys, t hen j um p t o anot her i t em . ) Lock keys ( ref er t o P9) Rel at i on bet w een set t i ng and sensi t i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y D ef aul t : 13 - Zero clear The display can be reset to

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.

low particulate generating vacuum grease. p r a Non-contact construction w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tubes exterior surface and the slide tables internal surface. a t e l u g c Reduced initial particulate generation e i t 3 n r a e p r a w t i o o n L No contact Cleaned, assembled, inspected

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

Description XLS-16XLS-16-P XLS-25XLS-25-P (2) Coil assembly XLS16-20-*G,C,D,T XLS16-20-P*G XLS25-20-*G,C,D,T XLS25-20-P*G (6) Core assembly XLS16-30-1 XLS25-30-1 (4) Armature assembly XLS16-30-2 XLS25-30-2 (3-1) Core O-ring AS568-018V AS568-018V (3-2) Bonnet O-ring AS568-025V AS568-030V Note) Enter voltage no. at * G, C, D, and T after * mean the symbol showing an electrical entry. 6 XL

p p p m m m m m m m p p p p p p p p m m m m m M m M m R p m p p p m m m M m R m p R M p m p p m p m p M m m m m M m p p M m M p p m m m m p m M M m R m m m p m m p m m p p m p m p m p m m R p m m p m p m m M M m m m m p m m p M m p m p m m m m p m M p p m m R p p p p p p p p R p p p m m p m m R p m p m p m m p M p m m m m p p m p p m p m m p R m p p p R m p p p R p p m m p m m p p p p p p

(Refer to the flow characteristics.) 1 (P) 2 (A) 3 (R) Current A Current A Choked flow Q: Air flow rate [L/mi (ANR)] P: Valve-inlet pressure [MPa] S : Effective area [mm2] t : Temperature [C] 293 273 + t Q = 120 x S (P + 0.1) F1 solenoid F2 spring Flow Characteristics: 2 Port Controlled opening 1 (P) 2 (A) 3 (R) Spool Effective area (mm2) 1 (P) 2 (A) 3 (R) Sleeve Current A Current A Choked

8 H O W T O O R D E R (N)VM400 A C T U AT O R O N LY P A R T N O.

Option Symbol and Composition Fluid Name and Option Option symbol Seal material Coil insulation type Body, Shading coil material Fluid (Application) Option symbol and body material Brass or BC6 Stainless steel Applicable valve 10A to 50A 10A to 25A F, B L, J B J Note 1) Standard A B C D E F G H J K L N P Q S T NBR FKM Ethyl alcohol Ethylene glycol Caustic soda (25% ) Gas oil Silicon oil

S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.