Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 5, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 5, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion:

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 15, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 15, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 15, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06 to 0.7, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06 to 0.7, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 5, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating

Digital Flow Switch ( compatible)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

PFxx-OMX0002

lock 0x0 Refer to "Device access lock parameter" on page 76. 0x000C (16) 0 R Vendor name SMC Corporation 0x0010 (17) 0 R Vendor text www.smcworld.com 0x0011 0x0012 (18) 0 R Product name Example: PF3A703H-xx-Lx-xxx 0x0013 (19) 0 R Product ID Example: PF3A703H-xx-Lx-xxx (20) 0 R Product text FloW sensor 0x0014 Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21