Air Cylinder

Basic 20 22 46 39 66 Axial piping 17 22 46 39 66 Double clevis (including clevis pin) 24 54 43 74 Head-side bossed 20 23 48 40 68 Additional weight per 15 mm of stroke 2 4 7 4 7 Basic weight (When the stroke is zero) Single foot 8 8 25 8 25 Double foot 16 16 50 16 50 Rod flange 5 5 13 5 13 Head flange 5 5 13 5 13 Mounting bracket weight : Mounting nut and rod end nut are included in the

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

(mm) D H Bore size B GA L LB GC GB C A LX LH MM NB Y X NA Z S LD 3.5 through, 6.5 depth of counterbore 4 9.5 M4 x 0.7 12 28 8 4 8 31.5 85 65 10 15 12 14 16 5 11 20 23 16 4.5 through, 8 depth of counterbore 5 5 9.5 16 15 18.3 20 16 5 11 20 26 20 M5 x 0.8 28 8 10 16 31.5 86 66 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

Speed Controller: Standard Type Series AS In-line Type

4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

25

PB1013A/Air-operated type without foot 37 mm 52 mm 37 mm 52 mm 66 mm 66 mm Application Examples Application Examples Space saving (Air operated) Printing machine Semiconductor/ LCD equipment Analyzer for medical and biochemistry Car washing machine Ink/solutions supply DI water/solutions supply, Waste fluid collection Water/ detergents supply Reagents supply Machine tool Cleaning device Devices

Plug-in/Plug Lead: Single Unit

double: VQ5250 1-G H 3 position closed center: VQ5350 1-G H 3 position exhaust center: VQ5450 1-G H 3 position pressure center: VQ5550 1-G H 194.5(200) 121.3 53 73.2(78.7) Indicator light 213 121.3 91.5 13.5 2(B) port 59.5 53 4 (A) port17.5 13.5 2(B) port 59.5 4(A) port 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12

3 Port Air Operated Valve

VP300-224-1 (M3 x 36) VP500-224-1 (M4 x 46) VP700-224-1 (M5 x 66) Thread type Series For valve mounting 3 5 7 VPA344 VPA544 VPA744 Nil F N T Rc G NPT NPTF Caution Tightening Torque of Mounting Screw Port size Symbol 1 2 VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 M3: 0.8 Nm M4: 1.4 Nm M5: 2.9 Nm 1565 VPA300/500/700 Series VPA300 Series/Base Mounted/Dimensions Standard/VPA344-101 02 A B

A

1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57

Two Hand Control Valve

54 7.5 30 10.4 30 42 10.4 2 x 6.5 2 x 6.5 42 8 54 66 Back side mounting Bottom mounting 1684 VR51 Series Specific Product Precautions 1 Be sure to read this before handling the products.

ZQ-OM01401

No.ZQ-OM01401-B 8.6 1 2 32 4 5kPa ( ) 5 6) 7 31 - No.ZQ-OM01401-B 9. 9.1 ZQA [] 5 to 50 () 2] 1) 20 [m/s 2] 2) 100 [m/s CE / UKCA (EMC RoHS ) 1) 10~150Hz X,Y,Z 2 () 2) X,Y,Z 3 () ZQ05A ZQ07A ZQ10A [mm] 0.5 0.7 1.0 [MPa] 0.35 0.43 1) -80 [kPa] 1) 5 10 22 [L/min (ANR) ] 1) 15 25 47 [L/min (ANR) ] (P) 0.3 to 0.5 2) 0 to 0.45 3) [MPa] (PD) [MPa] 0.75 8 6 4 65 68 70 4) () 64 66

VXZ

The apparent power in parentheses is for VXZ2232. 50 66(60) 20 60 57(51) 15 AC VXZ22 DC 50 93 25 60 79 20 AC VXZ23 DC JIS Symbol OUT IN 17-3-63 Applicable Fluids Check List Refer to pages 17-3-62 and -63 for models and specifications. Refer to pages 17-3-62 and -63 for models and specifications.

VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

VHK

L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66

Toggle Type Air Gripper

1.25 bottom hole dia. 6.8 through Thread for mounting attachment 648 A Series MHT2 Toggle Type Air Gripper Dimensions 2 x M10 x 1.5 thread depth 12 Mounting thread 25 MHT2-50DZ 52 100 80 4 x M8 x 1.25 thread depth 14 Mounting thread 10 22 40 54 4 x M10 x 1.5 thread depth 12 Mounting thread (Both sides) 8 8 Open 23 Closed 2 50 0.2 124 110 64 30 7 50 0.2 36 2.5 10 16 60.5 (157) 52.5 35 66

Modular F.R.L. Unit

66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specification Model With barb fitting B 137 173 177 253 266 With drain guide Metal bowl Metal bowl with level gauge B 162 198 202 278 291 B 66 97 142 178 182 258 271 B 136 172 176 252 265 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 27 Air Filter

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

(11-, 22-) G H2 G H1 Width across flats B1 MM FZ FX Eh8 D I 20 to 32 Width across flats KA Relief port (10-, 21-) Vacuum port (11-, 22-) (32,40) Standard port 45 Width across flats NA FT K A AL 1.5 Z H ZZ + Stroke S + Stroke F FY 4 x FD 40 (mm) 12 10 8 6 KA MM NA NN B1 B2 Bore size 4 7 FD E 20-0.033 0 13 8 AL D K 52 40 40 34 B FX FZ FY G FT 46.5 37.5 33.5 28 FL Z H H2 H1 S P I F C2 A ZZ 66

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

21

Up to Up to 21% 21% 21% Up to Up to 66 mm 66 mm 66 mm lighter lighter shorter shorter 138 mm 29 mm shorter CM3 CM3 CM3 NEW Female thread, Boss-cut CM3 CM3 CM3 NEW Male thread CM2 Conventional model Male thread CM3B40-50l stroke Series CM3 CAT.NAS20-212A Series CM3 Female rod end available as standard 2-color indication solid state auto switch mountable Applications expanded by making it possible

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5

MGG

143 304 262 Rc 1/2 40 280 M14 x 2 depth 30 110 With rod side locking With head side locking For locking type For non-locking type Bore size (mm) Bore size (mm) Bore size (mm) Z X W HN HR Y R Q Y R Q 63 80 100 63 80 100 59 45 308 54 86 63 80 100 14 (16) 29 15 142 (154) 63 147 68 53.5 355 66 104 19 (23) 17 40 175 (189) 82 182 79 64.5 410 66 128 19 (23) 23 40 180 (194) 85 188 For long strokes