Digital Flow Switch for Deionized Water and Chemicals Series PF2D Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).
Measure the amount of clean water which is dispensed 10 times continuously and convert it to one shot of dispensed volume. Repeat this measurement 10 times, and indicate the difference (%) between the average value of 10 sets of data (converted value of one shot) and the maximum and minimum values.
10 stations Symbol VVXA31 VVXA32 VXA31 5-00 Applicable valve TI/ TIL Port size (Individual port) 1 2 Rc Rc VXA32 5-00 1 8 1 4 PA All common ports are Rc 1/4.
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It is possible to avoid discoloration by installing a super mist separator which absorbs vaporized oil and an odor removal filter. It is recommended to add the super mist separator and an odor removal filter after replacing the dew point indicator. Table 3-1.
The assembly, operation and maintenance of machines or equipment including our products must be performed by an operator who is appropriately trained and experienced. 3.
Two Hand Control Valve VR51 Series RoHS An output is available through synchronized, twohanded operation (within 0.5 s)!
2 Caution Zinc alloy Handle C3604B rubber-lining Valve q Because an improper operation or an air leak could result if the handle is stopped in an intermediate position, make sure to operate the valve quickly, making sure that the switching has been properly effected.
The response behavior of an electropneumatic proportional valve is affected by the load capacity. Therefore, select an electro-pneumatic proportional valve in accordance with the bore and the stroke of the cylinder to be used. (The diagram below is provided as a guide.)
When system performance declines due to filter element clogging, worn vacuum pads, piping leakage, etc., the switch can detect and indicate an oncoming problem before failure occurs.
Install an air filter (the AF series) as a preliminary filter on the inlet side of the mist separator regulator to prevent premature clogging. 2. Install an air filter (the AFM series) as a preliminary filter on the inlet side of the micro mist separator regulator to prevent premature clogging. Mounting and Adjustment Warning 1.
Install an air filter (the AF series) as a preliminary filter on the inlet side of the mist separator regulator to prevent premature clogging. 2. Install an air filter (the AFM series) as a preliminary filter on the inlet side of the micro mist separator regulator to prevent premature clogging. Mounting and Adjustment Warning 1.
Construction / Options / Replacement parts 10 6. Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AFF20) 23 to 24 2) Bowl assembly (AFF20) 25 1) Element assembly (AFF30/AFF40) 26 to 27 2) Bowl assembly (AFF30/AFF40) 28 to 29 11.
Construction / Options / Replacement parts 10 6. Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AMD20) 23 to 24 2) Bowl assembly (AMD20) 25 1) Element assembly (AMD30/AM40) 26 to 27 2) Bowl assembly (AMD30/AM40) 28 to 29 11.
-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 Standard B2401-P8V B2401-P10V (3) Special B2401-P8 B2401-P10 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Nut assembly (9) SUS304 XL1A50-10-1 XL1A80-10-1 Note 1)
4 14-13-13 4 Series ALD600/900 ALD600-06 to 10, ALD900-12 to 20 D.P. Lube Related Products: Strainer At the terminal of an air pressure line in which a D.P. Lube is used, install a strainer (filtration rate of 5 m) upstream with a metal seal solenoid valve, which is susceptible to dust. Float switch mounting position Mounting orientation is upward.
Standard VDW VQ 1 2 4 VNB0 VNB02 VNB03 VNB1 1 4 Port Vacuum Pilot 12 (P1) VX2 Bleed port External pilot External pilot External pilot Caution 10 (P2) 0 1 When using the VNB 1V N.C. vacuum pilot, maintain the specified pilot pressure by providing a tank with an appropriate capacity or by acquiring the pilot pressure from an area near the vacuum pump.
O-ring Seal Seal 6 7 8 9 10 11 12 Zinc die-casted, NBR 126115AP GA46-10-01 AF11-3 126140 11307 126115AP GA46-10-02 AF11-3 126060 11307 126046 126047 Maintenance Warning NBR NBR NBR NBR 1. Before removing the oil filler plug, loosen it two and a half turns to completely release the pressure inside the case.
4 14-13-13 Series ALD600/900 ALD600-06 to 10, ALD900-12 to 20 D.P. Lube Related Products: Strainer At the terminal of an air pressure line in which a D.P. Lube is used, install a strainer (filtration rate of 5 m) upstream with a metal seal solenoid valve, which is susceptible to dust. Float switch mounting position Mounting orientation is upward.